A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.

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Miscellaneous

Charge Drive with Active DC Stabilization

A. J. Fleming

Charge Drive with Active DC Stabilization (Miscellaneous)

Patent, 2012.

(BibTeX)

A. J. Fleming

A Positioning System and Method (Miscellaneous)

Patent, 2010.

(BibTeX)

Inproceedings

Multivariable control designs for piezoelectric tubes (Invited Paper)

B. Bhikkaji, Y. K. Yong, I. A. Mahmood, S. O. R. Moheimani

Multivariable control designs for piezoelectric tubes (Invited Paper) (Inproceeding)

IFAC World Congress, Milan, Italy, pp. 2030-2035, 2011.

(Links | BibTeX)

Analog control of a high-speed atomic force microscope scanner

Y. K. Yong, B. Bhikkaji, S. O. R. Moheimani

Analog control of a high-speed atomic force microscope scanner (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary., pp. 646-651, 2011.

(Links | BibTeX)

Y. K. Yong, S. O. R. Moheimani, I. R. Petersen

A Non-raster Scan Method for High-speed SPM (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.

(BibTeX)

A method for reducing piezoelectric non-linearity in scanning probe microscope images

A. J. Fleming

A method for reducing piezoelectric non-linearity in scanning probe microscope images (Inproceeding)

Proc. American Control Conference, pp. 2861–2866, San Francisco, CA, 2011.

(Links | BibTeX)

Passive piezoelectric shunt control of an atomic force microscope microcantilever

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Passive piezoelectric shunt control of an atomic force microscope microcantilever (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.

(BibTeX)

Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper)

Y. K. Yong, A. J. Fleming, S. O. R. Moheimani

Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper) (Inproceeding)

Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, Changchun, China, 2011.

(Links | BibTeX)

Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control (Inproceeding)

Proc. Australian Control Conference, Melbourne, Australia, 2011.

(Links | BibTeX)

A. Bazaei, Y. K. Yong, S. O. R. Moheimani, A. Sebastian

Tracking control of a novel AFM scanner using signal transformation method (Invited Paper) (Inproceeding)

Proc. IFAC Symposium on Mechatronic System, Cambridge, MA, USA, pp. 84-89, 2010.

(Links | BibTeX)

A compact XYZ scanner for fast atomic force microscopy in constant force contact mode

Y. K. Yong, S. O. R. Moheimani

A compact XYZ scanner for fast atomic force microscopy in constant force contact mode (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Montreal, Canada, pp. 225-230, 2010.

(Links | BibTeX)

Y. K. Yong, B. Ahmed, S. O. R. Moheimani

A 12-electrode piezoelectric tube scanner for fast atomic force microscopy (Invited Paper) (Inproceeding)

American Control Conference, Baltimore, Maryland, USA, pp. 4957-4962, 2010.

(BibTeX)

A. J. Fleming

High speed nanopositioning with force feedback (Inproceeding)

Proc. American Control Conference, pp. 4969–4974, Baltimore, MD, 2010.

(Links | BibTeX)

A. J. Fleming

Ultra-fast dual-stage vertical positioning for high performance SPMs (Inproceeding)

Proc. American Control Conference, pp. 4975–4980, Baltimore, MD, 2010.

(Links | BibTeX)

A. A. Eielsen, A. J. Fleming

Passive shunt damping of a piezoelectric stack nanopositioner (Inproceeding)

Proc. American Control Conference, pp. 4963–4968, Baltimore, MD, 2010.

(Links | BibTeX)

S. Kuiper, A. J. Fleming, G. Schitter

Dual actuation for high-speed atomic force microscopy (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, pp. 220–226, Boston, MA, 2010.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

High performance nanopositioning with integrated strain and force feedback (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, pp. 117–124, Boston, MA, 2010.

(Links | BibTeX)

Y. K. Yong, T. F. Lu

Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Singapore, pp. 510-515, 2009.

(Links | BibTeX)

Y. K. Yong, S. O. R. Moheimani

Vibration control of a novel tube scanner using piezoelectric strain-induced voltage (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics , 2009.

(Links | BibTeX)

A. J. Fleming, S. S. Aphale, S. O. R. Moheimani

A new robust damping and tracking controller for SPM positioning stages (Inproceeding)

Proc. American Control Conference, St. Louis, MO, 2009.

(Links | BibTeX)

A. J. Fleming

Time-domain adaptive feed-forward control of nanopositioning systems with periodic inputs (Inproceeding)

Proc. American Control Conference, St. Louis, MO, 2009.

(Links | BibTeX)

S. O. R. Moheimani, Y. K. Yong

A new piezoelectric tube scanner for simultaneous sensing and actuation (Invited Paper) (Inproceeding)

American Control Conference, St. Louis, Missouri, USA, pp. 2249-2253, 2009.

(Links | BibTeX)

Y. K. Yong, K. Liu, S. O. R. Moheimani

H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage (Inproceeding)

International Conference on Adaptive Structures and Technologies, Ascona, Switzerland., pp. 730-741, 2008.

(BibTeX)

A. J. Fleming, K. K. Leang

Evaluation of charge drives for scanning probe microscope positioning stages (Inproceeding)

Proc. American Control Conference, pp. 2028–2033, Seattle, WA, 2008.

(Links | BibTeX)

K. K. Leang, A. J. Fleming

High-speed serial-kinematic AFM scanner: Design and drive considerations (Inproceeding)

Proc. American Control Conference, pp. 3188–3193, Seattle, WA, 2008.

(Links | BibTeX)

J. Maess, A. J. Fleming, F. Allgöwer

Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback (Inproceeding)

Proc. American Control Conference, pp. 2022–2027, Seattle, WA, 2008.

(Links | BibTeX)

A. J. Fleming, A. G. Wills

Optimal input signals for bandlimited scanning systems (Inproceeding)

Proc. IFAC World Congress, pp. 11805-11810, Seoul, Korea, 2008.

(Links | BibTeX)

S. S. Aphale, A. J. Fleming, S. O. R. Moheimani

A second-order controller for resonance damping and tracking control of nanopositioning systems (Inproceeding)

Proc. 19th International Conference on Adaptive Structures and Technologies, Ascona, Switzerland, 2008.

(Links | BibTeX)

Design, analysis and control of a fast nanopositioning stage

Y. K. Yong, S. S. Aphale, S. O. R. Moheimani

Design, analysis and control of a fast nanopositioning stage (Inproceeding)

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China, pp. 451-456, 2008, (Finalist of the Best Conference Paper Award).

(Links | BibTeX)

A. J. Fleming, A. G. Wills, S. O. R. Moheimani

Sensor fusion for improved control of piezoelectric tube scanners (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Zurich, Switzerland, 2007.

(Links | BibTeX)

J. Maess, A. J. Fleming, F. Allgöwer

Simulation of piezoelectric tube actuators by reduced finite element models for controller design (Inproceeding)

Proc. American Control Conference, New York, NY, 2007.

(Links | BibTeX)

S. S. Aphale, S. O. R. Moheimani, A. J. Fleming

Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts (Inproceeding)

Proc. American Control Conference, New York, NY, 2007.

(Links | BibTeX)

Y. K. Yong, T. F. Lu, J. Minase

Trajectory following with a three-DOF micro-motion stage (Inproceeding)

Australasian Conference on Robotics and Automation, Auckland, New Zealand, 2006.

(BibTeX)

G. M. Clayton, S. Tien, S. Devasia, A. J. Fleming, S. O. R. Moheimani

Hysteresis and vibration compensation in piezoelectric actuators by integrating charge control and inverse feedforward (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, pp. 812-818, Heidelberg, Germany, 2006.

(Links | BibTeX)

B. Bhikkaji, M. Ratnam, A. J. Fleming, S. O. R. Moheimani

High-performance control of a PZT Scanner (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Heidelberg, Germany, 2006.

(Links | BibTeX)

S. S. Aphale, A. J. Fleming, S. O. R. Moheimani

Optimal sensorless shunts for vibration damping of a piezoelectric tube nanopositioner (Inproceeding)

Proc. International Conference on Adaptive Structures and Technologies, Taipei, Taiwan, 2006.

(Links | BibTeX)

A. J. Fleming, S. O. R. Moheimani

Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners (Inproceeding)

Proc. IEEE Conference on Decision and Control and European Control Conference, Seville, Spain, 2005.

(Links | BibTeX)

M. Ratnam, B. Bhikkaji, A. J. Fleming, S. O. R. Moheimani

PPF control of a piezoelectric tube scanner (Inproceeding)

Proc. IEEE Conference on Decision and Control and European Control Conference, Seville, Spain, 2005.

(Links | BibTeX)

Y. K. Yong, T. F. Lu, D. C. Handley, P. Hu

Kinematics of a 3RRR Compliant Micro-Motion Stage: Modelling Accuracy Improvement (Inproceeding)

International Symposium on Precision Mechanical Measurements, Beijing, China, 2004.

(BibTeX)

T. F. Lu, D. C. Handley, Y. K. Yong

Position control of a 3 DOF compliant micro-motion stage (Inproceeding)

International Conference on Control, Automation, Robotics and Vision, Kunming, China, pp. 1274-1278, 2004.

(BibTeX)

D. C. Handley, T. F. Lu, Y. K. Yong, C. Eales

Workspace investigation of a 3 DOF compliant micro-motion stage (Inproceeding)

International Conference on Control, Automation, Robotics and Vision, Kunming, China, pp. 1279-1284, 2004.

(BibTeX)

Y. K. Yong, T. F. Lu, D. C. Handley

Loop closure theory in deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator (Inproceeding)

Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, pp. 57-66, 2003.

(Links | BibTeX)

D. C. Handley, T. F. Lu, Y. K. Yong, W. J. Zhang

A simple and efficient dynamic modelling method for compliant micropositioning mechanisms using flexure hinges (Inproceeding)

Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, pp. 67-76, 2003.

(Links | BibTeX)

143 entries « 3 of 3 »

Support

Supported by the Australian Research Council, the University of Newcastle, and CDSC