A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.

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Books

Design, Modeling and Control of Nanopositioning Systems

A. J. Fleming, K. K. Leang

Design, Modeling and Control of Nanopositioning Systems (Book)

Springer, London, UK, 2014, ISBN: 978-3319066165.

(Abstract | Links | BibTeX)

Book Chapters

Position Sensors for Nanopositioning

A. J. Fleming, K. K. Leang

Position Sensors for Nanopositioning (Book Chapter)

Ru,; Liu,; Sun, (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.

(Abstract | BibTeX)

Tracking Control for Nanopositioning Systems

K. K. Leang, A. J. Fleming

Tracking Control for Nanopositioning Systems (Book Chapter)

Ru,; Liu,; Sun, (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.

(Abstract | BibTeX)

Mechanical Design of High-Speed Nanopositioning Systems

Y. K. Yong, K. K. Leang

Mechanical Design of High-Speed Nanopositioning Systems (Book Chapter)

Ru,; Liu,; Sun, (Ed.): Chapter 3, Springer, 2016.

(BibTeX)

High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach

A. Bazaei, Y. K. Yong, S. O. R. Moheimani, A. Sebastian

High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach (Book Chapter)

Eleftheriou,; Moheimani, (Ed.): 413 , Chapter 3, pp. 47-65, Springer, 2011.

(Links | BibTeX)

Journal Articles

High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement

Y. K. Yong, A. J. Fleming

High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement (Journal Article)

Sensors & Actuators: A. Physical, PREPRINT , 2016.

(Abstract | Links | BibTeX)

High-Speed Single-Stage and Dual-Stage Vertical Positioners

Y. K. Yong, S. Wadikhaye, A. J. Fleming

High-Speed Single-Stage and Dual-Stage Vertical Positioners (Journal Article)

Review of Scientific Instruments, PREPRINT , 2016.

(Abstract | Links | BibTeX)

A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion

Y. R. Teo, A. A. Eielsen, J. T. Gravdahl, A. J. Fleming

A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion (Journal Article)

Journal of Dynamic Systems, Measurement and Control, 138 (8), pp. 081002, 2016.

(Abstract | Links | BibTeX)

A new preload mechanism for a high-speed piezoelectric stack nanopositioner

Y. K. Yong

A new preload mechanism for a high-speed piezoelectric stack nanopositioner (Journal Article)

Mechatronics, 36 , pp. 159-166, 2016.

(Links | BibTeX)

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming, B. S. Routley

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing (Journal Article)

Review of Scientific Instruments, 86 , pp. 115001(1-7), 2015.

(Abstract | Links | BibTeX)

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners

D. Russell, A. J. Fleming, S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners (Journal Article)

Journal of Dynamic Systems, Measurement and Control, Accepted , 2015.

(Abstract | Links | BibTeX)

Low-order Damping and Tracking Control for Scanning Probe Systems

A. J. Fleming, Y. R. Teo, K. K. Leang

Low-order Damping and Tracking Control for Scanning Probe Systems (Journal Article)

Frontiers in Mechanical Engineering, 1 , pp. 1-9, 2015.

(Abstract | Links | BibTeX)

Optimal integral force feedback for active vibration control

Y. R. Teo, A. J. Fleming

Optimal integral force feedback for active vibration control (Journal Article)

Journal of Sound and Vibration, 356 (11), pp. 20-33, 2015.

(Abstract | Links | BibTeX)

Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy

Y. K. Yong, S. O. R. Moheimani

Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy (Journal Article)

IEEE Transactions on Nanotechnology, 14 (2), pp. 338-345, 2015, ISSN: 1536-125X.

(Abstract | Links | BibTeX)

An Analytical approach to integral resonant control of second-order systems

M. Namavar, A. J. Fleming, M. Aleyaasin, K. Nakkeeran, S. S. Aphale

An Analytical approach to integral resonant control of second-order systems (Journal Article)

IEEE/ASME Transactions on Mechatronics, 19 (2), pp. 651–659, 2014.

(Links | BibTeX)

Measuring and predicting resolution in nanopositioning systems

A. J. Fleming

Measuring and predicting resolution in nanopositioning systems (Journal Article)

Mechatronics, 24 (8), pp. 605-618, 2014.

(Abstract | Links | BibTeX)

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Y. R. Teo, D. Russell, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Journal Article)

Mechatronics, 24 (6), pp. 701-711, 2014.

(Abstract | Links | BibTeX)

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

A. Mohammadi, A. G. Fowler, Y. K. Yong, S. O. R. Moheimani

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM (Journal Article)

Journal of Microelectromechanical Systems, 23 (3), pp. 610-619, 2014.

(Links | BibTeX)

Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner

S. P. Wadikhaye, Y. K. Yong, B. Bhikkaji, S. O. R. Moheimani

Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner (Journal Article)

Smart Materials and Structures, 23 (2), 2014.

(Links | BibTeX)

A serial-kinematic nanopositioner for high-speed atomic force microscopy

S. P. Wadikhaye, Y. K. Yong, S. O. R. Moheimani

A serial-kinematic nanopositioner for high-speed atomic force microscopy (Journal Article)

Review of Scientific Instruments, 85 (10), 2014.

(Links | BibTeX)

Video-rate lissajous-scan atomic force microscopy

Y. K. Yong, A. Bazaei, S. O. R. Moheimani

Video-rate lissajous-scan atomic force microscopy (Journal Article)

IEEE Transactions on Nanotechnology, 13 (1), pp. 85-93, 2014.

(Links | BibTeX)

A review of nanometer resolution position sensors: operation and performance

A. J. Fleming

A review of nanometer resolution position sensors: operation and performance (Journal Article)

Sensors and Actuators A: Physical, 190 , pp. 106-126, 2013.

(Links | BibTeX)

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

Y. K. Yong, A. J. Fleming, S. O. R. Moheimani

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner (Journal Article)

IEEE/ASME Transactions on Mechatronics, 18 (3), pp. 1113-1121, 2013.

(Links | BibTeX)

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density

A. J. Fleming, B. Ninness, A. G. Wills

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density (Journal Article)

Review of Scientific Instruments, 84 , pp. 085112, 6 pages, 2013.

(Links | BibTeX)

A method for measuring the resolution of nanopositioning systems

A. J. Fleming

A method for measuring the resolution of nanopositioning systems (Journal Article)

Review of Scientific Instruments, 83 (8), pp. 086101, 2012.

(Links | BibTeX)

Getting the message about noise across, loud and clear

A. J. Fleming

Getting the message about noise across, loud and clear (Journal Article)

IEEE Control Systems, 32 (5), pp. 110-112, 2012.

(Links | BibTeX)

High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues

A. Bazaei, Y. K. Yong, S. O. R. Moheimani

High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues (Journal Article)

Review of Scientific Instruments, 83 (6), 2012.

(Links | BibTeX)

Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach

S. P. Wadikhaye, Y. K. Yong, S. O. R. Moheimani

Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach (Journal Article)

Micro and Nano Letters, 7 (4), pp. 309-313, 2012.

(Links | BibTeX)

A. J. Fleming

Dual-stage vertical feedback for high speed-scanning probe microscopy (Journal Article)

IEEE Transactions on Control Systems Technology, 19 (1), pp. 156–165, 2011.

(Links | BibTeX)

B. J. Kenton, A. J. Fleming, K. K. Leang

A compact ultra-fast vertical nanopositioner for improving SPM scan speed (Journal Article)

Review of Scientific Instruments, 82 (12), pp. 123703(1-8), 2011.

(Links | BibTeX)

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Q control of an atomic force microscope micro-cantilever: a sensor-less approach (Journal Article)

IEEE/ASME Journal of Microelectromechanical Systems, 20 (6), pp. 1372–1381, 2011.

(Links | BibTeX)

A. J. Fleming

Quantitative SPM topographies by charge linearization of the vertical actuator (Journal Article)

Review of Scientific Instruments, 81 (10), pp. 103701(1-5), 2010.

(Links | BibTeX)

A. J. Fleming

Nanopositioning system with force feedback for high-performance tracking and vibration control (Journal Article)

IEEE Transactions on Mechatronics, 15 (3), pp. 433–447, 2010.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

Integrated strain and force feedback for high performance control of piezoelectric actuators (Journal Article)

Sensors and Actuators A, 161 (1-2), pp. 256–265, 2010.

(Links | BibTeX)

A. J. Fleming, B. J. Kenton, K. K. Leang

Bridging the gap between conventional and video-speed scanning probe microscopes (Journal Article)

Ultramicroscopy, 110 (9), pp. 1205–1214, 2010.

(Links | BibTeX)

A. J. Fleming, S. S. Aphale, S. O. R. Moheimani

A new method for robust damping and tracking control of scanning probe microscope positioning stages (Journal Article)

IEEE Transactions on Nanotechnology, 9 (4), pp. 438–448, 2010.

(Links | BibTeX)

K. K. Leang, A. J. Fleming

High-speed serial-kinematic AFM scanner: design and drive considerations (Journal Article)

Asian Journal of Control, 11 (2), pp. 144-153, 2009.

(Links | BibTeX)

A. J. Fleming, A. G. Wills

Optimal periodic trajectories for band-limited systems (Journal Article)

IEEE Transactions on Control Systems Technology, 13 (3), pp. 552-562, 2009.

(Links | BibTeX)

A. J. Fleming

A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads (Journal Article)

Review of Scientific Instruments, 80 , pp. 104701(1-7), 2009.

(Links | BibTeX)

J. Maess, A. J. Fleming, F. Allgöwer

Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models (Journal Article)

Review of Scientific Instruments, 79 , pp. 015105(1-9), 2008.

(Links | BibTeX)

G. M. Clayton, S. Tien, S. Devasia, A. J. Fleming, S. O. R. Moheimani

Inverse-feedforward of charge controlled piezopositioners (Journal Article)

Mechatronics, 18 , pp. 273–281, 2008.

(Links | BibTeX)

A. J. Fleming, A. G. Wills, S. O. R. Moheimani

Sensor fusion for improved control of piezoelectric tube scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 15 (6), pp. 1265–6536, 2008.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

Charge drives for scanning probe microscope positioning stages (Journal Article)

Ultramicroscopy, 108 (12), pp. 1551-1557, 2008.

(Links | BibTeX)

B. Bhikkaji, M. Ratnam, A. J. Fleming, S. O. R. Moheimani

High-performance control of piezoelectric tube scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 15 (5), pp. 853-866, 2007.

(Links | BibTeX)

S. S. Aphale, A. J. Fleming, S. O. R. Moheimani

High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control (Journal Article)

IET Micro & Nano Letters, 2 (1), pp. 9–12, 2007.

(Links | BibTeX)

A. J. Fleming, S. O. R. Moheimani

Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners (Journal Article)

IEEE Transactions on Control Systems Technology, 14 (1), pp. 33–44, 2006.

(Links | BibTeX)

Inproceedings

Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage

R. de Rozario, A. J. Fleming, T. Oomen

Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage (Inproceeding)

IFAC Symposium on Mechatronic Systems, Loughborough, UK, 2016.

(Abstract | BibTeX)

Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material

A. J. Fleming, G. Berriman, Y. K. Yong

Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material (Inproceeding)

IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016.

(Abstract | BibTeX)

A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy

Y. R. Teo, Y. K. Yong, A. J. Fleming

A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Inproceeding)

American Control Conference, Boston, MA, 2016., Boston, MA, 2016.

(BibTeX)

High-Speed Single-Stage and Dual-Stage Mirror Scanners

Y. K. Yong, S. P. Wadikhaye, A. J. Fleming

High-Speed Single-Stage and Dual-Stage Mirror Scanners (Inproceeding)

International Conference on Manipulation, Automation and Robotics at Small Scales, Paris, France, 2016.

(Abstract | BibTeX)

123 entries « 1 of 3 »

Support

Supported by the Australian Research Council, the University of Newcastle, and CDSC