The majority of vibration in mechanical systems can be attributed to the lack of significant natural modal damping. In structural members, such as aircraft components, the requirement to maximise fatigue life demands that the structure be strong enough to withstand environmental vibration during service. Strength requires weight, which raises costs, and generally decreases performance. By artificially damping a system using piezoelectric or electromagnetic actuators, vibration can be dramatically reduced. This project is investigating new methods for active structural and acoustic vibration control.
FA-18 Vertical stabilizer with PZT actuators.
450V charge drive.
Electrically shunted loudspeaker with pressure and velocity sensors.
In precision machines, such as hard disk drives or milling machines, small amounts of vibration and long settling times reduce the accuracy and speed of the device. Damping augmentation can simultaneously improve both of these performance measures. In acoustic enclosures, such as air-conditioning ducts, fans and flow noise can excite resonance with detrimental effects on personal comfort. Acoustic speakers can be employed to reduce the pressure response of enclosures by adding damping to the lightly-damped modes. In contrast to feed-forward based noise cancellation, damping augmentation globally reduces the pressure response to any disturbance.
Books
S. O. R. Moheimani; A. J. Fleming
Piezoelectric Transducers for Vibration Control and Damping Book
Springer-Verlag, London, 2006, ISBN: 1-84628-331-0.
@book{B06,
title = {Piezoelectric Transducers for Vibration Control and Damping},
author = {S. O. R. Moheimani and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/B06-front.jpg},
isbn = {1-84628-331-0},
year = {2006},
date = {2006-12-01},
publisher = {Springer-Verlag},
address = {London},
keywords = {},
pubstate = {published},
tppubtype = {book}
}
S. O. R. Moheimani; D. Halim; A. J. Fleming
Spatial Control of Vibration: Theory and Experiments Book
World Scientific, 2003, ISBN: 981-238-337-9.
@book{B03,
title = {Spatial Control of Vibration: Theory and Experiments},
author = {S. O. R. Moheimani and D. Halim and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/B03-front.jpg
http://www.precisionmechatronicslab.com/wp-content/publications/B03-page1.jpg
http://www.precisionmechatronicslab.com/wp-content/publications/B03-rear.jpg},
isbn = {981-238-337-9},
year = {2003},
date = {2003-12-01},
publisher = {World Scientific},
keywords = {},
pubstate = {published},
tppubtype = {book}
}
Book Chapters
M. G. Ruppert; N. F. S. de Bem; A. J. Fleming; Y. K. Yong
Characterization of Active Microcantilevers Using Laser Doppler Vibrometry Book Chapter
In: Oberst, Sebastian; Halkon, Benjamin; Ji, Jinchen; Brown, Terry (Ed.): Vibration Engineering for a Sustainable Future , Chapter 45, Springer International Publishing, 2021, ISBN: 978-3-030-48153-7.
@inbook{Ruppert2021b,
title = {Characterization of Active Microcantilevers Using Laser Doppler Vibrometry},
author = {M. G. Ruppert and N. F. S. de Bem and A. J. Fleming and Y. K. Yong},
editor = {Sebastian Oberst and Benjamin Halkon and Jinchen Ji and Terry Brown},
doi = {https://doi.org/10.1007/978-3-030-48153-7},
isbn = {978-3-030-48153-7},
year = {2021},
date = {2021-06-18},
urldate = {2021-06-18},
booktitle = {Vibration Engineering for a Sustainable Future
},
issuetitle = {Experiments, Materials and Signal Processing, Vol. 2},
publisher = {Springer International Publishing},
chapter = {45},
abstract = {Active atomic force microscope cantilevers with on-chip actuation and sensing provide several advantages over passive cantilevers which rely on piezoacoustic base-excitation and the optical beam deflection measurement. Most importantly, these cantilevers provide clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. In this paper, we demonstrate the analysis and calibration steps for three active cantilever geometries with integrated piezoelectric actuation. For this purpose, laser Doppler vibrometry (LDV) is used to experimentally obtain the deflection mode shapes of the first three eigenmodes, calibrate actuation gains, and to determine the dynamic modal stiffnesses using the Brownian spectrum of the cantilever. The experimental values are compared with finite element simulations.},
keywords = {},
pubstate = {published},
tppubtype = {inbook}
}
Active atomic force microscope cantilevers with on-chip actuation and sensing provide several advantages over passive cantilevers which rely on piezoacoustic base-excitation and the optical beam deflection measurement. Most importantly, these cantilevers provide clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. In this paper, we demonstrate the analysis and calibration steps for three active cantilever geometries with integrated piezoelectric actuation. For this purpose, laser Doppler vibrometry (LDV) is used to experimentally obtain the deflection mode shapes of the first three eigenmodes, calibrate actuation gains, and to determine the dynamic modal stiffnesses using the Brownian spectrum of the cantilever. The experimental values are compared with finite element simulations.
M. G. Ruppert; S. O. R. Moheimani
Dynamics and Control of Active Microcantilevers Book Chapter
In: Baillieul, John; Samad, Tariq (Ed.): Encyclopedia of Systems and Control, 2 , Springer London, 2019, ISBN: 978-1-4471-5102-9.
@inbook{Ruppert2019b,
title = {Dynamics and Control of Active Microcantilevers},
author = {M. G. Ruppert and S. O. R. Moheimani},
editor = {Baillieul, John and Samad, Tariq},
url = {https://rd.springer.com/referenceworkentry/10.1007%2F978-1-4471-5102-9_184-2},
doi = {10.1007/978-1-4471-5102-9_184-2},
isbn = {978-1-4471-5102-9},
year = {2019},
date = {2019-11-16},
booktitle = {Encyclopedia of Systems and Control},
volume = {2},
publisher = {Springer London},
abstract = {The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.},
keywords = {},
pubstate = {published},
tppubtype = {inbook}
}
The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.
Journal Articles
M. G. Ruppert; A. J. Fleming; Y. K. Yong
Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors Journal Article
In: Sensors & Actuators: A. Physical, 2021.
@article{Ruppert2021,
title = {Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors},
author = {M. G. Ruppert and A. J. Fleming and Y. K. Yong},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2021/01/J21a.pdf},
doi = {10.1016/j.sna.2020.112519},
year = {2021},
date = {2021-01-19},
journal = {Sensors & Actuators: A. Physical},
abstract = {Active atomic force microscope cantilevers with on-chip actuation and sensing provide several advantages over
passive cantilevers which rely on piezoacoustic base-excitation and optical beam deflection measurement. Active
microcantilevers exhibit a clean frequency response, provide a path-way to miniturization and parallelization and
avoid the need for optical alignment. However, active microcantilevers are presently limited by the feedthrough
between actuators and sensors, and by the cost associated with custom microfabrication. In this work, we propose
a hybrid cantilever design with integrated piezoelectric actuators and a piezoresistive sensor fabricated from the
silicon device layer without requiring an additional doping step. As a result, the design can be fabricated using a
commercial five-mask microelectromechanical systems fabrication process. The theoretical piezoresistor sensitivity
is compared with finite element simulations and experimental results obtained from a prototype device. The
proposed approach is demonstrated to be a promising alternative to conventional microcantilever actuation and
deflection sensing},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Active atomic force microscope cantilevers with on-chip actuation and sensing provide several advantages over
passive cantilevers which rely on piezoacoustic base-excitation and optical beam deflection measurement. Active
microcantilevers exhibit a clean frequency response, provide a path-way to miniturization and parallelization and
avoid the need for optical alignment. However, active microcantilevers are presently limited by the feedthrough
between actuators and sensors, and by the cost associated with custom microfabrication. In this work, we propose
a hybrid cantilever design with integrated piezoelectric actuators and a piezoresistive sensor fabricated from the
silicon device layer without requiring an additional doping step. As a result, the design can be fabricated using a
commercial five-mask microelectromechanical systems fabrication process. The theoretical piezoresistor sensitivity
is compared with finite element simulations and experimental results obtained from a prototype device. The
proposed approach is demonstrated to be a promising alternative to conventional microcantilever actuation and
deflection sensing
passive cantilevers which rely on piezoacoustic base-excitation and optical beam deflection measurement. Active
microcantilevers exhibit a clean frequency response, provide a path-way to miniturization and parallelization and
avoid the need for optical alignment. However, active microcantilevers are presently limited by the feedthrough
between actuators and sensors, and by the cost associated with custom microfabrication. In this work, we propose
a hybrid cantilever design with integrated piezoelectric actuators and a piezoresistive sensor fabricated from the
silicon device layer without requiring an additional doping step. As a result, the design can be fabricated using a
commercial five-mask microelectromechanical systems fabrication process. The theoretical piezoresistor sensitivity
is compared with finite element simulations and experimental results obtained from a prototype device. The
proposed approach is demonstrated to be a promising alternative to conventional microcantilever actuation and
deflection sensing
S. I. Moore; M. G. Ruppert; Y. K. Yong
AFM Cantilever Design for Multimode Q Control: Arbitrary Placement of Higher-Order Modes Journal Article
In: IEEE/ASME Transactions on Mechatronics, pp. 1-6, 2020, (Early Access).
@article{Moore2020,
title = {AFM Cantilever Design for Multimode Q Control: Arbitrary Placement of Higher-Order Modes},
author = {S. I. Moore and M. G. Ruppert and Y. K. Yong},
url = {https://ieeexplore.ieee.org/document/9006926},
doi = {10.1109/TMECH.2020.2975627},
year = {2020},
date = {2020-02-21},
journal = { IEEE/ASME Transactions on Mechatronics},
pages = {1-6},
abstract = {In the fast growing field of multifrequency atomic force microscopy (AFM), the benefits of using higher-order modes has been extensively reported on. However, higher modes of AFM cantilevers are difficult to instrument and Q control is challenging owing to their high frequency nature. At these high frequencies, the latencies in the computations and analog conversions of digital signal processing platforms become significant and limit the effective bandwidth of digital feedback controller implementations. To address this issue, this article presents a novel cantilever design for which the first five modes are placed within a 200 kHz bandwidth. The proposed cantilever is designed using a structural optimization routine. The close spacing and low mechanical bandwidth of the resulting cantilever allows for the implementation of Q controllers for all five modes using a standard FPGA development board for bimodal AFM and imaging on higher-order modes.},
note = {Early Access},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
In the fast growing field of multifrequency atomic force microscopy (AFM), the benefits of using higher-order modes has been extensively reported on. However, higher modes of AFM cantilevers are difficult to instrument and Q control is challenging owing to their high frequency nature. At these high frequencies, the latencies in the computations and analog conversions of digital signal processing platforms become significant and limit the effective bandwidth of digital feedback controller implementations. To address this issue, this article presents a novel cantilever design for which the first five modes are placed within a 200 kHz bandwidth. The proposed cantilever is designed using a structural optimization routine. The close spacing and low mechanical bandwidth of the resulting cantilever allows for the implementation of Q controllers for all five modes using a standard FPGA development board for bimodal AFM and imaging on higher-order modes.
S. I. Moore; M. G. Ruppert; Y. K. Yong
An optimization framework for the design of piezoelectric AFM cantilevers Journal Article
In: Precision Engineering, 60 , pp. 130-142, 2019.
@article{Moore2019c,
title = {An optimization framework for the design of piezoelectric AFM cantilevers},
author = {S. I. Moore and M. G. Ruppert and Y. K. Yong},
url = {https://www.sciencedirect.com/science/article/pii/S0141635919302260},
year = {2019},
date = {2019-08-15},
journal = {Precision Engineering},
volume = {60},
pages = {130-142},
abstract = {To facilitate further miniaturization of atomic force microscopy (AFM) cantilevers and to eliminate the standard optical beam deflection sensor, integrated piezoelectric actuation and sensing on the chip level is a promising option. This article presents a topology optimization method for dynamic mode AFM cantilevers that maximizes the sensitivity of an integrated piezoelectric sensor under stiffness and resonance frequency constraints. Included in the formulation is a new material model C-SIMP (connectivity and solid isotropic material with penalization) that extends the SIMP model to explicitly include the penalization of unconnected structures. Example cantilever designs demonstrate the potential of the topology optimization method. The results show, firstly, the C-SIMP material model significantly reduces connectivity issues and, secondly, arbitrary cantilever topologies can produce increases in sensor sensitivity or resonance frequency compared to a rectangular topology.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
To facilitate further miniaturization of atomic force microscopy (AFM) cantilevers and to eliminate the standard optical beam deflection sensor, integrated piezoelectric actuation and sensing on the chip level is a promising option. This article presents a topology optimization method for dynamic mode AFM cantilevers that maximizes the sensitivity of an integrated piezoelectric sensor under stiffness and resonance frequency constraints. Included in the formulation is a new material model C-SIMP (connectivity and solid isotropic material with penalization) that extends the SIMP model to explicitly include the penalization of unconnected structures. Example cantilever designs demonstrate the potential of the topology optimization method. The results show, firstly, the C-SIMP material model significantly reduces connectivity issues and, secondly, arbitrary cantilever topologies can produce increases in sensor sensitivity or resonance frequency compared to a rectangular topology.
M. G. Ruppert; S. I. Moore; M. Zawierta; A. J. Fleming; G. Putrino; Y. K. Yong
Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing Journal Article
In: Nanotechnology, 30 (8), pp. 085503, 2019.
@article{Ruppert2018b,
title = {Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing},
author = {M. G. Ruppert and S. I. Moore and M. Zawierta and A. J. Fleming and G. Putrino and Y. K. Yong},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2019/08/Ruppert_2019_Nanotechnology_30_085503.pdf},
doi = {https://doi.org/10.1088/1361-6528/aae40b},
year = {2019},
date = {2019-01-02},
journal = {Nanotechnology},
volume = {30},
number = {8},
pages = {085503},
abstract = {Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion.
M. G. Ruppert
Self-sensing, estimation and control in multifrequency Atomic Force Microscopy. Journal Article
In: Journal & Proceedings of the Royal Society of New South Wales, 151 (1), pp. 111, 2018, ISSN: 0035-9173/18/010111-01.
@article{Ruppert2018b,
title = {Self-sensing, estimation and control in multifrequency Atomic Force Microscopy. },
author = {M. G. Ruppert},
url = {https://royalsoc.org.au/images/pdf/journal/151-1-Ruppert.pdf},
issn = {0035-9173/18/010111-01},
year = {2018},
date = {2018-06-01},
journal = {Journal & Proceedings of the Royal Society of New South Wales},
volume = {151},
number = {1},
pages = {111},
abstract = {Despite the undeniable success of the atomic force microscope (AFM), dynamic techniques still face limitations in terms of spatial resolution, imaging speed and high cost of acquisition. In order to expand the capabilities of the instrument, it was realized that the information about the nano-mechanical properties of a sample are encoded over a range of frequencies and the excitation and detection of higher-order eigenmodes of the micro-cantilever open up further informa-
tion channels. The ability to control these modes and their fast responses to excitation is believed to be the key to unravelling the true potential of these ethods. This work addresses three major drawbacks of the standard AFM setup, which limit the feasibility of multi-frequency approaches.
First, microelectromechanical system (MEMS) probes with integrated piezoelectric layers is motivated, enabling the development of novel multimode self-sensing and self-actuating techniques. Specifically, these piezoelectric transduction schemes permit the miniaturization of the entire AFM towards a cost-effective single-chip device with nanoscale precision in a much smaller form factor than that of conventional macroscale instruments.
Second, the integrated actuation enables the development of multimode controllers which exhibits remarkable performance in arbitrarily modifying the quality factor of multiple eigenmodes and comes with inherent stability robustness. The experimental results demonstrate improved imaging stability, higher scan speeds and adjustable contrast when mapping nano-mechanical properties of soft samples.
Last, in light of the demand for constantly increasing imaging speeds while providing multi-frequency flexibility, the estimation of multiple components of the high-frequency deflection signal is performed with a linear time-varying multi-frequency Kalman filter. The chosen representation allows for an efficient high-bandwidth implementation on a Field Programmable Gate Array. Tracking bandwidth, noise performance and trimodal AFM imaging on a two-component polymer sample are verified and shown to be superior to that of the commonly used lock-in amplifier.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Despite the undeniable success of the atomic force microscope (AFM), dynamic techniques still face limitations in terms of spatial resolution, imaging speed and high cost of acquisition. In order to expand the capabilities of the instrument, it was realized that the information about the nano-mechanical properties of a sample are encoded over a range of frequencies and the excitation and detection of higher-order eigenmodes of the micro-cantilever open up further informa-
tion channels. The ability to control these modes and their fast responses to excitation is believed to be the key to unravelling the true potential of these ethods. This work addresses three major drawbacks of the standard AFM setup, which limit the feasibility of multi-frequency approaches.
First, microelectromechanical system (MEMS) probes with integrated piezoelectric layers is motivated, enabling the development of novel multimode self-sensing and self-actuating techniques. Specifically, these piezoelectric transduction schemes permit the miniaturization of the entire AFM towards a cost-effective single-chip device with nanoscale precision in a much smaller form factor than that of conventional macroscale instruments.
Second, the integrated actuation enables the development of multimode controllers which exhibits remarkable performance in arbitrarily modifying the quality factor of multiple eigenmodes and comes with inherent stability robustness. The experimental results demonstrate improved imaging stability, higher scan speeds and adjustable contrast when mapping nano-mechanical properties of soft samples.
Last, in light of the demand for constantly increasing imaging speeds while providing multi-frequency flexibility, the estimation of multiple components of the high-frequency deflection signal is performed with a linear time-varying multi-frequency Kalman filter. The chosen representation allows for an efficient high-bandwidth implementation on a Field Programmable Gate Array. Tracking bandwidth, noise performance and trimodal AFM imaging on a two-component polymer sample are verified and shown to be superior to that of the commonly used lock-in amplifier.
tion channels. The ability to control these modes and their fast responses to excitation is believed to be the key to unravelling the true potential of these ethods. This work addresses three major drawbacks of the standard AFM setup, which limit the feasibility of multi-frequency approaches.
First, microelectromechanical system (MEMS) probes with integrated piezoelectric layers is motivated, enabling the development of novel multimode self-sensing and self-actuating techniques. Specifically, these piezoelectric transduction schemes permit the miniaturization of the entire AFM towards a cost-effective single-chip device with nanoscale precision in a much smaller form factor than that of conventional macroscale instruments.
Second, the integrated actuation enables the development of multimode controllers which exhibits remarkable performance in arbitrarily modifying the quality factor of multiple eigenmodes and comes with inherent stability robustness. The experimental results demonstrate improved imaging stability, higher scan speeds and adjustable contrast when mapping nano-mechanical properties of soft samples.
Last, in light of the demand for constantly increasing imaging speeds while providing multi-frequency flexibility, the estimation of multiple components of the high-frequency deflection signal is performed with a linear time-varying multi-frequency Kalman filter. The chosen representation allows for an efficient high-bandwidth implementation on a Field Programmable Gate Array. Tracking bandwidth, noise performance and trimodal AFM imaging on a two-component polymer sample are verified and shown to be superior to that of the commonly used lock-in amplifier.
M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani
On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach Journal Article
In: IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215-225, 2017.
@article{Ruppert2017,
title = {On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach},
author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
doi = {10.1109/JMEMS.2016.2628890},
year = {2017},
date = {2017-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {1},
pages = {215-225},
abstract = {The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm x 8μm in closed loop.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm x 8μm in closed loop.
Y. R. Teo; A. J. Fleming
Optimal integral force feedback for active vibration control Journal Article
In: Journal of Sound and Vibration, 356 (11), pp. 20-33, 2015.
@article{J15c,
title = {Optimal integral force feedback for active vibration control},
author = {Y. R. Teo and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2015/10/J15c.pdf},
year = {2015},
date = {2015-06-27},
journal = {Journal of Sound and Vibration},
volume = {356},
number = {11},
pages = {20-33},
abstract = {This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope.
M. G. Ruppert; S. O. R. Moheimani
A novel self-sensing technique for tapping-mode atomic force microscopy Journal Article
In: Review of Scientific Instruments, 84 (12), pp. 125006, 2013.
@article{Ruppert2013b,
title = {A novel self-sensing technique for tapping-mode atomic force microscopy},
author = {M. G. Ruppert and S. O. R. Moheimani},
doi = {http://dx.doi.org/10.1063/1.4841855},
year = {2013},
date = {2013-12-01},
journal = {Review of Scientific Instruments},
volume = {84},
number = {12},
pages = {125006},
abstract = {This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing Micro Electro Mechanical System processes. The setup enables the omission of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. Due to the high amount of capacitive feedthrough in the measured charge signal, a feedforward control technique is employed to increase the dynamic range from less than 1dB to approximately 35dB. Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for AFM imaging.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing Micro Electro Mechanical System processes. The setup enables the omission of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. Due to the high amount of capacitive feedthrough in the measured charge signal, a feedforward control technique is employed to increase the dynamic range from less than 1dB to approximately 35dB. Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for AFM imaging.
A. G. Wills; D. Bates; A. J. Fleming; B. Ninness; S. O. R. Moheimani
Model predictive control applied to constraint handling in active noise and vibration control Journal Article
In: IEEE Transactions on Control Systems Technology, 16 (1), pp. 3–12, 2008.
@article{J08b,
title = {Model predictive control applied to constraint handling in active noise and vibration control},
author = {A. G. Wills and D. Bates and A. J. Fleming and B. Ninness and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J08b.pdf},
year = {2008},
date = {2008-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {16},
number = {1},
pages = {3--12},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. S. Aphale; A. J. Fleming; S. O. R. Moheimani
Integral resonant control of collocated smart structures Journal Article
In: IOP Smart materials and Structures, 16 , pp. 439-446, 2007.
@article{J07a,
title = {Integral resonant control of collocated smart structures},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J07a.pdf},
year = {2007},
date = {2007-12-01},
journal = {IOP Smart materials and Structures},
volume = {16},
pages = {439-446},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; D. Niederberger; S. O. R. Moheimani; M. Morari
Control of resonant acoustic sound fields by electrical shunting of a loudspeaker Journal Article
In: IEEE Transactions on Control Systems Technology., 14 (4), pp. 689-703, 2007.
@article{J07b,
title = {Control of resonant acoustic sound fields by electrical shunting of a loudspeaker},
author = {A. J. Fleming and D. Niederberger and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J07b.pdf},
year = {2007},
date = {2007-12-01},
journal = {IEEE Transactions on Control Systems Technology.},
volume = {14},
number = {4},
pages = {689-703},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; S. O. R. Moheimani
Control oriented synthesis of high performance piezoelectric shunt impedances for structural vibration control Journal Article
In: IEEE Transactions on Control Systems Technology, 13 (1), pp. 98–112, 2005.
@article{J05c,
title = {Control oriented synthesis of high performance piezoelectric shunt impedances for structural vibration control},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J05c.pdf},
year = {2005},
date = {2005-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {13},
number = {1},
pages = {98--112},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
D. Niederberger; A. J. Fleming; S. O. R. Moheimani; M. Morari
Adaptive multimode resonant piezoelectric shunt damping Journal Article
In: IOP Smart Materials and Structures, 18 (2), pp. 291–315, 2004.
@article{J04b,
title = {Adaptive multimode resonant piezoelectric shunt damping},
author = {D. Niederberger and A. J. Fleming and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J04b.pdf},
year = {2004},
date = {2004-12-01},
journal = {IOP Smart Materials and Structures},
volume = {18},
number = {2},
pages = {291--315},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. O. R. Moheimani; A. J. Fleming; S. Behrens
Dynamics, Stability and Control of Multivariable Piezoelectric Shunts Journal Article
In: IEEE/ASME Transactions on Mechatronics, 9 (1), pp. 87–99, 2004.
@article{J04a,
title = {Dynamics, Stability and Control of Multivariable Piezoelectric Shunts},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J04a.pdf},
year = {2004},
date = {2004-01-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {9},
number = {1},
pages = {87--99},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. Behrens; A. J. Fleming; S. O. R. Moheimani
A broadband controller for shunt piezoelectric damping of structural vibration Journal Article
In: IOP Smart Materials and Structures, 12 (1), pp. 36–48, 2003.
@article{J03a,
title = {A broadband controller for shunt piezoelectric damping of structural vibration},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03a.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {36--48},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; S. O. R. Moheimani
Adaptive piezoelectric shunt damping Journal Article
In: IOP Smart Materials and Structures, 12 (1), pp. 18–28, 2003.
@article{J03b,
title = {Adaptive piezoelectric shunt damping},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03b.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {18--28},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; S. O. R. Moheimani; S. Behrens
Reducing the Inductance Requirements of Piezoelectric Shunt Damping Circuits Journal Article
In: IOP Smart Materials and Structures, 12 (1), pp. 57–64, 2003.
@article{J03c,
title = {Reducing the Inductance Requirements of Piezoelectric Shunt Damping Circuits},
author = {A. J. Fleming and S. O. R. Moheimani and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03c.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {57--64},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. O. R. Moheimani; A. J. Fleming; S. Behrens
On the feedback structure of wideband piezoelectric shunt damping systems Journal Article
In: IOP Smart Materials and Structures, 12 (1), pp. 49–56, 2003.
@article{J03d,
title = {On the feedback structure of wideband piezoelectric shunt damping systems},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03d.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {49--56},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. Behrens; S. O. R. Moheimani; A. J. Fleming
Multiple mode current flowing passive piezoelectric shunt controller Journal Article
In: Journal of Sound and Vibration, 266 (5), pp. 929–942, 2003.
@article{J03f,
title = {Multiple mode current flowing passive piezoelectric shunt controller},
author = {S. Behrens and S. O. R. Moheimani and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03f.pdf},
year = {2003},
date = {2003-01-01},
journal = {Journal of Sound and Vibration},
volume = {266},
number = {5},
pages = {929--942},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; S. Behrens; S. O. R. Moheimani
Optimization and implementation of multi-mode piezoelectric shunt damping systems Journal Article
In: IEEE/ASME Transactions on Mechatronics, 7 (1), pp. 87–94, 2002.
@article{J02a,
title = {Optimization and implementation of multi-mode piezoelectric shunt damping systems},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J02a.pdf},
year = {2002},
date = {2002-01-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {7},
number = {1},
pages = {87--94},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. O. R. Moheimani; A. J. Fleming; S. Behrens
Highly resonant controller for multimode piezoelectric shunt damping Journal Article
In: IEE Electronics Letters, 37 (25), pp. 1505–1506, 2001.
@article{J01a,
title = {Highly resonant controller for multimode piezoelectric shunt damping},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J01a.pdf},
year = {2001},
date = {2001-01-01},
journal = {IEE Electronics Letters},
volume = {37},
number = {25},
pages = {1505--1506},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Miscellaneous
A. J. Fleming; S. Behrens; S. O. R. Moheimani
An impedance synthesizing arrangement, an improved vibrational damping apparatus and a method for deriving a digital signal processing algorithm Miscellaneous
Patent, 2001.
@misc{P1,
title = {An impedance synthesizing arrangement, an improved vibrational damping apparatus and a method for deriving a digital signal processing algorithm},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
year = {2001},
date = {2001-01-01},
volume = {Published Application PCT/AU01/00566},
howpublished = {Patent},
keywords = {},
pubstate = {published},
tppubtype = {misc}
}
Inproceedings
M. Omidbeike; Y. K. Yong; S. I. Moore; A. J. Fleming
A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet Inproceedings
In: Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.
@inproceedings{omidbeike2019axis},
title = {A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet},
author = {M. Omidbeike and Y. K. Yong and S. I. Moore and A. J. Fleming
},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19a.pdf},
doi = {10.1109/MARSS.2019.8860940},
issn = {978-1-7281-0948-0},
year = {2019},
date = {2019-07-02},
journal = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},
address = {Helsinki, Finland},
abstract = {The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 µm and 13.2 µm respectively; a Z travel range of 26 µm; and a rotational motion about the X-and Y-axis of 600 µrad and 884 µrad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X-and Y-axis. A decentralized control strategy is implemented to track Z, θx and θy motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 µm and 13.2 µm respectively; a Z travel range of 26 µm; and a rotational motion about the X-and Y-axis of 600 µrad and 884 µrad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X-and Y-axis. A decentralized control strategy is implemented to track Z, θx and θy motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.
M. G. Ruppert; B. S. Routley; A. J. Fleming; Y. K. Yong; G. E. Fantner
Model-based Q Factor Control for Photothermally Excited Microcantilevers Inproceedings
In: Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.
@inproceedings{Ruppert2019,
title = {Model-based Q Factor Control for Photothermally Excited Microcantilevers},
author = {M. G. Ruppert and B. S. Routley and A. J. Fleming and Y. K. Yong and G. E. Fantner},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19b.pdf},
doi = {10.1109/MARSS.2019.8860969},
issn = {978-1-7281-0948-0},
year = {2019},
date = {2019-07-01},
booktitle = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},
address = {Helsinki, Finland},
abstract = {Photothermal excitation of the cantilever for dynamic atomic force microscopy (AFM) modes is an attractive actuation method as it provides clean cantilever actuation leading to well-defined frequency responses. Unlike conventional piezo-acoustic excitation of the cantilever, it allows for model-based quality (Q) factor control in order to increase the cantilever tracking bandwidth for tapping-mode AFM or to reduce resonant ringing for high-speed photothermal offresonance tapping (PORT) in ambient conditions. In this work, we present system identification, controller design and experimental results on controlling the Q factor of a photothermally driven cantilever. The work is expected to lay the groundwork for future implementations for high-speed PORT imaging in ambient conditions.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Photothermal excitation of the cantilever for dynamic atomic force microscopy (AFM) modes is an attractive actuation method as it provides clean cantilever actuation leading to well-defined frequency responses. Unlike conventional piezo-acoustic excitation of the cantilever, it allows for model-based quality (Q) factor control in order to increase the cantilever tracking bandwidth for tapping-mode AFM or to reduce resonant ringing for high-speed photothermal offresonance tapping (PORT) in ambient conditions. In this work, we present system identification, controller design and experimental results on controlling the Q factor of a photothermally driven cantilever. The work is expected to lay the groundwork for future implementations for high-speed PORT imaging in ambient conditions.
D. M. Harcombe; M. G. Ruppert; A. J. Fleming
Modeling and Noise Analysis of a Microcantilever-based Mass Sensor Inproceedings
In: Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.
@inproceedings{Harcombe2019,
title = {Modeling and Noise Analysis of a Microcantilever-based Mass Sensor},
author = {D. M. Harcombe and M. G. Ruppert and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19c.pdf},
doi = {10.1109/MARSS.2019.8860982},
issn = {978-1-7281-0948-0},
year = {2019},
date = {2019-07-01},
booktitle = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},
address = {Helsinki, Finland},
abstract = {Nanomechanical devices have the potential for practical applications as mass sensors. In microcantilever based sensing, resonance frequency shifts are tracked by a
phase-locked loop (PLL) in-order to monitor mass adsorption. A major challenge in minimizing the mass detection limit comes from the noise present in the system due to thermal, sensor and oscillator noise. There is numerical difficulty in simulating PLLs, as both low frequency phase estimates and high frequency mixing products need to be captured resulting in a stiff problem. By using linear system-theoretic modeling an in-depth analysis of the system is able to be conducted overcoming this issue. This provides insight into individual noise source propagation, dominant noise sources and possible ways to reduce their effects. The developed model is verified in simulation against the non-linear PLL, with each achieving low picogram sensitivity for a 100 Hz loop bandwidth and realistically modeled noise sources.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Nanomechanical devices have the potential for practical applications as mass sensors. In microcantilever based sensing, resonance frequency shifts are tracked by a
phase-locked loop (PLL) in-order to monitor mass adsorption. A major challenge in minimizing the mass detection limit comes from the noise present in the system due to thermal, sensor and oscillator noise. There is numerical difficulty in simulating PLLs, as both low frequency phase estimates and high frequency mixing products need to be captured resulting in a stiff problem. By using linear system-theoretic modeling an in-depth analysis of the system is able to be conducted overcoming this issue. This provides insight into individual noise source propagation, dominant noise sources and possible ways to reduce their effects. The developed model is verified in simulation against the non-linear PLL, with each achieving low picogram sensitivity for a 100 Hz loop bandwidth and realistically modeled noise sources.
phase-locked loop (PLL) in-order to monitor mass adsorption. A major challenge in minimizing the mass detection limit comes from the noise present in the system due to thermal, sensor and oscillator noise. There is numerical difficulty in simulating PLLs, as both low frequency phase estimates and high frequency mixing products need to be captured resulting in a stiff problem. By using linear system-theoretic modeling an in-depth analysis of the system is able to be conducted overcoming this issue. This provides insight into individual noise source propagation, dominant noise sources and possible ways to reduce their effects. The developed model is verified in simulation against the non-linear PLL, with each achieving low picogram sensitivity for a 100 Hz loop bandwidth and realistically modeled noise sources.
M. G. Ruppert; Y. K. Yong
Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy Inproceedings
In: IEEE/ASME Advanced Intelligent Mechatronics (AIM), Auckland, New Zealand, 2018.
@inproceedings{Ruppert2018b,
title = {Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy},
author = {M. G. Ruppert and Y. K. Yong},
year = {2018},
date = {2018-07-09},
booktitle = {IEEE/ASME Advanced Intelligent Mechatronics (AIM)},
address = {Auckland, New Zealand},
abstract = {Atomic force microscope cantilevers with integrated actuation and sensing on the chip level provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. However, the two major difficulties with integrated transduction methods are a complicated fabrication process, often involving a number of fabrication
steps, and a high amount of feedthrough from actuation to sensing electrodes. This work proposes two hybrid cantilever designs with piezoelectric actuators and piezoresistive sensors to reduce the actuator to sensor feedthrough. The designs can be realized using a commercial microelectromechanical systems fabrication process and only require a simple five-mask patterning and etching process. Finite element analysis results are presented to obtain modal responses, actuator gain and sensor sensitivities of the cantilever designs.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Atomic force microscope cantilevers with integrated actuation and sensing on the chip level provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. However, the two major difficulties with integrated transduction methods are a complicated fabrication process, often involving a number of fabrication
steps, and a high amount of feedthrough from actuation to sensing electrodes. This work proposes two hybrid cantilever designs with piezoelectric actuators and piezoresistive sensors to reduce the actuator to sensor feedthrough. The designs can be realized using a commercial microelectromechanical systems fabrication process and only require a simple five-mask patterning and etching process. Finite element analysis results are presented to obtain modal responses, actuator gain and sensor sensitivities of the cantilever designs.
steps, and a high amount of feedthrough from actuation to sensing electrodes. This work proposes two hybrid cantilever designs with piezoelectric actuators and piezoresistive sensors to reduce the actuator to sensor feedthrough. The designs can be realized using a commercial microelectromechanical systems fabrication process and only require a simple five-mask patterning and etching process. Finite element analysis results are presented to obtain modal responses, actuator gain and sensor sensitivities of the cantilever designs.
M. G. Ruppert; S. O. R. Moheimani
Novel Reciprocal Self-Sensing Techniques for Tapping-Mode Atomic Force Microscopy Inproceedings
In: 19th IFAC World Congress, Cape Town, South Africa, 2014.
@inproceedings{Ruppert2014,
title = {Novel Reciprocal Self-Sensing Techniques for Tapping-Mode Atomic Force Microscopy},
author = {M. G. Ruppert and S. O. R. Moheimani},
doi = {https://doi.org/10.3182/20140824-6-ZA-1003.00376},
year = {2014},
date = {2014-08-24},
booktitle = {19th IFAC World Congress},
address = {Cape Town, South Africa},
abstract = {We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic
force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively.
A microcantilever, which can be batch fabricated through a standard microelectromechanical
system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for
actuation and deflection sensing. The setup enables the elimination of the optical beam deflection
technique which is commonly used to measure the cantilever oscillation amplitude. The voltage
to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough
which degrades the dynamic range of the sensors significantly. A feedforward control technique
is employed to cancel the feedthrough and increase the dynamic range from less than 1 dB
to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve
an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for
TM-AFM imaging.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic
force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively.
A microcantilever, which can be batch fabricated through a standard microelectromechanical
system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for
actuation and deflection sensing. The setup enables the elimination of the optical beam deflection
technique which is commonly used to measure the cantilever oscillation amplitude. The voltage
to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough
which degrades the dynamic range of the sensors significantly. A feedforward control technique
is employed to cancel the feedthrough and increase the dynamic range from less than 1 dB
to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve
an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for
TM-AFM imaging.
force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively.
A microcantilever, which can be batch fabricated through a standard microelectromechanical
system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for
actuation and deflection sensing. The setup enables the elimination of the optical beam deflection
technique which is commonly used to measure the cantilever oscillation amplitude. The voltage
to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough
which degrades the dynamic range of the sensors significantly. A feedforward control technique
is employed to cancel the feedthrough and increase the dynamic range from less than 1 dB
to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve
an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for
TM-AFM imaging.
S. S. Aphale; A. J. Fleming; S. O. R. Moheimani
Integral control of smart structures with collocated sensors and actuators Inproceedings
In: Proc. European Control Conference, Kos, Greece, 2007.
@inproceedings{C07d,
title = {Integral control of smart structures with collocated sensors and actuators},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C07d.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. European Control Conference},
address = {Kos, Greece},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. S. Aphale; A. J. Fleming; S. O. R. Moheimani
Integral control of collocated smart structures Inproceedings
In: Proc. SPIE Smart Materials and Structures, San Diego, CA, 2007.
@inproceedings{D07a,
title = {Integral control of collocated smart structures},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D07a.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. SPIE Smart Materials and Structures},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; D. Niederberger; S. O. R. Moheimani; M. Morari
Mitigation of acoustic resonance using electrically shunted loudspeakers Inproceedings
In: Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2006.
@inproceedings{D06a,
title = {Mitigation of acoustic resonance using electrically shunted loudspeakers},
author = {A. J. Fleming and D. Niederberger and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D06a.pdf},
year = {2006},
date = {2006-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. G. Wills; D. Bates; A. J. Fleming; B. Ninness; S. O. R. Moheimani
Application of MPC to an active structure using sampling rates up to 25kHz Inproceedings
In: Proc. IEEE Conference on Decision and Control and European Control Conference, pp. 3176–3181, Seville, Spain, 2005.
@inproceedings{C05d,
title = {Application of MPC to an active structure using sampling rates up to 25kHz},
author = {A. G. Wills and D. Bates and A. J. Fleming and B. Ninness and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C05d.pdf},
year = {2005},
date = {2005-01-01},
booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},
pages = {3176--3181},
address = {Seville, Spain},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
D. Niederberger; A. J. Fleming; S. O. R. Moheimani; M. Morari
Online-tuned multi-mode resonant piezoelectric shunt for broadband vibration suppression Inproceedings
In: Proc. IFAC Symposium on Mechatronic Systems, Sydney, Australia, 2004.
@inproceedings{C04a,
title = {Online-tuned multi-mode resonant piezoelectric shunt for broadband vibration suppression},
author = {D. Niederberger and A. J. Fleming and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C04a.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
Optimal impedance design for piezoelectric vibration control Inproceedings
In: Proc. IEEE Conference on Decision and Control, Bahamas, 2004.
@inproceedings{C04c,
title = {Optimal impedance design for piezoelectric vibration control},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C04c.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. IEEE Conference on Decision and Control},
address = {Bahamas},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. Behrens; A. J. Fleming; S. O. R. Moheimani
Negative inductor-resistor controller for electromagnetic shunt damping Inproceedings
In: Proc. IFAC Symposium on Mechatronic Systems, Sydney, Australia, 2004.
@inproceedings{C04e,
title = {Negative inductor-resistor controller for electromagnetic shunt damping},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C04e.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
Synthesis of optimal piezoelectric shunt impedances for structural vibration control Inproceedings
In: Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2004.
@inproceedings{D04b,
title = {Synthesis of optimal piezoelectric shunt impedances for structural vibration control},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D04b.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
An autonomous piezoelectric resonant shunt damping system Inproceedings
In: Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2003.
@inproceedings{D03a,
title = {An autonomous piezoelectric resonant shunt damping system},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D03a.pdf},
year = {2003},
date = {2003-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. Behrens; A. J. Fleming; S. O. R. Moheimani
Robust piezoelectric passive shunt dampener Inproceedings
In: Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2003.
@inproceedings{D03c,
title = {Robust piezoelectric passive shunt dampener},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D03c.pdf},
year = {2003},
date = {2003-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. O. R. Moheimani; S. Behrens; A. J. Fleming
Dynamics and stability of wideband vibration absorbers with multiple piezoelectric transducers Inproceedings
In: Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002.
@inproceedings{C02b,
title = {Dynamics and stability of wideband vibration absorbers with multiple piezoelectric transducers},
author = {S. O. R. Moheimani and S. Behrens and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02b.pdf},
year = {2002},
date = {2002-12-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
Power harvesting piezoelectric shunt damping Inproceedings
In: Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002.
@inproceedings{C02d,
title = {Power harvesting piezoelectric shunt damping},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02d.pdf},
year = {2002},
date = {2002-12-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
The effect of artificially reducing the size of inductor values in piezoelectric shunt damping circuits Inproceedings
In: Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002.
@inproceedings{C02e,
title = {The effect of artificially reducing the size of inductor values in piezoelectric shunt damping circuits},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02e.pdf},
year = {2002},
date = {2002-12-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. O. R. Moheimani; A. J. Fleming; S. Behrens
On the feedback structure of wideband piezoelectric shunt damping systems Inproceedings
In: Proc. IFAC World Congress, Barcelona, Spain, 2002.
@inproceedings{C02a,
title = {On the feedback structure of wideband piezoelectric shunt damping systems},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02a.pdf},
year = {2002},
date = {2002-07-01},
booktitle = {Proc. IFAC World Congress},
address = {Barcelona, Spain},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. Behrens; S. O. R. Moheimani; A. J. Fleming
Multiple mode passive piezoelectric shunt dampener Inproceedings
In: Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002.
@inproceedings{C02f,
title = {Multiple mode passive piezoelectric shunt dampener},
author = {S. Behrens and S. O. R. Moheimani and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02f.pdf},
year = {2002},
date = {2002-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
Adaptive piezoelectric shunt damping Inproceedings
In: Proc. SPIE Symposium on Smart Structures and Materials -- Industrial and Commercial Applications of Smart Structures Technologies, San Diego, CA, 2002.
@inproceedings{D02a,
title = {Adaptive piezoelectric shunt damping},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D02a.pdf},
year = {2002},
date = {2002-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures and Materials -- Industrial and Commercial Applications of Smart Structures Technologies},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. Behrens; A. J. Fleming; S. O. R. Moheimani
Series-parallel impedance structure for piezoelectric vibration damping Inproceedings
In: Proc. SPIE International Symposium on Smart Materials, Nano, and Micro-Smart Systems, Melbourne, Australia, 2002.
@inproceedings{D02b,
title = {Series-parallel impedance structure for piezoelectric vibration damping},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D02b.pdf},
year = {2002},
date = {2002-01-01},
booktitle = {Proc. SPIE International Symposium on Smart Materials, Nano, and Micro-Smart Systems},
address = {Melbourne, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. Behrens; A. J. Fleming; S. O. R. Moheimani
New method for multiple-mode shunt damping of structural vibration using a single piezoelectric transducer Inproceedings
In: Proc. SPIE International Symposium on Smart Structures -- Damping & Isolation, pp. 239–250, New Port Beach, CA, 2001.
@inproceedings{D01a,
title = {New method for multiple-mode shunt damping of structural vibration using a single piezoelectric transducer},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D01a.pdf},
year = {2001},
date = {2001-01-01},
booktitle = {Proc. SPIE International Symposium on Smart Structures -- Damping & Isolation},
pages = {239--250},
address = {New Port Beach, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. Behrens; S. O. R. Moheimani
A new approach to piezoelectric shunt damping Inproceedings
In: Proc. IS3M International Symposium on Smart Structures and Microsystems, Hong Kong, 2000.
@inproceedings{C00b,
title = {A new approach to piezoelectric shunt damping},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C00b.pdf},
year = {2000},
date = {2000-01-01},
booktitle = {Proc. IS3M International Symposium on Smart Structures and Microsystems},
address = {Hong Kong},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. Behrens; S. O. R. Moheimani
Innovations in piezoelectric shunt damping Inproceedings
In: Proc. SPIE Symposium on Smart Materials and MEMs, Melbourne, Australia, 2000.
@inproceedings{D00a,
title = {Innovations in piezoelectric shunt damping},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D00a.pdf},
year = {2000},
date = {2000-01-01},
booktitle = {Proc. SPIE Symposium on Smart Materials and MEMs},
address = {Melbourne, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}