Scanning Probe Microscopy
Probe Based Lithography
Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.
Nanopositioning
A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory. More details.
Electroactive Optics
Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.
Precision Sensors
This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.
Biomedical Devices
An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.
Piezo Actuators and Amplifiers
Piezo Robotics
Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.
Bazaei, A.; Yong, Y. K.; Moheimani, S. O. R.; Sebastian, A.
Tracking of triangular references using signal transformation for control of a novel AFM scanner stage Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 20, no. 2, pp. 453-464, 2012.
@article{Bazaei2012453,
title = {Tracking of triangular references using signal transformation for control of a novel AFM scanner stage},
author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani and A. Sebastian},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong%202012%20-%20Tracking%20Tri.pdf},
doi = {10.1109/TCST.2011.2114347},
year = {2012},
date = {2012-01-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {20},
number = {2},
pages = {453-464},
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pubstate = {published},
tppubtype = {article}
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Wadikhaye, S. P.; Yong, Y. K.; Moheimani, S. O. R.
Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach Journal Article
In: Micro and Nano Letters, vol. 7, no. 4, pp. 309-313, 2012.
@article{Wadikhaye2012309,
title = {Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach},
author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Serial_kinematic.pdf},
doi = {10.1049/mnl.2011.0477},
year = {2012},
date = {2012-01-01},
journal = {Micro and Nano Letters},
volume = {7},
number = {4},
pages = {309-313},
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Yong, Y. K.; Bazaei, A.; Moheimani, S. O. R.; Allgower, F.
Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper) Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan, pp. 456-461, 2012.
@inproceedings{Yong2012456,
title = {Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper)},
author = {Y. K. Yong and A. Bazaei and S. O. R. Moheimani and F. Allgower},
doi = {10.1109/AIM.2012.6266062},
year = {2012},
date = {2012-01-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {456-461},
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Yong, Y. K.; Moheimani, S. O. R.; Kenton, B. J.; Leang, K. K.
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues Journal Article
In: Review of Scientific Instruments, vol. 83, no. 121101, pp. (1-22), 2012.
@article{Yong2012,
title = {Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues},
author = {Y. K. Yong and S. O. R. Moheimani and B. J. Kenton and K. K. Leang},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong_RSI_review.pdf},
doi = {10.1063/1.4765048},
year = {2012},
date = {2012-01-01},
journal = {Review of Scientific Instruments},
volume = {83},
number = {121101},
pages = {(1-22)},
abstract = {Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.},
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pubstate = {published},
tppubtype = {article}
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Fleming, A. J.
Dual-stage vertical feedback for high speed-scanning probe microscopy Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 19, no. 1, pp. 156–165, 2011.
@article{J11a,
title = {Dual-stage vertical feedback for high speed-scanning probe microscopy},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11a.pdf},
year = {2011},
date = {2011-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {19},
number = {1},
pages = {156--165},
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