Publications

@article{Omidbeike2021,

title = {Five-Axis Bimorph Monolithic Nanopositioning Stage: Design, Modeling, and Characterization},

author = {M. Omidbeike and S. I. Moore and Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/J21g.pdf},

doi = {10.1016/j.sna.2021.113125},

issn = {0924-4247},

year  = {2021},

date = {2021-09-16},

urldate = {2021-09-16},

journal = {Sensors and Actuators A: Physical},

volume = {332},

issue = {1},

abstract = {The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm. Analytical modeling and finite-element-analysis accurately predict the experimental performance. The stage was conservatively driven with 33% of the maximum voltage, which resulted in an X and Y travel range of 6.22 μm and 5.27 μm respectively; a Z travel range of 26.5 μm; and a rotational motion of 600 μrad and 884 μrad about the X and Y axis respectively. The first resonance frequency occurs at 883 Hz in the Z axis. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.},

keywords = {AFM, Nanopositioning, piezoelectric},

pubstate = {published},

tppubtype = {article}

}

@article{J21e,

title = {Position and force sensing using strain gauges integrated into piezoelectric bender electrodes},

author = {R. Seethaler and S. Z. Mansour and M. G. Ruppert and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/J21e-1.pdf},

doi = {10.1016/j.sna.2020.112416},

isbn = {0924-4247},

year  = {2021},

date = {2021-04-15},

urldate = {2020-12-30},

journal = {Sensors and Actuators A: Physical},

volume = {321},

pages = {112416},

abstract = {This article derives design guidelines for integrating strain gauges into the electrodes of piezoelectric bending actuators. The proposed sensor can estimate the actuator tip displacement in response to an applied voltage and an external applied tip force. The actuator load force is also estimated with an accuracy of 8% full scale by approximating the actuator response with a linear model. The applications of this work include micro-grippers and pneumatic valves, which both require the measurement of deflection and load force. At present, this is achieved by external sensors. However, this work shows that these functions can be integrated into the actuator electrodes.},

keywords = {Actuator, Nanopositioning, piezoelectric},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2021,

title = {Serial-kinematic monolithic nanopositioner with in-plane bender actuators},

author = {S. I. Moore and Y. K. Yong and M. Omidbeike and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/03/J21c.pdf},

doi = {https://doi.org/10.1016/j.mechatronics.2021.102541},

isbn = {0957-4158},

year  = {2021},

date = {2021-03-23},

journal = {Mechatronics},

volume = {75},

number = {102541},

abstract = {This article describes a monolithic nanopositioner constructed from in-plane bending actuators which provide greater deflection than previously reported extension actuators, at the expense of stiffness and resonance frequency. The proposed actuators are demonstrated by constructing an XY nanopositioning stage with a serial kinematic design. Analytical modeling and finite-element-analysis accurately predicts the experimental performance of the nanopositioner. A 10μm range is achieved in the X and Y axes with an applied voltage of +/-200 V. The first resonance mode occurs at 250 Hz in the Z axis. The stage is demonstrated for atomic force microscopy imaging.},

keywords = {Nanopositioning, piezoelectric},

pubstate = {published},

tppubtype = {article}

}

@article{J20d,

title = {Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling},

author = {D. S. Raghunvanshi and S. I. Moore and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/09/J20d.pdf},

doi = {10.1109/TMECH.2020.2978241},

issn = {00346748},

year  = {2020},

date = {2020-06-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {25},

number = {3},

pages = {1479-1486},

abstract = {Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage.},

keywords = {Actuator, Nanopositioning, piezoelectric, Piezoelectric Transducers and Drives},

pubstate = {published},

tppubtype = {article}

}

@article{J20a,

title = {Finite-Time Learning Control Using Frequency Response Data with Application to a Nanopositioning Stage},

author = {R. Rozario and A. J. Fleming and T. Oomen},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/09/J20a-1.pdf},

doi = {10.1109/TMECH.2019.2931407},

issn = {10834435},

year  = {2020},

date = {2020-01-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {24},

number = {5},

pages = {2085-2096},

abstract = {Learning control enables significant performance improvement for systems that perform repeating tasks. Achieving high tracking performance by utilizing past error data typically requires noncausal learning that is based on a parametric model of the process. Such model-based approaches impose significant requirements on modeling and filter design. This paper aims to reduce these requirements by developing a learning control framework that enables performance improvement through noncausal learning without relying on a parametric model. This is achieved by explicitly using the discrete Fourier transform to enable learning by using a nonparametric frequency response function model of the process. The effectiveness of the developed method is illustrated by application to a nanopositioning stage},

keywords = {Nanopositioning, Tracking Control},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2019,

title = {Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning},

author = {S. I. Moore and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2019/10/J19c.pdf},

doi = {10.1109/LSENS.2019.2933065},

isbn = {2475-1472},

year  = {2019},

date = {2019-09-09},

journal = {IEEE Sensor Letters},

volume = {3},

number = {8},

pages = {2501503},

abstract = {Precision capacitive sensing methods encode the measurement in a high frequency signal, which requires demodulation. To extract the measurement, the signal is observed over many cycles limiting the bandwidth of the sensor and introducing an undesirable phase lag. To address this limitation, this article outlines a design, which fuses the output of a standard modulated capacitive sensor and a charge amplifier, providing an instantaneous capacitive measurement whose bandwidth is only limited by the speed at which the electronics operate.},

keywords = {Nanopositioning, Sensors},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2019,

title = {Design and Analysis of Low-Distortion Demodulators for Modulated Sensors},

author = { S. I. Moore and M. G. Ruppert and D. M. Harcombe and A. J. Fleming and Y. K. Yong },

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/05/J19d-reduced.pdf},

doi = {10.1109/TMECH.2019.2928592},

issn = {10834435},

year  = {2019},

date = {2019-07-17},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {24},

number = {4},

pages = {1861-1870},

abstract = {System-based demodulators in the form of a Kalman and Lyapunov filter have been demonstrated to significantly outperform traditional demodulators, such as the lock-in amplifier, in bandwidth sensitive applications, for example high-speed atomic force microscopy. Building on their closed loop architecture, this article describes a broader class of high-speed closed-loop demodulators. The generic structure provides greater flexibility to independently control the bandwidth and sensitivity to out-of-band frequencies. A linear time-invariant description is derived which allows the utilization of linear control theory to design the demodulator. Experimental results on a nanopositioner with capacitive sensors demonstrate the realization of arbitrary demodulator dynamics while achieving excellent noise rejection.},

keywords = {Demodulation, Multifrequency AFM, Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J18g,

title = {Improving Robustness Filter Bandwidth in Repetitive Control by Considering Model Mismatch},

author = {A. A. Eielsen and Y. R. Teo and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/J18g.pdf},

doi = {10.1002/asjc.1437},

issn = {1934-6093},

year  = {2018},

date = {2018-05-01},

journal = {Asian Journal of Control},

volume = {20},

number = {3},

pages = {1-11},

abstract = {Repetitive control (RC) is used to track and reject periodic signals by including a model of a periodic signal in the feedback path. The performance of RC can be improved by including an inverse plant response filter, but due to modeling uncertainty at high frequencies, a low-pass robustness filter is also required to limit the bandwidth of the signal model and ensure stability. The design of robustness filters is presently ad-hoc, which may result in excessively conservative performance. This article proposes a new automatic method for designing the robustness filter based on convex optimization and an uncertainty model. Experimental results on a nanopositioning system demonstrate that the proposed method outperforms the traditional brick-wall filter approach.},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J17k,

title = {An Ultra-thin Monolithic XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material},

author = {A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2018/01/J17k.pdf},

doi = {10.1109/TMECH.2017.2755659},

isbn = {1083-4435},

year  = {2017},

date = {2017-12-20},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {22},

number = {6},

pages = {2611-2618},

abstract = {The article describes an XY nanopositioning stage constructed from flexures and actuators machined into a single sheet of piezoelectric material. Ultrasonic machining is used to remove piezoelectric material and create electrode features. The constructed device is 0.508mm thick and has a travel range of 8.8um in the X and Y axes. The first resonance mode occurs at 597Hz which makes the device suitable for a wide range of standard nanopositioning applications where cost and size are considerations. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.},

keywords = {AFM, Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J17f,

title = {An Improved Low-frequency Correction Technique for Piezoelectric Force Sensors in High-speed Nanopositioning Systems},

author = {Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/08/Yong2017_note.pdf},

year  = {2017},

date = {2017-08-02},

journal = {Review of Scientific Instruments},

volume = {88},

number = {046105},

pages = {1-3},

abstract = {Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J16d,

title = {High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement},

author = {Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2016/08/1-s2.0-S0924424716303302-main-1.pdf},

doi = {https://doi.org/10.1016/j.sna.2016.06.042},

year  = {2016},

date = {2016-12-01},

journal = {Sensors & Actuators: A. Physical},

volume = {248},

pages = {184--192},

abstract = {This article presents a novel vertical positioning stage with a dual-sensor arrangement suitable for scanning probe microscopy. The stage has a travel range of 8.4um and a first resonance frequency of 24kHz in the direction of travel. The sensor arrangement consists of an integrated piezoelectric force sensor and laminated piezoresistive strain sensor. The piezoelectric force sensor exhibits extremely low noise and introduces a zero into the dynamics which allows the use of integral force feedback. This control method provides excellent damping performance and guaranteed stability. The piezoresistive sensor is used for tracking control with an analog PI controller which is shown to be an approximate inverse of the damped system. The resulting closed-loop system has a bandwidth is 11.4kHz and 6-sigma resolution of 3.6nm, which is ideal for nanopositioning and atomic force microscopy (AFM) applications. The proposed vertical stage is used to replace the vertical axis of a commercial AFM. Scans are performed in constant-force contact mode with a tip velocity of 0.2mm/s, 1mm/s and 2mm/s. The recorded images contain negligible artefacts due to insufficient vertical bandwidth.},

keywords = {Nanopositioning, Optics, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J16e,

title = {High-Speed Single-Stage and Dual-Stage Vertical Positioners},

author = {Y. K. Yong and S. P. Wadikhaye and A. J. Fleming },

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/01/J16e.pdf},

year  = {2016},

date = {2016-09-01},

journal = {Review of Scientific Instruments},

volume = {87},

number = {085104},

pages = {(1-8)},

abstract = {This article presents a high-speed single- and dual-stage vertical positioner for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6um and a first resonance frequency of 46.8kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10um and a first evident resonance frequency of 130kHz.},

keywords = {Nanopositioning, Optics},

pubstate = {published},

tppubtype = {article}

}

@article{J16c,

title = {A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion},

author = {Y. R. Teo and A. A. Eielsen and J. T. Gravdahl and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2016/06/J16c.pdf},

doi = {10.1115/1.4033274},

year  = {2016},

date = {2016-08-01},

journal = {Journal of Dynamic Systems, Measurement and Control},

volume = {138},

number = {8},

pages = {081002},

abstract = {Repetitive control (RC) achieves tracking and rejection of periodic exogenous signals by incorporating a model of a periodic signal in the feedback path. To improve the performance, an inverse plant response filter (IPRF) is used. To improve robustness, the periodic signal model is bandwidth-limited. This limitation is largely dependent on the accuracy of the IPRF. A new method is presented for synthesizing the IPRF for discrete-time RC. The method produces filters in a simpler and more consistent manner than existing best-practice methods available in the literature, as the only variable involved is the selection of a windowing function. It is also more efficient in terms of memory and computational complexity than existing methods. Experimental results for a nanopositioning stage show that the proposed method yields the same or better tracking performance compared to existing methods.},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J15f,

title = {A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing},

author = {A. J. Fleming and B. S. Routley},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/12/J15f.pdf},

doi = {10.1063/1.4935469},

year  = {2015},

date = {2015-12-31},

journal = {Review of Scientific Instruments},

volume = {86},

pages = {115001(1-7)},

abstract = {This article describes a position sensitive interferometer with closed-loop control of the reference mirror. A calibrated nanopositioner is used to lock the interferometer phase to the most sensitive point in the interfer- ogram. In this conguration, large low-frequency movements of the sensor mirror can be detected from the control signal applied to the nanopositioner and high-frequency short-range signals can be measured directly from the photodiode. It is demonstrated that these two signals are complementary and can be summed to find the total displacement. The resulting interferometer has a number of desirable characteristics: it is optically simple, does not require polarization or modulation to detect the direction of motion, does not require fringe-counting or interpolation electronics, and has a bandwidth equal to that of the photodiode. Experimental results demonstrate the frequency response analysis of a high-speed positioning stage. The proposed instru-

ment is ideal for measuring the frequency response of nanopositioners, electro-optical components, MEMs devices, Ultrasonic devices, and sensors such as surface acoustic wave detectors.},

keywords = {Nanopositioning, Optics, Sensors},

pubstate = {published},

tppubtype = {article}

}

@article{J15b,

title = {Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners},

author = {D. Russell and A. J. Fleming and S. S. Aphale},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/07/DS-14-1539.pdf},

doi = {10.1115/1.4030723},

year  = {2015},

date = {2015-12-30},

journal = {Journal of Dynamic Systems, Measurement and Control},

volume = {137},

number = {10},

pages = {1-8},

abstract = {Positive Velocity and Position Feedback (PVPF) is a widely used control scheme in lightly damped resonant systems with collocated sensor actuator pairs. The popularity of PVPF is due to the ability to achieve a chosen damping ratio by repositioning the poles of the system. The addition of a tracking controller, to reduce the effects of inherent nonlinearities, causes the poles to deviate from the intended location and can be a detriment to the damping achieved. By designing the PVPF and tracking controllers simultaneously, the optimal damping and tracking can be achieved. Simulations show full damping of the first resonance mode and significantly higher bandwidth than that achieved using the traditional PVPF design method, allowing for high speed scanning with accurate tracking. Experimental results are also provided to verify performance in implementation.},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J15e,

title = {Low-order Damping and Tracking Control for Scanning Probe Systems},

author = {A. J. Fleming and Y. R. Teo and K. K. Leang

},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/12/J15e.pdf},

doi = {10.3389/fmech.2015.00014},

year  = {2015},

date = {2015-12-30},

journal = {Frontiers in Mechanical Engineering},

volume = {1},

pages = {1-9},

abstract = {This article describes an improvement to integral resonance damping control (IRC) for reference tracking applications such as Scanning Probe Microscopy and nanofabrication. It is demonstrated that IRC control introduces a low-frequency pole into the tracking loop which is detrimental for performance. In this work, the location of this pole is found analytically using Cardano’s method then compensated by parameterizing the tracking controller accordingly. This approach maximizes the closed-loop bandwidth whilst being robust to changes in the resonance frequencies. The refined IRC controller is comprehensively compared to other low-order methods in a practical environment.},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J15c,

title = {Optimal integral force feedback for active vibration control},

author = {Y. R. Teo and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/10/J15c.pdf},

year  = {2015},

date = {2015-06-27},

journal = {Journal of Sound and Vibration},

volume = {356},

number = {11},

pages = {20-33},

abstract = {This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope.},

keywords = {Nanopositioning, Smart Structures},

pubstate = {published},

tppubtype = {article}

}

@article{J14c,

title = {An Analytical approach to integral resonant control of second-order systems},

author = {M. Namavar and A. J. Fleming and M. Aleyaasin and K. Nakkeeran and S. S. Aphale},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2014/05/J14c.pdf},

year  = {2014},

date = {2014-12-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {19},

number = {2},

pages = {651--659},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J14a,

title = {Measuring and predicting resolution in nanopositioning systems},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2014/09/J14a.pdf},

year  = {2014},

date = {2014-12-01},

journal = {Mechatronics},

volume = {24},

number = {8},

pages = {605-618},

abstract = {The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two nonoverlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by

comparing the resolution benefits of new control schemes over standard output feedback techniques.},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J14d,

title = {Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy},

author = {Y. R. Teo and D. Russell and S. S. Aphale and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2014/09/J14d.pdf},

year  = {2014},

date = {2014-12-01},

journal = {Mechatronics},

volume = {24},

number = {6},

pages = {701-711},

abstract = {This paper describes a new vibration damping technique based on Integral Force Feedback (IFF). Classical IFF utilizes a force sensor and integral controller to damp the resonance modes of a mechanical system. However, the maximum modal damping depends on the frequency difference between the system’s poles and zeros. If the frequency difference is small, the achievable modal damping may be severely limited. The proposed technique allows an arbitrary damping ratio to be achieved by introducing an additional feed-through term to the control system. This results in an extra degree of freedom that allows the position of the zeros to be modified and the maximum modal damping to be increased. The second contribution of this paper is a structured PI tracking controller that is parameterized to cancel the additional pole introduced by integral force feedback. The parameterized controller has only one tuning parameter and does not suffer from reduced phase margin. The proposed techniques are demonstrated on a piezoelectric objective lens positioner. The results show exceptional tracking and damping performance while maintaining insensitivity to changes in resonance frequency. The maximum bandwidth achievable with a commercial PID controller is 26.1 Hz. In contrast, with the proposed damping and tracking controller, the bandwidth is increased to 255 Hz.},

keywords = {Nanopositioning, Optics},

pubstate = {published},

tppubtype = {article}

}

@article{J13a,

title = {A review of nanometer resolution position sensors: operation and performance},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J13a.pdf},

year  = {2013},

date = {2013-12-01},

journal = {Sensors and Actuators A: Physical},

volume = {190},

pages = {106-126},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J13b,

title = {A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner},

author = {Y. K. Yong and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J13b.pdf},

year  = {2013},

date = {2013-12-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {18},

number = {3},

pages = {1113-1121},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J13e,

title = {Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density},

author = {A. J. Fleming and B. Ninness and A. G. Wills},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J13e.pdf},

year  = {2013},

date = {2013-12-01},

journal = {Review of Scientific Instruments},

volume = {84},

pages = {085112, 6 pages},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J12a,

title = {A method for estimating the resolution of nanopositioning systems},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J12a.pdf},

year  = {2012},

date = {2012-12-01},

journal = {Review of Scientific Instruments},

volume = {83},

number = {8},

pages = {086101},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J12c,

title = {Getting the message about noise across, loud and clear},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J12c.pdf},

year  = {2012},

date = {2012-12-01},

journal = {IEEE Control Systems},

volume = {32},

number = {5},

pages = {110-112},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J11a,

title = {Dual-stage vertical feedback for high speed-scanning probe microscopy},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11a.pdf},

year  = {2011},

date = {2011-12-01},

journal = {IEEE Transactions on Control Systems Technology},

volume = {19},

number = {1},

pages = {156--165},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J11b,

title = {A compact ultra-fast vertical nanopositioner for improving SPM scan speed},

author = {B. J. Kenton and A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11b.pdf},

year  = {2011},

date = {2011-12-01},

journal = {Review of Scientific Instruments},

volume = {82},

number = {12},

pages = {123703(1-8)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J11c,

title = {Q control of an atomic force microscope micro-cantilever: a sensor-less approach},

author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11c.pdf},

year  = {2011},

date = {2011-12-01},

journal = {IEEE/ASME Journal of Microelectromechanical Systems},

volume = {20},

number = {6},

pages = {1372--1381},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J10f,

title = {Quantitative SPM topographies by charge linearization of the vertical actuator},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10f.pdf},

year  = {2010},

date = {2010-12-01},

journal = {Review of Scientific Instruments},

volume = {81},

number = {10},

pages = {103701(1-5)},

crossref = {(Featured in the Virtual Journal of Nanoscale Science)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J10a,

title = {Nanopositioning system with force feedback for high-performance tracking and vibration control},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10a.pdf},

year  = {2010},

date = {2010-12-01},

journal = {IEEE Transactions on Mechatronics},

volume = {15},

number = {3},

pages = {433--447},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J10b,

title = {Integrated strain and force feedback for high performance control of piezoelectric actuators},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10b.pdf},

year  = {2010},

date = {2010-12-01},

journal = {Sensors and Actuators A},

volume = {161},

number = {1-2},

pages = {256--265},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J10c,

title = {Bridging the gap between conventional and video-speed scanning probe microscopes},

author = {A. J. Fleming and B. J. Kenton and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10c.pdf},

year  = {2010},

date = {2010-12-01},

journal = {Ultramicroscopy},

volume = {110},

number = {9},

pages = {1205--1214},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J10d,

title = {A new method for robust damping and tracking control of scanning probe microscope positioning stages},

author = {A. J. Fleming and S. S. Aphale and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10d.pdf},

year  = {2010},

date = {2010-12-01},

journal = {IEEE Transactions on Nanotechnology},

volume = {9},

number = {4},

pages = {438--448},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J09a,

title = {High-speed serial-kinematic AFM scanner: design and drive considerations},

author = {K. K. Leang and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J09a.pdf},

year  = {2009},

date = {2009-12-01},

journal = {Asian Journal of Control},

volume = {11},

number = {2},

pages = {144-153},

crossref = {(Special Issue)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J09b,

title = {Optimal periodic trajectories for band-limited systems},

author = {A. J. Fleming and A. G. Wills},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J09b.pdf},

year  = {2009},

date = {2009-12-01},

journal = {IEEE Transactions on Control Systems Technology},

volume = {13},

number = {3},

pages = {552-562},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J09c,

title = {A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J09c.pdf},

year  = {2009},

date = {2009-12-01},

journal = {Review of Scientific Instruments},

volume = {80},

pages = {104701(1-7)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J08a,

title = {Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models},

author = {J. Maess and A. J. Fleming and F. Allgöwer},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08a.pdf},

year  = {2008},

date = {2008-12-01},

journal = {Review of Scientific Instruments},

volume = {79},

pages = {015105(1-9)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J08c,

title = {Inverse-feedforward of charge controlled piezopositioners},

author = {G. M. Clayton and S. Tien and S. Devasia and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08c.pdf},

year  = {2008},

date = {2008-12-01},

journal = {Mechatronics},

volume = {18},

pages = {273--281},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {article}

}

@article{J08d,

title = {Sensor fusion for improved control of piezoelectric tube scanners},

author = {A. J. Fleming and A. G. Wills and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08d.pdf},

year  = {2008},

date = {2008-12-01},

journal = {IEEE Transactions on Control Systems Technology},

volume = {15},

number = {6},

pages = {1265--6536},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J08e,

title = {Charge drives for scanning probe microscope positioning stages},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08e.pdf},

year  = {2008},

date = {2008-12-01},

journal = {Ultramicroscopy},

volume = {108},

number = {12},

pages = {1551-1557},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J07d,

title = {High-performance control of piezoelectric tube scanners},

author = {B. Bhikkaji and M. Ratnam and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J07d.pdf},

year  = {2007},

date = {2007-12-01},

journal = {IEEE Transactions on Control Systems Technology},

volume = {15},

number = {5},

pages = {853-866},

crossref = {(Special Issue)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J07c,

title = {High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control},

author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J07c.pdf},

year  = {2007},

date = {2007-12-01},

journal = {IET Micro & Nano Letters},

volume = {2},

number = {1},

pages = {9--12},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}

@article{J06b,

title = {Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners},

author = {A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/J06b.pdf},

year  = {2006},

date = {2006-12-01},

journal = {IEEE Transactions on Control Systems Technology},

volume = {14},

number = {1},

pages = {33--44},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {article}

}