A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.

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Books

Design, Modeling and Control of Nanopositioning Systems

A. J. Fleming, K. K. Leang

Design, Modeling and Control of Nanopositioning Systems (Book)

Springer, London, UK, 2014, ISBN: 978-3319066165.

(Abstract | Links | BibTeX)

Book Chapters

Position Sensors for Nanopositioning

A. J. Fleming, K. K. Leang

Position Sensors for Nanopositioning (Book Chapter)

Ru,; Liu,; Sun, (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.

(Abstract | BibTeX)

Tracking Control for Nanopositioning Systems

K. K. Leang, A. J. Fleming

Tracking Control for Nanopositioning Systems (Book Chapter)

Ru,; Liu,; Sun, (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.

(Abstract | BibTeX)

Mechanical Design of High-Speed Nanopositioning Systems

Y. K. Yong, K. K. Leang

Mechanical Design of High-Speed Nanopositioning Systems (Book Chapter)

Ru,; Liu,; Sun, (Ed.): Chapter 3, Springer, 2016.

(BibTeX)

High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach

A. Bazaei, Y. K. Yong, S. O. R. Moheimani, A. Sebastian

High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach (Book Chapter)

Eleftheriou,; Moheimani, (Ed.): 413 , Chapter 3, pp. 47-65, Springer, 2011.

(Links | BibTeX)

Journal Articles

A. J. Fleming, S. O. R. Moheimani

Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners (Journal Article)

IEEE Transactions on Control Systems Technology, 14 (1), pp. 33–44, 2006.

(Links | BibTeX)

Inproceedings

Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion

M. Omidbeike, A. A. Eielsen, Y. K. Yong, A. J. Fleming

Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion (Inproceeding)

International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019.

(Abstract | BibTeX)

A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet

M. Omidbeike, Y. K. Yong, S. I. Moore, A. J. Fleming

A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet (Inproceeding)

Helsinki, Finland, 2019.

(Abstract | BibTeX)

A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators

S. Z. Mansour, R. J. Seethaler, A. J. Fleming

A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators (Inproceeding)

IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.

(Abstract | BibTeX)

Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor

M. Omidbeike, B. S. Routley, A. J. Fleming

Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor (Inproceeding)

IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.

(Abstract | BibTeX)

A monolithic serial-kinematic nanopositioner with integrated sensors and actuators

S. I. Moore, M. Omidbeike, A. J. Fleming, Y. K. Yong

A monolithic serial-kinematic nanopositioner with integrated sensors and actuators (Inproceeding)

IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.

(Abstract | BibTeX)

Resonance-shifting Integral Resonant Control for High-speed Nanopositioning

S. S. Aphale, M. Namavar, A. J. Fleming

Resonance-shifting Integral Resonant Control for High-speed Nanopositioning (Inproceeding)

American Control Conference, Milwaukee, WI, 2018.

(Abstract | BibTeX)

Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor

M. Omidbeike, Y. R. Teo, Y. K. Yong, A. J. Fleming

Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor (Inproceeding)

IFAC World Congress, Toulouse, France, 2017.

(Abstract | BibTeX)

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner

M. G. Ruppert, M. Maroufi, A. Bazaei, S. O. R. Moheimani

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner (Inproceeding)

20th IFAC World Congress, pp. 15554-15560, 2017.

(Abstract | BibTeX)

Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope

M. Maroufi, M. G. Ruppert, A. G. Fowler, S. O. R. Moheimani

Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope (Inproceeding)

American Control Conference, 2017.

(Abstract | BibTeX)

Switched Self-Sensing Actuator for a MEMS Nanopositioner

S. I. Moore, Y. K. Yong, S. O. R. Moheimani

Switched Self-Sensing Actuator for a MEMS Nanopositioner (Inproceeding)

International Conference on Mechatronics, Gippsland, Australia, 2017.

(Abstract | Links | BibTeX)

Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage

R. de Rozario, A. J. Fleming, T. Oomen

Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage (Inproceeding)

IFAC Symposium on Mechatronic Systems, Loughborough, UK, 2016.

(Abstract | BibTeX)

Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material

A. J. Fleming, G. Berriman, Y. K. Yong

Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material (Inproceeding)

IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016.

(Abstract | BibTeX)

A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper)

Y. R. Teo, Y. K. Yong, A. J. Fleming

A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper) (Inproceeding)

American Control Conference, Boston, MA, 2016., Boston, MA, 2016.

(BibTeX)

High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper)

Y. K. Yong, S. P. Wadikhaye, A. J. Fleming

High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper) (Inproceeding)

International Conference on Manipulation, Automation and Robotics at Small Scales, Paris, France, 2016.

(Abstract | BibTeX)

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing

A. J. Fleming, B. S. Routley, J. L. Holdsworth

A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing (Inproceeding)

IEEE Multi-conference on Systems and Control, Sydney, 2015.

(BibTeX)

Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems

T. D. Godfrey, A. A. Eielsen, A. J. Fleming

Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, 2015.

(BibTeX)

Model-less FIR Repetitive Control with consideration of uncertainty

Y. R. Teo, A. A. Eielsen, A. J. Fleming

Model-less FIR Repetitive Control with consideration of uncertainty (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, 2015.

(BibTeX)

Internal Model Control for High-speed Spiral Scan AFM

A. Bazaei, Y. K. Yong, S. O. R. Moheimani

Internal Model Control for High-speed Spiral Scan AFM (Inproceeding)

Australian Control Conference, Gold Coast, Australia, 2015.

(BibTeX)

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors

M. Maroufi, Y. K. Yong, S. O. R. Moheimani

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

(Abstract | Links | BibTeX)

Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper)

Y. K. Yong, S. O. R. Moheimani

Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper) (Inproceeding)

American Control Conference, Chicago, USA, pp. 3473-3477, 2015.

(BibTeX)

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement

D. Russell, A. J. Fleming, S. S. Aphale

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement (Inproceeding)

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

(Links | BibTeX)

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Y. R. Teo, D. Russell, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Inproceeding)

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

(Links | BibTeX)

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning

Y. R. Teo, A. A. Eielsen, J. T. Gravdahl, A. J. Fleming

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning (Inproceeding)

Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014.

(Links | BibTeX)

Active Damping Control Using Optimal Integral Force Feedback

Y. R. Teo, A. J. Fleming

Active Damping Control Using Optimal Integral Force Feedback (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

A New Repetitive Control Scheme Based on Non-Causal FIR Filters

Y. R. Teo, A. J. Fleming

A New Repetitive Control Scheme Based on Non-Causal FIR Filters (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners

D. Russell, A. J. Fleming, S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper)

S. P. Wadikhaye, Y. K. Yong, S. O. R. Moheimani

Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper) (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, pp. 210-215, 2014.

(Links | BibTeX)

Nanopositioner design using tapered flexures: A parametric study (Invited Paper)

S. P. Wadikhaye, Y. K. Yong, S. O. R. Moheimani

Nanopositioner design using tapered flexures: A parametric study (Invited Paper) (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, pp. 856-861, 2013.

(Links | BibTeX)

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis

A. J. Fleming

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis (Inproceeding)

Proc. IEEE American Control Conference, Washington, DC, 2013.

(BibTeX)

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning

A. J. Fleming, K. K. Leang

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning (Inproceeding)

Proc. IEEE American Control Conference, Washington, DC, 2013.

(Links | BibTeX)

Position Sensor Performance in Nanometer Resolution Feedback Systems

A. J. Fleming

Position Sensor Performance in Nanometer Resolution Feedback Systems (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

(BibTeX)

Time domain resolution of nanopositioning systems

A. J. Fleming

Time domain resolution of nanopositioning systems (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

(Links | BibTeX)

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper)

A. J. Fleming, Y. K. Yong

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper) (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

(Links | BibTeX)

Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners

M. Namavar, A. J. Fleming, S. S. Aphale

Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners (Inproceeding)

Proc. European Control Conference, Zurich, Switzerland, 2013.

(BibTeX)

Spectral Estimation using Dual Sensors with Uncorrelated Noise

A. J. Fleming, B. Ninness, A. G. Wills

Spectral Estimation using Dual Sensors with Uncorrelated Noise (Inproceeding)

Proc. IEEE Sensors, Baltimore, MA, 2013.

(BibTeX)

Resolution of Sensors with Capacitive Source Impedance

Y. R. Teo, A. J. Fleming

Resolution of Sensors with Capacitive Source Impedance (Inproceeding)

Proc. IEEE Sensors, Baltimore, MA, 2013.

(BibTeX)

Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM

Y. K. Yong, A. Bazaei, S. O. R. Moheimani

Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM (Inproceeding)

Australian Control Conference, Perth, Australia, pp. 171-176, 2013.

(Links | BibTeX)

Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper)

Y. K. Yong, A. G. Fowler, A. Mohammadi, S. O. R. Moheimani

Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper) (Inproceeding)

Proc. IFAC Symposium on Mehatronic Systems, Hangzhou, China, pp. 375-382, 2013.

(Links | BibTeX)

Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner

S. P. Wadikhaye, B. Bhikkaji, S. O. R. Moheimani, Y. K. Yong

Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner (Inproceeding)

American Control Conference, Montreal, Canada, pp. 3811-3816, 2012.

(BibTeX)

A Z-scanner design for high-speed scanning probe microscopy (Invited Paper)

Y. K. Yong, S. O. R. Moheimani

A Z-scanner design for high-speed scanning probe microscopy (Invited Paper) (Inproceeding)

IEEE International Conference on Robotics and Automation, St. Paul, MN, USA, pp. 4780-4785, 2012.

(Links | BibTeX)

Estimating the resolution of nanopositioning systems from frequency domain data

A. J. Fleming

Estimating the resolution of nanopositioning systems from frequency domain data (Inproceeding)

Proc. IEEE International Conference on Robotics and Automation, pp. 4786-4791, St. Paul, MN, 2012.

(Links | BibTeX)

Measuring picometer nanopositioner resolution

A. J. Fleming

Measuring picometer nanopositioner resolution (Inproceeding)

In Proc. Actuator, Bremen, 2012.

(Links | BibTeX)

Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper)

Y. K. Yong, A. Bazaei, S. O. R. Moheimani, F. Allgower

Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper) (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan, pp. 456-461, 2012.

(Links | BibTeX)

A novel serial-kinematic AFM scanner: Design and characterization

S. P. Wadikhaye, Y. K. Yong, S. O. R. Moheimani

A novel serial-kinematic AFM scanner: Design and characterization (Inproceeding)

Annual Conference of the IEEE Industrial Electronics Society, Melbourne, Australia, pp. 50-55, 2011.

(Links | BibTeX)

143 entries « 2 of 3 »

Support

Supported by the Australian Research Council, the University of Newcastle, and CDSC