Publications

@inproceedings{C20c,

title = {Integrated force and displacement sensing in active microcantilevers for off-resonance tapping mode atomic force microscopy},

author = {N. F. S. de Bem and M. G. Ruppert and Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/01/C20c.pdf},

doi = {10.1109/MARSS49294.2020.9307881},

year  = {2020},

date = {2020-11-30},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},

pages = {1-6},

abstract = {Integrated on-chip actuation and sensing in microcantilevers for atomic force microscopy (AFM) allows faster scanning speeds, cleaner frequency responses and smaller cantilevers. However, a single integrated sensor suffers from crosscoupling between displacements originating from tip-sample forces and direct actuation. This paper addresses this issue by presenting a novel microcantilever with on-chip actuation and integrated dual sensing for AFM with application to offresonance tapping modes in AFM. The proposed system is able to measure tip force and deflection simultaneously. A mathematical model is developed for a rectangular cantilever to describe the system and is validated with finite element analysis.},

keywords = {AFM, MEMS, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Ruppert2019,

title = {Model-based Q Factor Control for Photothermally Excited Microcantilevers},

author = {M. G. Ruppert and B. S. Routley and A. J. Fleming and Y. K. Yong and G. E. Fantner},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19b.pdf},

doi = {10.1109/MARSS.2019.8860969},

issn = {978-1-7281-0948-0},

year  = {2019},

date = {2019-07-01},

booktitle = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},

address = {Helsinki, Finland},

abstract = {Photothermal excitation of the cantilever for dynamic atomic force microscopy (AFM) modes is an attractive actuation method as it provides clean cantilever actuation leading to well-defined frequency responses. Unlike conventional piezo-acoustic excitation of the cantilever, it allows for model-based quality (Q) factor control in order to increase the cantilever tracking bandwidth for tapping-mode AFM or to reduce resonant ringing for high-speed photothermal offresonance tapping (PORT) in ambient conditions. In this work, we present system identification, controller design and experimental results on controlling the Q factor of a photothermally driven cantilever. The work is expected to lay the groundwork for future implementations for high-speed PORT imaging in ambient conditions.},

keywords = {AFM, Multifrequency AFM, Sensors, Smart Structures, SPM, Vibration Control},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18e,

title = {A monolithic serial-kinematic nanopositioner with integrated sensors and actuators},

author = {S. I. Moore and M. Omidbeike and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18e.pdf},

doi = {10.1109/AIM.2018.8452225},

year  = {2018},

date = {2018-07-04},

booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},

address = {Auckland, New Zealand},

abstract = {This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopositioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nm/V in the x-axis and 18.1 nm/V in the yaxis with a voltage limit of −250V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications.},

keywords = {AFM, Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18b,

title = {Direct Design of Closed-loop Demodulators for Amplitude Modulation Atomic Force Microscopy},

author = {M. G. Ruppert and D. M. Harcombe and S. I. Moore and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18b.pdf},

doi = {10.23919/ACC.2018.8430896},

year  = {2018},

date = {2018-06-27},

booktitle = {American Control Conference},

address = {Milwaukee, WI},

abstract = {A fundamental component of the z-axis feedback loop in amplitude modulation atomic force microscopy is the demodulator. It dictates both bandwidth and noise in the amplitude and phase estimate of the cantilever deflection signal. In this paper, we derive a linear time-invariant model of a closedloop demodulator with user definable tracking bandwidth and sensitivity to other frequency components. A direct demodulator design method is proposed based on the reformulation of the Lyapunov filter as a modulated-demodulated controller in closed loop with a unity plant. Simulation and experimental results for a higher order Lyapunov filter as well as Butterworth and Chebyshev type demodulators are presented.},

keywords = {AFM, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C17e,

title = {Higher-harmonic AFM Imaging with a High-Bandwidth Multifrequency Lyapunov Filter},

author = {D. M. Harcombe and M. G. Ruppert and A. J. Fleming},

year  = {2017},

date = {2017-07-03},

booktitle = {IEEE/ASME Advanced Intelligent Mechatronics (AIM)},

address = {Munich, Germany},

abstract = {A major difficulty in multifrequency atomic force microscopy (MF-AFM) is the accurate estimation of amplitude and phase at multiple frequencies for both z-axis feedback and material contrast imaging. Typically a lock-in amplifier is chosen as it is both narrowband and simple to implement. However, it inherently suffers drawbacks including a limited bandwidth due to post mixing low-pass filters and the necessity for multiple to be operated in parallel for MF-AFM. This paper proposes a multifrequency demodulator in the form of a modelbased Lyapunov filter implemented on a Field Programmable Gate Array (FPGA). System modelling and simulations are verified by experimental results demonstrating high tracking bandwidth and off-mode rejection at modelled frequencies. Additionally, AFM scans with a five-frequency-based system are presented wherein higher harmonic imaging is performed up to 1 MHz.},

keywords = {Multifrequency AFM, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C17b,

title = {Frequency Domain Analysis of Robust Demodulators for High-Speed Atomic Force Microscopy},

author = {M. G. Ruppert and D. M. Harcombe and M. R. P. Ragazzon and S. O. R. Moheimani and A. J. Fleming},

year  = {2017},

date = {2017-05-01},

booktitle = {American Control Conference},

address = {Seattle, WA},

abstract = {A fundamental but often overlooked component in the z-axis feedback loop of the atomic force microscope (AFM) operated in dynamic mode is the demodulator. It’s purpose is to obtain a preferably fast and low-noise estimate of amplitude and phase of the cantilever deflection signal in the presence of sensor noise and additional distinct frequency components. In this paper, we implement both traditional and recently developed robust methods on a labVIEW digital processing system and rigorously compare these techniques experimentally in terms of measurement bandwidth, implementation complexity and robustness to noise. We conclude with showing high-speed tapping-mode AFM images in constant height, highlighting the significance of an adequate demodulator bandwidth.},

keywords = {SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16g,

title = {Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage},

author = {R. de Rozario and A. J. Fleming and T. Oomen},

year  = {2016},

date = {2016-09-05},

booktitle = {IFAC Symposium on Mechatronic Systems},

address = {Loughborough, UK},

abstract = {Nanopositioning stages are an example of motion systems that are required to accurately perform a high frequent repetitive scanning motion. The tracking performance can be signicantly increased by iteratively updating a feedforward input by using a nonparametric inverse plant model. However, in this paper it is shown that current approaches lack systematic robustness considerations and are suering from limited design freedom to enforce satisfying convergence behavior. Therefore, inspired by existing the Iterative Learning Control approach, robustness is added to the existing methods to enable the desired convergence behavior. This results in the Robust Iterative Inversion-based Control method, whose potential for superior convergence is experimentally veried on a Nanopositioning system.},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16e,

title = {Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material},

author = {A. J. Fleming and G. Berriman and Y. K. Yong},

year  = {2016},

date = {2016-07-12},

booktitle = {IEEE Advanced Intelligent Mechatronics},

address = {Banff, Canada},

abstract = {This article describes the design, fabrication and testing of a new XY nanopositioning stage constructed from a single sheet of piezoelectric material. The approach involves direct ultrasonic machining of a piezoelectric sheet to create flexural and actuator features. An industrial inkjet printer is then used to create electrode features by printing Nitric Acid directly onto the evaporated metal surface of the piezo sheet. The result is a monolithic piezoelectric structure with individual electrical control over each actuator feature. Experimental results demonstrate a full-scale range of 9um in the X and Y axes, and a first resonance frequency of 230Hz in the Z axes. The completed nanopositioner is the thinnest yet reported with a thickness of only 500um. The new design method will enable a new range of ultra-compact applications in scanning probe microscopy, scanning electron microscopy, and active optics. },

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16i,

title = {High Sensitivity Interferometer for on-Axis Detection of AFM Cantilever Deflection},

author = {B. S. Routley and A. J. Fleming},

year  = {2016},

date = {2016-07-01},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales},

address = {Paris, France},

abstract = {A homodyne path stabilised Michelson based interferometer displacement sensor was developed. This sensor achieved a noise floor of 100 fm/rt(Hz), for frequencies higher than 100 kHz. A prototype AFM that integrated this sensor was developed. Using tapping mode, topography maps of an AFM test grid were produced.  },

keywords = {Optics, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16c,

title = {A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper)},

author = {Y. R. Teo and Y. K. Yong and A. J. Fleming},

year  = {2016},

date = {2016-07-01},

booktitle = {American Control Conference, Boston, MA, 2016.},

address = {Boston, MA},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16b,

title = {On Amplitude Estimation for High-Speed Atomic Force Microscopy (invited)},

author = {M. R. P. Ragazzon and J. T. Gravdahl and A. J. Fleming },

year  = {2016},

date = {2016-07-01},

booktitle = {American Control Conference},

address = {Boston, MA},

keywords = {SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C15c,

title = {Model-less FIR Repetitive Control with consideration of uncertainty},

author = {Y. R. Teo and A. A. Eielsen and A. J. Fleming},

year  = {2015},

date = {2015-12-01},

booktitle = {IEEE Multiconference on Systems and Control},

address = {Sydney},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C15a,

title = {A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing},

author = {A. J. Fleming and B. S. Routley and J. L. Holdsworth},

year  = {2015},

date = {2015-12-01},

booktitle = {IEEE Multi-conference on Systems and Control},

address = {Sydney},

keywords = {Nanopositioning, Optics, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13b,

title = {An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13b.pdf},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IEEE American Control Conference},

address = {Washington, DC},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11a,

title = {A method for reducing piezoelectric non-linearity in scanning probe microscope images},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11a.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. American Control Conference},

pages = {2861--2866},

address = {San Francisco, CA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11d,

title = {Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control},

author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11d.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. Australian Control Conference},

address = {Melbourne, Australia},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11b,

title = {Passive piezoelectric shunt control of an atomic force microscope microcantilever},

author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

address = {Budapest, Hungary},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11c,

title = {Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper)},

author = {Y. K. Yong and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11c.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale},

address = {Changchun, China},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10d,

title = {Dual actuation for high-speed atomic force microscopy},

author = {S. Kuiper and A. J. Fleming and G. Schitter},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10d.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

pages = {220--226},

address = {Boston, MA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10b,

title = {Ultra-fast dual-stage vertical positioning for high performance SPMs},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10b.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. American Control Conference},

pages = {4975--4980},

address = {Baltimore, MD},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C09c,

title = {High-speed vertical positioning for contact-mode atomic force microscopy},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C09c.pdf},

year  = {2009},

date = {2009-01-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

pages = {522-527},

address = {Singapore},

keywords = {Piezoelectric Transducers and Drives, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C09a,

title = {A new robust damping and tracking controller for SPM positioning stages},

author = {A. J. Fleming and S. S. Aphale and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C09a.pdf},

year  = {2009},

date = {2009-01-01},

booktitle = {Proc. American Control Conference},

address = {St. Louis, MO},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08a,

title = {Evaluation of charge drives for scanning probe microscope positioning stages},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08a.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. American Control Conference},

pages = {2028--2033},

address = {Seattle, WA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08b,

title = {High-speed serial-kinematic AFM scanner: Design and drive considerations},

author = {K. K. Leang and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08b.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. American Control Conference},

pages = {3188--3193},

address = {Seattle, WA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08c,

title = {Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback},

author = {J. Maess and A. J. Fleming and F. Allgöwer},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08c.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. American Control Conference},

pages = {2022--2027},

address = {Seattle, WA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08d,

title = {Optimal input signals for bandlimited scanning systems},

author = {A. J. Fleming and A. G. Wills},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08d.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. IFAC World Congress},

pages = {11805-11810},

address = {Seoul, Korea},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C07b,

title = {Simulation of piezoelectric tube actuators by reduced finite element models for controller design},

author = {J. Maess and A. J. Fleming and F. Allgöwer},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07b.pdf},

year  = {2007},

date = {2007-01-01},

booktitle = {Proc. American Control Conference},

address = {New York, NY},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C07a,

title = {Sensor fusion for improved control of piezoelectric tube scanners},

author = {A. J. Fleming and A. G. Wills and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07a.pdf},

year  = {2007},

date = {2007-01-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

address = {Zurich, Switzerland},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C07c,

title = {Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts},

author = {S. S. Aphale and S. O. R. Moheimani and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07c.pdf},

year  = {2007},

date = {2007-01-01},

booktitle = {Proc. American Control Conference},

address = {New York, NY},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C06c,

title = {High-performance control of a PZT Scanner},

author = {B. Bhikkaji and M. Ratnam and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06c.pdf},

year  = {2006},

date = {2006-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

address = {Heidelberg, Germany},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C05c,

title = {PPF control of a piezoelectric tube scanner},

author = {M. Ratnam and B. Bhikkaji and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C05c.pdf},

year  = {2005},

date = {2005-01-01},

booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},

address = {Seville, Spain},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C05b,

title = {Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners},

author = {A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C05b.pdf},

year  = {2005},

date = {2005-01-01},

booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},

address = {Seville, Spain},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}