Scanning Probe Microscopy
Probe Based Lithography
Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.
Nanopositioning
A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory. More details.
Electroactive Optics
Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.
Precision Sensors
This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.
Biomedical Devices
An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.
Piezo Actuators and Amplifiers
Piezo Robotics
Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.
Wills, A. G.; Bates, D.; Fleming, A. J.; Ninness, B.; Moheimani, S. O. R.
Model predictive control applied to constraint handling in active noise and vibration control Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 16, no. 1, pp. 3–12, 2008.
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author = {A. G. Wills and D. Bates and A. J. Fleming and B. Ninness and S. O. R. Moheimani},
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Clayton, G. M.; Tien, S.; Devasia, S.; Fleming, A. J.; Moheimani, S. O. R.
Inverse-feedforward of charge controlled piezopositioners Journal Article
In: Mechatronics, vol. 18, pp. 273–281, 2008.
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title = {Inverse-feedforward of charge controlled piezopositioners},
author = {G. M. Clayton and S. Tien and S. Devasia and A. J. Fleming and S. O. R. Moheimani},
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Fleming, A. J.; Wills, A. G.; Moheimani, S. O. R.
Sensor fusion for improved control of piezoelectric tube scanners Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 15, no. 6, pp. 1265–6536, 2008.
@article{J08d,
title = {Sensor fusion for improved control of piezoelectric tube scanners},
author = {A. J. Fleming and A. G. Wills and S. O. R. Moheimani},
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Fleming, A. J.; Leang, K. K.
Charge drives for scanning probe microscope positioning stages Journal Article
In: Ultramicroscopy, vol. 108, no. 12, pp. 1551-1557, 2008.
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title = {Charge drives for scanning probe microscope positioning stages},
author = {A. J. Fleming and K. K. Leang},
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year = {2008},
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Yong, Y. K.; Liu, K.; Moheimani, S. O. R.
H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage Proceedings Article
In: International Conference on Adaptive Structures and Technologies, Ascona, Switzerland., pp. 730-741, 2008.
@inproceedings{Yong2008730,
title = {H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage},
author = {Y. K. Yong and K. Liu and S. O. R. Moheimani},
year = {2008},
date = {2008-10-01},
booktitle = {International Conference on Adaptive Structures and Technologies, Ascona, Switzerland.},
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