This article presents a new method for fabricating nanopositioning systems from a single layer of piezoelectric material by ultrasonic machining. The article is among 5 finalists for the best paper award at the IEEE Conference on Advanced Intelligent Mechatronics which will be held in Banff, Canada on the 12th to 15th of July.

A. J. Fleming, G. Berriman, Y. K. Yong (2016): Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material. In: IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016.