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2021

16.Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors

M. G. Ruppert; A. J. Fleming; Y. K. Yong

Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors Journal Article

In: Sensors & Actuators: A. Physical, vol. 319, pp. 112519, 2021, ISSN: 0924-4247.

Abstract | Links | BibTeX | Tags: AFM, Cantilever, MEMS, Sensors, Smart Structures

2019

15.Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning

S. I. Moore; A. J. Fleming; Y. K. Yong

Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning Journal Article

In: IEEE Sensor Letters, vol. 3, no. 8, pp. 2501503, 2019, ISBN: 2475-1472.

Abstract | Links | BibTeX | Tags: Nanopositioning, Sensors

14.Model-based Q Factor Control for Photothermally Excited Microcantilevers

M. G. Ruppert; B. S. Routley; A. J. Fleming; Y. K. Yong; G. E. Fantner

Model-based Q Factor Control for Photothermally Excited Microcantilevers Proceedings Article

In: Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.

Abstract | Links | BibTeX | Tags: AFM, Multifrequency AFM, Sensors, Smart Structures, SPM, Vibration Control

13.Modeling and Noise Analysis of a Microcantilever-based Mass Sensor

D. M. Harcombe; M. G. Ruppert; A. J. Fleming

Modeling and Noise Analysis of a Microcantilever-based Mass Sensor Proceedings Article

In: Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.

Abstract | Links | BibTeX | Tags: AFM, Cantilever, MEMS, Sensors, Smart Structures

12.Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing

M. G. Ruppert; S. I. Moore; M. Zawierta; A. J. Fleming; G. Putrino; Y. K. Yong

Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing Journal Article

In: Nanotechnology, vol. 30, no. 8, pp. 085503, 2019.

Abstract | Links | BibTeX | Tags: AFM, Cantilever, MEMS, Multifrequency AFM, Piezoelectric Transducers and Drives, Sensors, Smart Structures, SPM

2018

11.Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy

M. G. Ruppert; Y. K. Yong

Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy Proceedings Article

In: IEEE/ASME Advanced Intelligent Mechatronics (AIM), Auckland, New Zealand, 2018.

Abstract | BibTeX | Tags: AFM, Cantilever, MEMS, Piezoelectric Transducers and Drives, Sensors, Smart Structures, SPM

10.Arbitrary placement of AFM cantilever higher eigenmodes using structural optimization

S. I. Moore; M. G. Ruppert; Y. K. Yong

Arbitrary placement of AFM cantilever higher eigenmodes using structural optimization Proceedings Article

In: International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), 2018.

Abstract | BibTeX | Tags: AFM, Cantilever, MEMS, Multifrequency AFM, Piezoelectric Transducers and Drives, Sensors, SPM, System Identification

9.Self-sensing, estimation and control in multifrequency Atomic Force Microscopy.

M. G. Ruppert

Self-sensing, estimation and control in multifrequency Atomic Force Microscopy. Journal Article

In: Journal & Proceedings of the Royal Society of New South Wales, vol. 151, no. 1, pp. 111, 2018, ISSN: 0035-9173/18/010111-01.

Abstract | Links | BibTeX | Tags: Cantilever, MEMS, Multifrequency AFM, Sensors, Smart Structures, SPM, System Identification, Vibration Control

8.Advanced Sensing and Control with Active Cantilevers for Multimodal Atomic Force Microscopy

M. G. Ruppert; S. I. Moore; M. Zawierta; G. Putrino; Y. K. Yong

Advanced Sensing and Control with Active Cantilevers for Multimodal Atomic Force Microscopy Conference

7th Multifrequency AFM Conference, Madrid, Spain, 2018.

Abstract | BibTeX | Tags: AFM, Cantilever, MEMS, Multifrequency AFM, Sensors, Smart Structures, SPM, Vibration Control

2017

7.Switched Self-Sensing Actuator for a MEMS Nanopositioner

S. I. Moore; Y. K. Yong; S. O. R. Moheimani

Switched Self-Sensing Actuator for a MEMS Nanopositioner Proceedings Article

In: International Conference on Mechatronics, Gippsland, Australia, 2017.

Abstract | Links | BibTeX | Tags: MEMS, Nanopositioning, Sensors

6.On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach

M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 1, pp. 215-225, 2017.

Abstract | Links | BibTeX | Tags: MEMS, Nanopositioning, Piezoelectric Transducers and Drives, Sensors, Smart Structures, SPM, Tracking Control

2015

5.A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming; B. S. Routley

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing Journal Article

In: Review of Scientific Instruments, vol. 86, pp. 115001(1-7), 2015.

Abstract | Links | BibTeX | Tags: Nanopositioning, Optics, Sensors

4.Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors

M. Maroufi; Y. K. Yong; S. O. R. Moheimani

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Proceedings Article

In: IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

Abstract | Links | BibTeX | Tags: MEMS, Nanopositioning, Sensors, SPM

2010

3.

Y. K. Yong; B. Ahmed; S. O. R. Moheimani

A 12-electrode piezoelectric tube scanner for fast atomic force microscopy (Invited Paper) Proceedings Article

In: American Control Conference, Baltimore, Maryland, USA, pp. 4957-4962, 2010.

BibTeX | Tags: Nanopositioning, Sensors, SPM

2009

2.

Y. K. Yong; S. O. R. Moheimani

Vibration control of a novel tube scanner using piezoelectric strain-induced voltage Proceedings Article

In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics , 2009.

Links | BibTeX | Tags: Nanopositioning, Sensors, Vibration Control

1.

S. O. R. Moheimani; Y. K. Yong

A new piezoelectric tube scanner for simultaneous sensing and actuation (Invited Paper) Proceedings Article

In: American Control Conference, St. Louis, Missouri, USA, pp. 2249-2253, 2009.

Links | BibTeX | Tags: Nanopositioning, Sensors, SPM