A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.

Books

Design, Modeling and Control of Nanopositioning Systems

A. J. Fleming; K. K. Leang

Design, Modeling and Control of Nanopositioning Systems Book

Springer, London, UK, 2014, ISBN: 978-3319066165.

Abstract | Links | BibTeX

Book Chapters

Position Sensors for Nanopositioning

A. J. Fleming; K. K. Leang

Position Sensors for Nanopositioning Book Chapter

Ru, C; Liu, X; Sun, Y (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.

Abstract | BibTeX

Tracking Control for Nanopositioning Systems

K. K. Leang; A. J. Fleming

Tracking Control for Nanopositioning Systems Book Chapter

Ru, C; Liu, X; Sun, Y (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.

Abstract | BibTeX

Mechanical Design of High-Speed Nanopositioning Systems

Y. K. Yong; K. K. Leang

Mechanical Design of High-Speed Nanopositioning Systems Book Chapter

Ru, C; Liu, X; Sun, Y (Ed.): Chapter 3, Springer, 2016.

BibTeX

High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach

A. Bazaei; Y. K. Yong; S. O. R. Moheimani; A. Sebastian

High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach Book Chapter

Eleftheriou, E; Moheimani, S O R (Ed.): 413 , Chapter 3, pp. 47-65, Springer, 2011.

Links | BibTeX

Journal Articles

Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling

D. S. Raghunvanshi; S. I. Moore; A. J. Fleming; Y. K. Yong

Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling Journal Article

IEEE/ASME Transactions on Mechatronics, 25 (3), pp. 1479-1486, 2020, ISSN: 00346748.

Abstract | Links | BibTeX

Finite-Time Learning Control Using Frequency Response Data with Application to a Nanopositioning Stage

R. Rozario; A. J. Fleming; T. Oomen

Finite-Time Learning Control Using Frequency Response Data with Application to a Nanopositioning Stage Journal Article

IEEE/ASME Transactions on Mechatronics, 24 (5), pp. 2085-2096, 2020, ISSN: 10834435.

Abstract | Links | BibTeX

Scan Rate Adaptation for AFM Imaging Based on Performance Metric Optimisation

K. Wang; M. G. Ruppert; C. Manzie; D. Nesic; Y. K. Yong

Scan Rate Adaptation for AFM Imaging Based on Performance Metric Optimisation Journal Article

IEEE/ASME Transactions on Mechatronics, 2019, (early access).

Abstract | Links | BibTeX

Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning

S. I. Moore; A. J. Fleming; Y. K. Yong

Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning Journal Article

IEEE Sensor Letters, 3 (8), pp. 2501503, 2019, ISBN: 2475-1472.

Abstract | Links | BibTeX

Design and Analysis of Low-Distortion Demodulators for Modulated Sensors

S. I. Moore; M. G. Ruppert; D. M. Harcombe; A. J. Fleming; Y. K. Yong

Design and Analysis of Low-Distortion Demodulators for Modulated Sensors Journal Article

IEEE/ASME Transactions on Mechatronics, 24 (4), pp. 1861-1870, 2019, ISSN: 10834435.

Abstract | Links | BibTeX

Adaptive Scan for Atomic Force Microscopy Based on Online Optimisation: Theory and Experiment

K. Wang; M. G. Ruppert; C. Manzie; D. Nesic; Y. K. Yong

Adaptive Scan for Atomic Force Microscopy Based on Online Optimisation: Theory and Experiment Journal Article

IEEE Transactions on Control System Technology, 2019, (accepted for publication).

Abstract | Links | BibTeX

Improving Robustness Filter Bandwidth in Repetitive Control by Considering Model Mismatch

A. A. Eielsen; Y. R. Teo; A. J. Fleming

Improving Robustness Filter Bandwidth in Repetitive Control by Considering Model Mismatch Journal Article

Asian Journal of Control, 20 (3), pp. 1-11, 2018, ISSN: 1934-6093.

Abstract | Links | BibTeX

A Novel State Transformation Approach to Tracking of Piecewise Linear Trajectories

A. Bazaei; Z. Cheng; Y. K. Yong; S. O. R. Moheimani

A Novel State Transformation Approach to Tracking of Piecewise Linear Trajectories Journal Article

IEEE Transactions on Control Systems Technology, 26 (1), pp. 128 - 138, 2018.

Abstract | Links | BibTeX

An Ultra-thin Monolithic XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material

A. J. Fleming; Y. K. Yong

An Ultra-thin Monolithic XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material Journal Article

IEEE/ASME Transactions on Mechatronics, 22 (6), pp. 2611-2618, 2017, ISBN: 1083-4435.

Abstract | Links | BibTeX

An Improved Low-frequency Correction Technique for Piezoelectric Force Sensors in High-speed Nanopositioning Systems

Y. K. Yong; A. J. Fleming

An Improved Low-frequency Correction Technique for Piezoelectric Force Sensors in High-speed Nanopositioning Systems Journal Article

Review of Scientific Instruments, 88 (046105), pp. 1-3, 2017.

Abstract | Links | BibTeX

On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach

M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach Journal Article

IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215-225, 2017.

Abstract | Links | BibTeX

Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems

Y. K. Yong

Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems Journal Article

Frontiers in Mechanical Engineering, 2 , pp. 1-9, 2016.

Abstract | Links | BibTeX

High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement

Y. K. Yong; A. J. Fleming

High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement Journal Article

Sensors & Actuators: A. Physical, 248 , pp. 184–192, 2016.

Abstract | Links | BibTeX

High-Speed Single-Stage and Dual-Stage Vertical Positioners

Y. K. Yong; S. P. Wadikhaye; A. J. Fleming

High-Speed Single-Stage and Dual-Stage Vertical Positioners Journal Article

Review of Scientific Instruments, 87 (085104), pp. (1-8), 2016.

Abstract | Links | BibTeX

A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion

Y. R. Teo; A. A. Eielsen; J. T. Gravdahl; A. J. Fleming

A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion Journal Article

Journal of Dynamic Systems, Measurement and Control, 138 (8), pp. 081002, 2016.

Abstract | Links | BibTeX

A new preload mechanism for a high-speed piezoelectric stack nanopositioner

Y. K. Yong

A new preload mechanism for a high-speed piezoelectric stack nanopositioner Journal Article

Mechatronics, 36 , pp. 159-166, 2016.

Abstract | Links | BibTeX

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming; B. S. Routley

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing Journal Article

Review of Scientific Instruments, 86 , pp. 115001(1-7), 2015.

Abstract | Links | BibTeX

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners

D. Russell; A. J. Fleming; S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners Journal Article

Journal of Dynamic Systems, Measurement and Control, 137 (10), pp. 1-8, 2015.

Abstract | Links | BibTeX

Low-order Damping and Tracking Control for Scanning Probe Systems

A. J. Fleming; Y. R. Teo; K. K. Leang

Low-order Damping and Tracking Control for Scanning Probe Systems Journal Article

Frontiers in Mechanical Engineering, 1 , pp. 1-9, 2015.

Abstract | Links | BibTeX

Optimal integral force feedback for active vibration control

Y. R. Teo; A. J. Fleming

Optimal integral force feedback for active vibration control Journal Article

Journal of Sound and Vibration, 356 (11), pp. 20-33, 2015.

Abstract | Links | BibTeX

Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy

Y. K. Yong; S. O. R. Moheimani

Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy Journal Article

IEEE Transactions on Nanotechnology, 14 (2), pp. 338-345, 2015, ISSN: 1536-125X.

Abstract | Links | BibTeX

An Analytical approach to integral resonant control of second-order systems

M. Namavar; A. J. Fleming; M. Aleyaasin; K. Nakkeeran; S. S. Aphale

An Analytical approach to integral resonant control of second-order systems Journal Article

IEEE/ASME Transactions on Mechatronics, 19 (2), pp. 651–659, 2014.

Links | BibTeX

Measuring and predicting resolution in nanopositioning systems

A. J. Fleming

Measuring and predicting resolution in nanopositioning systems Journal Article

Mechatronics, 24 (8), pp. 605-618, 2014.

Abstract | Links | BibTeX

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Y. R. Teo; D. Russell; S. S. Aphale; A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy Journal Article

Mechatronics, 24 (6), pp. 701-711, 2014.

Abstract | Links | BibTeX

Improvement of transient response in signal transformation approach by proper compensator initialization

A. Bazaei; S. O. R. Moheimani; Y. K. Yong

Improvement of transient response in signal transformation approach by proper compensator initialization Journal Article

IEEE Transactions on Control Systems Technology, 22 (2), pp. 729-736, 2014.

Links | BibTeX

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

A. Mohammadi; A. G. Fowler; Y. K. Yong; S. O. R. Moheimani

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM Journal Article

Journal of Microelectromechanical Systems, 23 (3), pp. 610-619, 2014.

Links | BibTeX

A serial-kinematic nanopositioner for high-speed atomic force microscopy

S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani

A serial-kinematic nanopositioner for high-speed atomic force microscopy Journal Article

Review of Scientific Instruments, 85 (105104), pp. (1-10), 2014.

Links | BibTeX

Video-rate lissajous-scan atomic force microscopy

Y. K. Yong; A. Bazaei; S. O. R. Moheimani

Video-rate lissajous-scan atomic force microscopy Journal Article

IEEE Transactions on Nanotechnology, 13 (1), pp. 85-93, 2014.

Links | BibTeX

Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner

S. P. Wadikhaye; Y. K. Yong; B. Bhikkaji; S. O. R. Moheimani

Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner Journal Article

Smart Materials and Structures, 23 (2), 2014.

Links | BibTeX

A review of nanometer resolution position sensors: operation and performance

A. J. Fleming

A review of nanometer resolution position sensors: operation and performance Journal Article

Sensors and Actuators A: Physical, 190 , pp. 106-126, 2013.

Links | BibTeX

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

Y. K. Yong; A. J. Fleming; S. O. R. Moheimani

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner Journal Article

IEEE/ASME Transactions on Mechatronics, 18 (3), pp. 1113-1121, 2013.

Links | BibTeX

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density

A. J. Fleming; B. Ninness; A. G. Wills

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density Journal Article

Review of Scientific Instruments, 84 , pp. 085112, 6 pages, 2013.

Links | BibTeX

A method for estimating the resolution of nanopositioning systems

A. J. Fleming

A method for estimating the resolution of nanopositioning systems Journal Article

Review of Scientific Instruments, 83 (8), pp. 086101, 2012.

Links | BibTeX

Getting the message about noise across, loud and clear

A. J. Fleming

Getting the message about noise across, loud and clear Journal Article

IEEE Control Systems, 32 (5), pp. 110-112, 2012.

Links | BibTeX

High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues

A. Bazaei; Y. K. Yong; S. O. R. Moheimani

High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues Journal Article

Review of Scientific Instruments, 83 (063701), pp. (1-10), 2012.

Links | BibTeX

Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach

S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani

Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach Journal Article

Micro and Nano Letters, 7 (4), pp. 309-313, 2012.

Links | BibTeX

Dual-stage vertical feedback for high speed-scanning probe microscopy

A. J. Fleming

Dual-stage vertical feedback for high speed-scanning probe microscopy Journal Article

IEEE Transactions on Control Systems Technology, 19 (1), pp. 156–165, 2011.

Links | BibTeX

A compact ultra-fast vertical nanopositioner for improving SPM scan speed

B. J. Kenton; A. J. Fleming; K. K. Leang

A compact ultra-fast vertical nanopositioner for improving SPM scan speed Journal Article

Review of Scientific Instruments, 82 (12), pp. 123703(1-8), 2011.

Links | BibTeX

Q control of an atomic force microscope micro-cantilever: a sensor-less approach

M. Fairbairn; S. O. R. Moheimani; A. J. Fleming

Q control of an atomic force microscope micro-cantilever: a sensor-less approach Journal Article

IEEE/ASME Journal of Microelectromechanical Systems, 20 (6), pp. 1372–1381, 2011.

Links | BibTeX

A. J. Fleming

Quantitative SPM topographies by charge linearization of the vertical actuator Journal Article

Review of Scientific Instruments, 81 (10), pp. 103701(1-5), 2010.

Links | BibTeX

A. J. Fleming

Nanopositioning system with force feedback for high-performance tracking and vibration control Journal Article

IEEE Transactions on Mechatronics, 15 (3), pp. 433–447, 2010.

Links | BibTeX

A. J. Fleming; K. K. Leang

Integrated strain and force feedback for high performance control of piezoelectric actuators Journal Article

Sensors and Actuators A, 161 (1-2), pp. 256–265, 2010.

Links | BibTeX

A. J. Fleming; B. J. Kenton; K. K. Leang

Bridging the gap between conventional and video-speed scanning probe microscopes Journal Article

Ultramicroscopy, 110 (9), pp. 1205–1214, 2010.

Links | BibTeX

A. J. Fleming; S. S. Aphale; S. O. R. Moheimani

A new method for robust damping and tracking control of scanning probe microscope positioning stages Journal Article

IEEE Transactions on Nanotechnology, 9 (4), pp. 438–448, 2010.

Links | BibTeX

K. K. Leang; A. J. Fleming

High-speed serial-kinematic AFM scanner: design and drive considerations Journal Article

Asian Journal of Control, 11 (2), pp. 144-153, 2009.

Links | BibTeX

A. J. Fleming; A. G. Wills

Optimal periodic trajectories for band-limited systems Journal Article

IEEE Transactions on Control Systems Technology, 13 (3), pp. 552-562, 2009.

Links | BibTeX

A. J. Fleming

A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads Journal Article

Review of Scientific Instruments, 80 , pp. 104701(1-7), 2009.

Links | BibTeX

J. Maess; A. J. Fleming; F. Allgöwer

Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models Journal Article

Review of Scientific Instruments, 79 , pp. 015105(1-9), 2008.

Links | BibTeX

G. M. Clayton; S. Tien; S. Devasia; A. J. Fleming; S. O. R. Moheimani

Inverse-feedforward of charge controlled piezopositioners Journal Article

Mechatronics, 18 , pp. 273–281, 2008.

Links | BibTeX

A. J. Fleming; A. G. Wills; S. O. R. Moheimani

Sensor fusion for improved control of piezoelectric tube scanners Journal Article

IEEE Transactions on Control Systems Technology, 15 (6), pp. 1265–6536, 2008.

Links | BibTeX

A. J. Fleming; K. K. Leang

Charge drives for scanning probe microscope positioning stages Journal Article

Ultramicroscopy, 108 (12), pp. 1551-1557, 2008.

Links | BibTeX

B. Bhikkaji; M. Ratnam; A. J. Fleming; S. O. R. Moheimani

High-performance control of piezoelectric tube scanners Journal Article

IEEE Transactions on Control Systems Technology, 15 (5), pp. 853-866, 2007.

Links | BibTeX

S. S. Aphale; A. J. Fleming; S. O. R. Moheimani

High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control Journal Article

IET Micro & Nano Letters, 2 (1), pp. 9–12, 2007.

Links | BibTeX

A. J. Fleming; S. O. R. Moheimani

Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners Journal Article

IEEE Transactions on Control Systems Technology, 14 (1), pp. 33–44, 2006.

Links | BibTeX

Miscellaneous

Charge Drive with Active DC Stabilization

A. J. Fleming

Charge Drive with Active DC Stabilization Miscellaneous

Patent, 2012.

BibTeX

A. J. Fleming

A Positioning System and Method Miscellaneous

Patent, 2010.

BibTeX

Inproceedings

Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage

M. Omidbeike; Y. K. Yong; A. J. Fleming

Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage Inproceedings

IFAC World Congress, 2020.

Abstract | BibTeX

Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion

M. Omidbeike; A. A. Eielsen; Y. K. Yong; A. J. Fleming

Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion Inproceedings

International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019.

Abstract | BibTeX

A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet

M. Omidbeike; Y. K. Yong; S. I. Moore; A. J. Fleming

A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet Inproceedings

Helsinki, Finland, 2019.

Abstract | BibTeX

A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators

S. Z. Mansour; R. J. Seethaler; A. J. Fleming

A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators Inproceedings

IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.

Abstract | BibTeX

Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor

M. Omidbeike; B. S. Routley; A. J. Fleming

Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor Inproceedings

IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.

Abstract | BibTeX

A monolithic serial-kinematic nanopositioner with integrated sensors and actuators

S. I. Moore; M. Omidbeike; A. J. Fleming; Y. K. Yong

A monolithic serial-kinematic nanopositioner with integrated sensors and actuators Inproceedings

IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.

Abstract | BibTeX

Resonance-shifting Integral Resonant Control for High-speed Nanopositioning

S. S. Aphale; M. Namavar; A. J. Fleming

Resonance-shifting Integral Resonant Control for High-speed Nanopositioning Inproceedings

American Control Conference, Milwaukee, WI, 2018.

Abstract | BibTeX

Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor

M. Omidbeike; Y. R. Teo; Y. K. Yong; A. J. Fleming

Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor Inproceedings

IFAC World Congress, Toulouse, France, 2017.

Abstract | BibTeX

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner

M. G. Ruppert; M. Maroufi; A. Bazaei; S. O. R. Moheimani

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner Inproceedings

20th IFAC World Congress, pp. 15554-15560, 2017.

Abstract | BibTeX

Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope

M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani

Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope Inproceedings

American Control Conference, 2017.

Abstract | BibTeX

Switched Self-Sensing Actuator for a MEMS Nanopositioner

S. I. Moore; Y. K. Yong; S. O. R. Moheimani

Switched Self-Sensing Actuator for a MEMS Nanopositioner Inproceedings

International Conference on Mechatronics, Gippsland, Australia, 2017.

Abstract | Links | BibTeX

Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage

R. de Rozario; A. J. Fleming; T. Oomen

Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage Inproceedings

IFAC Symposium on Mechatronic Systems, Loughborough, UK, 2016.

Abstract | BibTeX

Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material

A. J. Fleming; G. Berriman; Y. K. Yong

Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material Inproceedings

IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016.

Abstract | BibTeX

A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper)

Y. R. Teo; Y. K. Yong; A. J. Fleming

A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper) Inproceedings

American Control Conference, Boston, MA, 2016., Boston, MA, 2016.

BibTeX

High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper)

Y. K. Yong; S. P. Wadikhaye; A. J. Fleming

High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper) Inproceedings

International Conference on Manipulation, Automation and Robotics at Small Scales, Paris, France, 2016.

Abstract | BibTeX

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming; B. S. Routley; J. L. Holdsworth

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing Inproceedings

IEEE Multi-conference on Systems and Control, Sydney, 2015.

BibTeX

Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems

T. D. Godfrey; A. A. Eielsen; A. J. Fleming

Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems Inproceedings

IEEE Multiconference on Systems and Control, Sydney, 2015.

BibTeX

Model-less FIR Repetitive Control with consideration of uncertainty

Y. R. Teo; A. A. Eielsen; A. J. Fleming

Model-less FIR Repetitive Control with consideration of uncertainty Inproceedings

IEEE Multiconference on Systems and Control, Sydney, 2015.

BibTeX

Internal Model Control for High-speed Spiral Scan AFM

A. Bazaei; Y. K. Yong; S. O. R. Moheimani

Internal Model Control for High-speed Spiral Scan AFM Inproceedings

Australian Control Conference, Gold Coast, Australia, 2015.

BibTeX

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors

M. Maroufi; Y. K. Yong; S. O. R. Moheimani

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Inproceedings

IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

Abstract | Links | BibTeX

Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper)

Y. K. Yong; S. O. R. Moheimani

Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper) Inproceedings

American Control Conference, Chicago, USA, pp. 3473-3477, 2015.

BibTeX

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement

D. Russell; A. J. Fleming; S. S. Aphale

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement Inproceedings

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

Links | BibTeX

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Y. R. Teo; D. Russell; S. S. Aphale; A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy Inproceedings

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

Links | BibTeX

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning

Y. R. Teo; A. A. Eielsen; J. T. Gravdahl; A. J. Fleming

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning Inproceedings

Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014.

Links | BibTeX

Active Damping Control Using Optimal Integral Force Feedback

Y. R. Teo; A. J. Fleming

Active Damping Control Using Optimal Integral Force Feedback Inproceedings

Proc. American Control Conference, Portland, Oregon, 2014.

Links | BibTeX

A New Repetitive Control Scheme Based on Non-Causal FIR Filters

Y. R. Teo; A. J. Fleming

A New Repetitive Control Scheme Based on Non-Causal FIR Filters Inproceedings

Proc. American Control Conference, Portland, Oregon, 2014.

Links | BibTeX

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners

D. Russell; A. J. Fleming; S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners Inproceedings

Proc. American Control Conference, Portland, Oregon, 2014.

Links | BibTeX

Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper)

S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani

Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper) Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, pp. 210-215, 2014.

Links | BibTeX

Nanopositioner design using tapered flexures: A parametric study (Invited Paper)

S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani

Nanopositioner design using tapered flexures: A parametric study (Invited Paper) Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, pp. 856-861, 2013.

Links | BibTeX

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis

A. J. Fleming

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis Inproceedings

Proc. IEEE American Control Conference, Washington, DC, 2013.

BibTeX

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning

A. J. Fleming; K. K. Leang

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning Inproceedings

Proc. IEEE American Control Conference, Washington, DC, 2013.

Links | BibTeX

Position Sensor Performance in Nanometer Resolution Feedback Systems

A. J. Fleming

Position Sensor Performance in Nanometer Resolution Feedback Systems Inproceedings

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

BibTeX

Time domain resolution of nanopositioning systems

A. J. Fleming

Time domain resolution of nanopositioning systems Inproceedings

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

Links | BibTeX

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper)

A. J. Fleming; Y. K. Yong

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper) Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

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Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners

M. Namavar; A. J. Fleming; S. S. Aphale

Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners Inproceedings

Proc. European Control Conference, Zurich, Switzerland, 2013.

BibTeX

Spectral Estimation using Dual Sensors with Uncorrelated Noise

A. J. Fleming; B. Ninness; A. G. Wills

Spectral Estimation using Dual Sensors with Uncorrelated Noise Inproceedings

Proc. IEEE Sensors, Baltimore, MA, 2013.

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Resolution of Sensors with Capacitive Source Impedance

Y. R. Teo; A. J. Fleming

Resolution of Sensors with Capacitive Source Impedance Inproceedings

Proc. IEEE Sensors, Baltimore, MA, 2013.

BibTeX

Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM

Y. K. Yong; A. Bazaei; S. O. R. Moheimani

Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM Inproceedings

Australian Control Conference, Perth, Australia, pp. 171-176, 2013.

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Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper)

Y. K. Yong; A. G. Fowler; A. Mohammadi; S. O. R. Moheimani

Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper) Inproceedings

Proc. IFAC Symposium on Mehatronic Systems, Hangzhou, China, pp. 375-382, 2013.

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Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner

S. P. Wadikhaye; B. Bhikkaji; S. O. R. Moheimani; Y. K. Yong

Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner Inproceedings

American Control Conference, Montreal, Canada, pp. 3811-3816, 2012.

BibTeX

A Z-scanner design for high-speed scanning probe microscopy (Invited Paper)

Y. K. Yong; S. O. R. Moheimani

A Z-scanner design for high-speed scanning probe microscopy (Invited Paper) Inproceedings

IEEE International Conference on Robotics and Automation, St. Paul, MN, USA, pp. 4780-4785, 2012.

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Estimating the resolution of nanopositioning systems from frequency domain data

A. J. Fleming

Estimating the resolution of nanopositioning systems from frequency domain data Inproceedings

Proc. IEEE International Conference on Robotics and Automation, pp. 4786-4791, St. Paul, MN, 2012.

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Measuring picometer nanopositioner resolution

A. J. Fleming

Measuring picometer nanopositioner resolution Inproceedings

In Proc. Actuator, Bremen, 2012.

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Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper)

Y. K. Yong; A. Bazaei; S. O. R. Moheimani; F. Allgower

Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper) Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan, pp. 456-461, 2012.

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A novel serial-kinematic AFM scanner: Design and characterization

S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani

A novel serial-kinematic AFM scanner: Design and characterization Inproceedings

Annual Conference of the IEEE Industrial Electronics Society, Melbourne, Australia, pp. 50-55, 2011.

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Multivariable control designs for piezoelectric tubes (Invited Paper)

B. Bhikkaji; Y. K. Yong; I. A. Mahmood; S. O. R. Moheimani

Multivariable control designs for piezoelectric tubes (Invited Paper) Inproceedings

IFAC World Congress, Milan, Italy, pp. 2030-2035, 2011.

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Analog control of a high-speed atomic force microscope scanner

Y. K. Yong; B. Bhikkaji; S. O. R. Moheimani

Analog control of a high-speed atomic force microscope scanner Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary., pp. 646-651, 2011.

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Y. K. Yong; S. O. R. Moheimani; I. R. Petersen

A Non-raster Scan Method for High-speed SPM Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.

BibTeX

A method for reducing piezoelectric non-linearity in scanning probe microscope images

A. J. Fleming

A method for reducing piezoelectric non-linearity in scanning probe microscope images Inproceedings

Proc. American Control Conference, pp. 2861–2866, San Francisco, CA, 2011.

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Passive piezoelectric shunt control of an atomic force microscope microcantilever

M. Fairbairn; S. O. R. Moheimani; A. J. Fleming

Passive piezoelectric shunt control of an atomic force microscope microcantilever Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.

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Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper)

Y. K. Yong; A. J. Fleming; S. O. R. Moheimani

Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper) Inproceedings

Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, Changchun, China, 2011.

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Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control

M. Fairbairn; S. O. R. Moheimani; A. J. Fleming

Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control Inproceedings

Proc. Australian Control Conference, Melbourne, Australia, 2011.

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A. Bazaei; Y. K. Yong; S. O. R. Moheimani; A. Sebastian

Tracking control of a novel AFM scanner using signal transformation method (Invited Paper) Inproceedings

Proc. IFAC Symposium on Mechatronic System, Cambridge, MA, USA, pp. 84-89, 2010.

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A compact XYZ scanner for fast atomic force microscopy in constant force contact mode

Y. K. Yong; S. O. R. Moheimani

A compact XYZ scanner for fast atomic force microscopy in constant force contact mode Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Montreal, Canada, pp. 225-230, 2010.

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Y. K. Yong; B. Ahmed; S. O. R. Moheimani

A 12-electrode piezoelectric tube scanner for fast atomic force microscopy (Invited Paper) Inproceedings

American Control Conference, Baltimore, Maryland, USA, pp. 4957-4962, 2010.

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A. J. Fleming

High speed nanopositioning with force feedback Inproceedings

Proc. American Control Conference, pp. 4969–4974, Baltimore, MD, 2010.

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A. J. Fleming

Ultra-fast dual-stage vertical positioning for high performance SPMs Inproceedings

Proc. American Control Conference, pp. 4975–4980, Baltimore, MD, 2010.

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A. A. Eielsen; A. J. Fleming

Passive shunt damping of a piezoelectric stack nanopositioner Inproceedings

Proc. American Control Conference, pp. 4963–4968, Baltimore, MD, 2010.

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S. Kuiper; A. J. Fleming; G. Schitter

Dual actuation for high-speed atomic force microscopy Inproceedings

Proc. IFAC Symposium on Mechatronic Systems, pp. 220–226, Boston, MA, 2010.

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A. J. Fleming; K. K. Leang

High performance nanopositioning with integrated strain and force feedback Inproceedings

Proc. IFAC Symposium on Mechatronic Systems, pp. 117–124, Boston, MA, 2010.

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Y. K. Yong; T. F. Lu

Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Singapore, pp. 510-515, 2009.

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Y. K. Yong; S. O. R. Moheimani

Vibration control of a novel tube scanner using piezoelectric strain-induced voltage Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics , 2009.

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A. J. Fleming; S. S. Aphale; S. O. R. Moheimani

A new robust damping and tracking controller for SPM positioning stages Inproceedings

Proc. American Control Conference, St. Louis, MO, 2009.

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A. J. Fleming

Time-domain adaptive feed-forward control of nanopositioning systems with periodic inputs Inproceedings

Proc. American Control Conference, St. Louis, MO, 2009.

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S. O. R. Moheimani; Y. K. Yong

A new piezoelectric tube scanner for simultaneous sensing and actuation (Invited Paper) Inproceedings

American Control Conference, St. Louis, Missouri, USA, pp. 2249-2253, 2009.

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Y. K. Yong; K. Liu; S. O. R. Moheimani

H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage Inproceedings

International Conference on Adaptive Structures and Technologies, Ascona, Switzerland., pp. 730-741, 2008.

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A. J. Fleming; K. K. Leang

Evaluation of charge drives for scanning probe microscope positioning stages Inproceedings

Proc. American Control Conference, pp. 2028–2033, Seattle, WA, 2008.

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K. K. Leang; A. J. Fleming

High-speed serial-kinematic AFM scanner: Design and drive considerations Inproceedings

Proc. American Control Conference, pp. 3188–3193, Seattle, WA, 2008.

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J. Maess; A. J. Fleming; F. Allgöwer

Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback Inproceedings

Proc. American Control Conference, pp. 2022–2027, Seattle, WA, 2008.

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A. J. Fleming; A. G. Wills

Optimal input signals for bandlimited scanning systems Inproceedings

Proc. IFAC World Congress, pp. 11805-11810, Seoul, Korea, 2008.

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S. S. Aphale; A. J. Fleming; S. O. R. Moheimani

A second-order controller for resonance damping and tracking control of nanopositioning systems Inproceedings

Proc. 19th International Conference on Adaptive Structures and Technologies, Ascona, Switzerland, 2008.

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Design, analysis and control of a fast nanopositioning stage

Y. K. Yong; S. S. Aphale; S. O. R. Moheimani

Design, analysis and control of a fast nanopositioning stage Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China, pp. 451-456, 2008, (Finalist of the Best Conference Paper Award).

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A. J. Fleming; A. G. Wills; S. O. R. Moheimani

Sensor fusion for improved control of piezoelectric tube scanners Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Zurich, Switzerland, 2007.

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J. Maess; A. J. Fleming; F. Allgöwer

Simulation of piezoelectric tube actuators by reduced finite element models for controller design Inproceedings

Proc. American Control Conference, New York, NY, 2007.

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S. S. Aphale; S. O. R. Moheimani; A. J. Fleming

Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts Inproceedings

Proc. American Control Conference, New York, NY, 2007.

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Y. K. Yong; T. F. Lu; J. Minase

Trajectory following with a three-DOF micro-motion stage Inproceedings

Australasian Conference on Robotics and Automation, Auckland, New Zealand, 2006.

BibTeX

G. M. Clayton; S. Tien; S. Devasia; A. J. Fleming; S. O. R. Moheimani

Hysteresis and vibration compensation in piezoelectric actuators by integrating charge control and inverse feedforward Inproceedings

Proc. IFAC Symposium on Mechatronic Systems, pp. 812-818, Heidelberg, Germany, 2006.

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B. Bhikkaji; M. Ratnam; A. J. Fleming; S. O. R. Moheimani

High-performance control of a PZT Scanner Inproceedings

Proc. IFAC Symposium on Mechatronic Systems, Heidelberg, Germany, 2006.

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S. S. Aphale; A. J. Fleming; S. O. R. Moheimani

Optimal sensorless shunts for vibration damping of a piezoelectric tube nanopositioner Inproceedings

Proc. International Conference on Adaptive Structures and Technologies, Taipei, Taiwan, 2006.

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A. J. Fleming; S. O. R. Moheimani

Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners Inproceedings

Proc. IEEE Conference on Decision and Control and European Control Conference, Seville, Spain, 2005.

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M. Ratnam; B. Bhikkaji; A. J. Fleming; S. O. R. Moheimani

PPF control of a piezoelectric tube scanner Inproceedings

Proc. IEEE Conference on Decision and Control and European Control Conference, Seville, Spain, 2005.

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Y. K. Yong; T. F. Lu; D. C. Handley; P. Hu

Kinematics of a 3RRR Compliant Micro-Motion Stage: Modelling Accuracy Improvement Inproceedings

International Symposium on Precision Mechanical Measurements, Beijing, China, 2004.

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T. F. Lu; D. C. Handley; Y. K. Yong

Position control of a 3 DOF compliant micro-motion stage Inproceedings

International Conference on Control, Automation, Robotics and Vision, Kunming, China, pp. 1274-1278, 2004.

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D. C. Handley; T. F. Lu; Y. K. Yong; C. Eales

Workspace investigation of a 3 DOF compliant micro-motion stage Inproceedings

International Conference on Control, Automation, Robotics and Vision, Kunming, China, pp. 1279-1284, 2004.

BibTeX

Y. K. Yong; T. F. Lu; D. C. Handley

Loop closure theory in deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator Inproceedings

Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, pp. 57-66, 2003.

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D. C. Handley; T. F. Lu; Y. K. Yong; W. J. Zhang

A simple and efficient dynamic modelling method for compliant micropositioning mechanisms using flexure hinges Inproceedings

Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, pp. 67-76, 2003.

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Support


Supported by the Australian Research Council, the University of Newcastle, and CDSC
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