A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.

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Books

Design, Modeling and Control of Nanopositioning Systems

A. J. Fleming, K. K. Leang

Design, Modeling and Control of Nanopositioning Systems (Book)

Springer, London, UK, 2014, ISBN: 978-3319066165.

(Abstract | Links | BibTeX)

Book Chapters

Position Sensors for Nanopositioning

Andrew J. Fleming, Kam K. Leang

Position Sensors for Nanopositioning (Book Chapter)

Ru, Changhai; Liu, Xinyu; Sun, Yu (Ed.): Springer, 2015.

(Abstract | BibTeX)

Tracking Control for Nanopositioning Systems

Kam K. Leang, Andrew J. Fleming

Tracking Control for Nanopositioning Systems (Book Chapter)

Ru, Changhai; Liu, Xinyu; Sun, Yu (Ed.): Springer, 2015.

(Abstract | BibTeX)

Journal Article

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners

D. Russell, A. J. Fleming, S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners (Journal Article)

Journal of Dynamic Systems, Measurement and Control, Accepted , 2015.

(Abstract | Links | BibTeX)

Improving the Performance of Integral Force Feedback for Active Vibration Control

Yik R. Teo, A. J. Fleming

Improving the Performance of Integral Force Feedback for Active Vibration Control (Journal Article)

Journal of Sound and Vibration, Accepted , 2015.

(Abstract | BibTeX)

An Analytical approach to integral resonant control of second-order systems

M. Namavar, A. J. Fleming, M. Aleyaasin, K. Nakkeeran, S. S. Aphale

An Analytical approach to integral resonant control of second-order systems (Journal Article)

IEEE/ASME Transactions on Mechatronics, 19 (2), pp. 651–659, 2014.

(Links | BibTeX)

Measuring and predicting resolution in nanopositioning systems

A. J. Fleming

Measuring and predicting resolution in nanopositioning systems (Journal Article)

Mechatronics, 24 (8), pp. 605-618, 2014.

(Abstract | Links | BibTeX)

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Yik R. Teo, D. Russell, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Journal Article)

Mechatronics, 24 (6), pp. 701-711, 2014.

(Abstract | Links | BibTeX)

A review of nanometer resolution position sensors: operation and performance

A. J. Fleming

A review of nanometer resolution position sensors: operation and performance (Journal Article)

Sensors and Actuators A: Physical, 190 , pp. 106-126, 2013.

(Links | BibTeX)

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

Y. K. Yong, A. J. Fleming, S. O. R. Moheimani

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner (Journal Article)

IEEE/ASME Transactions on Mechatronics, 18 (3), pp. 1113-1121, 2013.

(Links | BibTeX)

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density

A. J. Fleming, B. Ninness, A. G. Wills

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density (Journal Article)

Review of Scientific Instruments, 84 , pp. 085112, 6 pages, 2013.

(Links | BibTeX)

A method for measuring the resolution of nanopositioning systems

A. J. Fleming

A method for measuring the resolution of nanopositioning systems (Journal Article)

Review of Scientific Instruments, 83 (8), pp. 086101, 2012.

(Links | BibTeX)

Getting the message about noise across, loud and clear

A. J. Fleming

Getting the message about noise across, loud and clear (Journal Article)

IEEE Control Systems, 32 (5), pp. 110-112, 2012.

(Links | BibTeX)

A. J. Fleming

Dual-stage vertical feedback for high speed-scanning probe microscopy (Journal Article)

IEEE Transactions on Control Systems Technology, 19 (1), pp. 156–165, 2011.

(Links | BibTeX)

B. J. Kenton, A. J. Fleming, K. K. Leang

A compact ultra-fast vertical nanopositioner for improving SPM scan speed (Journal Article)

Review of Scientific Instruments, 82 (12), pp. 123703(1-8), 2011.

(Links | BibTeX)

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Q control of an atomic force microscope micro-cantilever: a sensor-less approach (Journal Article)

IEEE/ASME Journal of Microelectromechanical Systems, 20 (6), pp. 1372–1381, 2011.

(Links | BibTeX)

A. J. Fleming

Quantitative SPM topographies by charge linearization of the vertical actuator (Journal Article)

Review of Scientific Instruments, 81 (10), pp. 103701(1-5), 2010.

(Links | BibTeX)

A. J. Fleming

Nanopositioning system with force feedback for high-performance tracking and vibration control (Journal Article)

IEEE Transactions on Mechatronics, 15 (3), pp. 433–447, 2010.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

Integrated strain and force feedback for high performance control of piezoelectric actuators (Journal Article)

Sensors and Actuators A, 161 (1-2), pp. 256–265, 2010.

(Links | BibTeX)

A. J. Fleming, B. J. Kenton, K. K. Leang

Bridging the gap between conventional and video-speed scanning probe microscopes (Journal Article)

Ultramicroscopy, 110 (9), pp. 1205–1214, 2010.

(Links | BibTeX)

A. J. Fleming, S. S. Aphale, S. O. R. Moheimani

A new method for robust damping and tracking control of scanning probe microscope positioning stages (Journal Article)

IEEE Transactions on Nanotechnology, 9 (4), pp. 438–448, 2010.

(Links | BibTeX)

Kam K. Leang, A. J. Fleming

High-speed serial-kinematic AFM scanner: design and drive considerations (Journal Article)

Asian Journal of Control, 11 (2), pp. 144-153, 2009.

(Links | BibTeX)

A. J. Fleming, A. G. Wills

Optimal periodic trajectories for band-limited systems (Journal Article)

IEEE Transactions on Control Systems Technology, 13 (3), pp. 552-562, 2009.

(Links | BibTeX)

A. J. Fleming

A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads (Journal Article)

Review of Scientific Instruments, 80 , pp. 104701(1-7), 2009.

(Links | BibTeX)

J. Maess, A. J. Fleming, F. Allgöwer

Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models (Journal Article)

Review of Scientific Instruments, 79 , pp. 015105(1-9), 2008.

(Links | BibTeX)

G. M. Clayton, S. Tien, S. Devasia, A. J. Fleming, S. O. R. Moheimani

Inverse-feedforward of charge controlled piezopositioners (Journal Article)

Mechatronics, 18 , pp. 273–281, 2008.

(Links | BibTeX)

A. J. Fleming, A. G. Wills, S. O. R. Moheimani

Sensor fusion for improved control of piezoelectric tube scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 15 (6), pp. 1265–6536, 2008.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

Charge drives for scanning probe microscope positioning stages (Journal Article)

Ultramicroscopy, 108 (12), pp. 1551-1557, 2008.

(Links | BibTeX)

B. Bhikkaji, M. Ratnam, A. J. Fleming, S. O. R. Moheimani

High-performance control of piezoelectric tube scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 15 (5), pp. 853-866, 2007.

(Links | BibTeX)

S. S. Aphale, A. J. Fleming, S. O. R. Moheimani

High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control (Journal Article)

IET Micro & Nano Letters, 2 (1), pp. 9–12, 2007.

(Links | BibTeX)

A. J. Fleming, S. O. R. Moheimani

Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners (Journal Article)

IEEE Transactions on Control Systems Technology, 14 (1), pp. 33–44, 2006.

(Links | BibTeX)

Inproceedings

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming, B. Routley, J. L. Holdsworth

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing (Inproceeding)

IEEE Multi-conference on Systems and Control, Sydney, 2015.

(BibTeX)

Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems

T. D. Godfrey, A. A. Eielsen, A. J. Fleming

Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, 2015.

(BibTeX)

Model-less FIR Repetitive Control with consideration of uncertainty

Yik R. Teo, A. A. Eielsen, A. J. Fleming

Model-less FIR Repetitive Control with consideration of uncertainty (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, 2015.

(BibTeX)

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement

D. Russel, A. J. Fleming, S. S. Aphale

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement (Inproceeding)

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

(Links | BibTeX)

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Yik R. Teo, D. Russel, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Inproceeding)

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

(Links | BibTeX)

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning

Yik R. Teo, Arnfinn. A. Eielsen, Tommy. J. Gravdahl, Andrew J. Fleming

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning (Inproceeding)

Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014.

(Links | BibTeX)

Active Damping Control Using Optimal Integral Force Feedback

Yik R. Teo, A. J. Fleming

Active Damping Control Using Optimal Integral Force Feedback (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

A New Repetitive Control Scheme Based on Non-Causal FIR Filters

Yik R. Teo, A. J. Fleming

A New Repetitive Control Scheme Based on Non-Causal FIR Filters (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners

D. Russell, A. J. Fleming, S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis

A. J. Fleming

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis (Inproceeding)

Proc. IEEE American Control Conference, Washington, DC, 2013.

(BibTeX)

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning

A. J. Fleming, K. K. Leang

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning (Inproceeding)

Proc. IEEE American Control Conference, Washington, DC, 2013.

(Links | BibTeX)

Position Sensor Performance in Nanometer Resolution Feedback Systems

A. J. Fleming

Position Sensor Performance in Nanometer Resolution Feedback Systems (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

(BibTeX)

Time domain resolution of nanopositioning systems

A. J. Fleming

Time domain resolution of nanopositioning systems (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

(Links | BibTeX)

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics

A. J. Fleming, Y. K. Yong

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

(Links | BibTeX)

Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners

M. Namavar, A. J. Fleming, S. S. Aphale

Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners (Inproceeding)

Proc. European Control Conference, Zurich, Switzerland, 2013.

(BibTeX)

Spectral Estimation using Dual Sensors with Uncorrelated Noise

A. J. Fleming, B. Ninness, A. G. Wills

Spectral Estimation using Dual Sensors with Uncorrelated Noise (Inproceeding)

Proc. IEEE Sensors, Baltimore, MA, 2013.

(BibTeX)

Resolution of Sensors with Capacitive Source Impedance

Yik R. Teo, A. J. Fleming

Resolution of Sensors with Capacitive Source Impedance (Inproceeding)

Proc. IEEE Sensors, Baltimore, MA, 2013.

(BibTeX)

Estimating the resolution of nanopositioning systems from frequency domain data

A. J. Fleming

Estimating the resolution of nanopositioning systems from frequency domain data (Inproceeding)

Proc. IEEE International Conference on Robotics and Automation, pp. 4786-4791, St. Paul, MN, 2012.

(Links | BibTeX)

Measuring picometer nanopositioner resolution

A. J. Fleming

Measuring picometer nanopositioner resolution (Inproceeding)

In Proc. Actuator, Bremen, 2012.

(Links | BibTeX)

76 entries « 1 of 2 »

Support

Supported by the Australian Research Council, the University of Newcastle, and CDSC