Probe Based Lithography

Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.

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Exposure pattern of AZ-701 photoresist by scanning UV laser

Scanning probe microscopes utilize functionalized probes to image samples with sub-atomic resolution. New mechanical designs, imaging modes, and control techniques are being developed to improve the speed, fidelity, and functionality in end-user applications such as biological assay.

High performance AFM image using dual-stage vertical feedback

High performance AFM image using dual stage vertical feedback

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A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory.

High speed vertical nanopositioner for video speed AFM

High speed vertical nanopositioner for video speed AFM. Developed in collaboration with EasyLab at UNR.

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Electroactive Optics

Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.

Wide bandwidth optical beam steering device

Wide bandwidth optical beam steering device

Biomedical Devices

An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.

Pill robot with six-dimensional localization and locomotion

Pill robot with six-dimensional localization and locomotion

Precision Sensors

This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.

Eddy current position sensor

Eddy current position sensor

Piezo Actuators and Amplifiers

Compared to other actuators, piezoelectric actuators provide a faster response with extremely high force but small displacement. Novel actuators, driving methods, and control systems are being developed to optimize the performance of piezoelectric actuators in applications such as automotive, aerospace, and robotics.

Piezo bender actuator with integrated 200V power electronics

Piezo bender actuator with integrated 200V power electronics

Piezo Robotics

Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.

Dragonfly wing mechanism

Dragonfly wing mechanism

Recent Publications

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Fleming,; Wills,; Routley, (2016): Optimization of Scanning Laser Lithography. In: IEEE Potentials, 2016. (Type: Journal Article | BibTeX)
Optimization of Scanning Laser Lithography
Eielsen,; Fleming, (2016): Improving Digital-to-analog Converter Linearity by Large High-frequency Dithering. In: IEEE Transactions on Circuits and Systems I, 2016. (Type: Journal Article | Abstract | BibTeX)
Improving Digital-to-analog Converter Linearity by Large High-frequency Dithering
Teo,; Eielsen,; Gravdahl,; Fleming, (2016): A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion. In: Journal of Dynamic Systems, Measurement and Control, Accepted, 2016. (Type: Journal Article | BibTeX)
A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion
Rios,; Fleming,; Yong, (2016): Design and Characterization of a Minature Monolithic Piezoelectric Hexapod Robot. In: IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016. (Type: Inproceeding | Abstract | BibTeX)
Design and Characterization of a Minature Monolithic Piezoelectric Hexapod Robot
Fleming,; Berriman,; Yong, (2016): Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material. In: IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016. (Type: Inproceeding | Abstract | BibTeX)
Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material
Fleming,; Wills,; Ghalehbeygi,; Routley,; Ninness, (2016): A Nonlinear Programming Approach to Exposure Optimization in Scanning Laser Lithography. In: American Control Conference, Boston, MA, 2016. (Type: Inproceeding | BibTeX)
A Nonlinear Programming Approach to Exposure Optimization in Scanning Laser Lithography
217 entries « 1 of 37 »