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2016

8.High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement

Y. K. Yong, A. J. Fleming

High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement (Journal Article)

Sensors & Actuators: A. Physical, 248 , pp. 184–192, 2016.

(Abstract | Links | BibTeX | Tags: Nanopositioning, Optics, SPM)

7.High-Speed Single-Stage and Dual-Stage Vertical Positioners

Y. K. Yong, S. P. Wadikhaye, A. J. Fleming

High-Speed Single-Stage and Dual-Stage Vertical Positioners (Journal Article)

Review of Scientific Instruments, 87 (085104), pp. (1-8), 2016.

(Abstract | Links | BibTeX | Tags: Nanopositioning, Optics)

6.High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper)

Y. K. Yong, S. P. Wadikhaye, A. J. Fleming

High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper) (Inproceeding)

International Conference on Manipulation, Automation and Robotics at Small Scales, Paris, France, 2016.

(Abstract | BibTeX | Tags: Nanopositioning, Optics)

5.High Sensitivity Interferometer for on-Axis Detection of AFM Cantilever Deflection

B. S. Routley, A. J. Fleming

High Sensitivity Interferometer for on-Axis Detection of AFM Cantilever Deflection (Inproceeding)

International Conference on Manipulation, Automation and Robotics at Small Scales, Paris, France, 2016.

(Abstract | BibTeX | Tags: Optics, SPM)

2015

4.A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming, B. S. Routley

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing (Journal Article)

Review of Scientific Instruments, 86 , pp. 115001(1-7), 2015.

(Abstract | Links | BibTeX | Tags: Nanopositioning, Optics, Sensors)

3.A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming, B. S. Routley, J. L. Holdsworth

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing (Inproceeding)

IEEE Multi-conference on Systems and Control, Sydney, 2015.

(BibTeX | Tags: Nanopositioning, Optics, SPM)

2.Optimization and Simulation of Exposure Pattern for Scanning Laser Lithography

O. T. Ghalehbeygi, G. Berriman, A. J. Fleming, J. L. Holdsworth

Optimization and Simulation of Exposure Pattern for Scanning Laser Lithography (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, 2015.

(BibTeX | Tags: Lithography, Optics)

2014

1.Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Y. R. Teo, D. Russell, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Journal Article)

Mechatronics, 24 (6), pp. 701-711, 2014.

(Abstract | Links | BibTeX | Tags: Nanopositioning, Optics)