The majority of vibration in mechanical systems can be attributed to the lack of significant natural modal damping. In structural members, such as aircraft components, the requirement to maximise fatigue life demands that the structure be strong enough to withstand environmental vibration during service. Strength requires weight, which raises costs, and generally decreases performance. By artificially damping a system using piezoelectric or electromagnetic actuators, vibration can be dramatically reduced. This project is investigating new methods for active structural and acoustic vibration control.
In precision machines, such as hard disk drives or milling machines, small amounts of vibration and long settling times reduce the accuracy and speed of the device. Damping augmentation can simultaneously improve both of these performance measures. In acoustic enclosures, such as air-conditioning ducts, fans and flow noise can excite resonance with detrimental effects on personal comfort. Acoustic speakers can be employed to reduce the pressure response of enclosures by adding damping to the lightly-damped modes. In contrast to feed-forward based noise cancellation, damping augmentation globally reduces the pressure response to any disturbance.
Books |
 | S. O. R. Moheimani, A. J. Fleming Piezoelectric Transducers for Vibration Control and Damping (Book) Springer-Verlag, London, 2006, ISBN: 1-84628-331-0. (Links | BibTeX) @book{B06,
title = {Piezoelectric Transducers for Vibration Control and Damping},
author = {S. O. R. Moheimani and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/B06-front.jpg},
isbn = {1-84628-331-0},
year = {2006},
date = {2006-12-01},
publisher = {Springer-Verlag},
address = {London},
keywords = {},
pubstate = {published},
tppubtype = {book}
}
|
 | S. O. R. Moheimani, D. Halim, A. J. Fleming Spatial Control of Vibration: Theory and Experiments (Book) World Scientific, 2003, ISBN: 981-238-337-9. (Links | BibTeX) @book{B03,
title = {Spatial Control of Vibration: Theory and Experiments},
author = {S. O. R. Moheimani and D. Halim and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/B03-front.jpg
http://www.precisionmechatronicslab.com/wp-content/publications/B03-page1.jpg
http://www.precisionmechatronicslab.com/wp-content/publications/B03-rear.jpg},
isbn = {981-238-337-9},
year = {2003},
date = {2003-12-01},
publisher = {World Scientific},
keywords = {},
pubstate = {published},
tppubtype = {book}
}
|
Journal Articles |
 | M. G. Ruppert Self-sensing, estimation and control in multifrequency Atomic Force Microscopy. (Journal Article) Journal & Proceedings of the Royal Society of New South Wales, 151 (1), pp. 111, 2018, ISSN: 0035-9173/18/010111-01. (Abstract | Links | BibTeX) @article{Ruppert2018b,
title = {Self-sensing, estimation and control in multifrequency Atomic Force Microscopy. },
author = {M. G. Ruppert},
url = {https://royalsoc.org.au/images/pdf/journal/151-1-Ruppert.pdf},
issn = {0035-9173/18/010111-01},
year = {2018},
date = {2018-06-01},
journal = {Journal & Proceedings of the Royal Society of New South Wales},
volume = {151},
number = {1},
pages = {111},
abstract = {Despite the undeniable success of the atomic force microscope (AFM), dynamic techniques still face limitations in terms of spatial resolution, imaging speed and high cost of acquisition. In order to expand the capabilities of the instrument, it was realized that the information about the nano-mechanical properties of a sample are encoded over a range of frequencies and the excitation and detection of higher-order eigenmodes of the micro-cantilever open up further informa-
tion channels. The ability to control these modes and their fast responses to excitation is believed to be the key to unravelling the true potential of these ethods. This work addresses three major drawbacks of the standard AFM setup, which limit the feasibility of multi-frequency approaches.
First, microelectromechanical system (MEMS) probes with integrated piezoelectric layers is motivated, enabling the development of novel multimode self-sensing and self-actuating techniques. Specifically, these piezoelectric transduction schemes permit the miniaturization of the entire AFM towards a cost-effective single-chip device with nanoscale precision in a much smaller form factor than that of conventional macroscale instruments.
Second, the integrated actuation enables the development of multimode controllers which exhibits remarkable performance in arbitrarily modifying the quality factor of multiple eigenmodes and comes with inherent stability robustness. The experimental results demonstrate improved imaging stability, higher scan speeds and adjustable contrast when mapping nano-mechanical properties of soft samples.
Last, in light of the demand for constantly increasing imaging speeds while providing multi-frequency flexibility, the estimation of multiple components of the high-frequency deflection signal is performed with a linear time-varying multi-frequency Kalman filter. The chosen representation allows for an efficient high-bandwidth implementation on a Field Programmable Gate Array. Tracking bandwidth, noise performance and trimodal AFM imaging on a two-component polymer sample are verified and shown to be superior to that of the commonly used lock-in amplifier.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Despite the undeniable success of the atomic force microscope (AFM), dynamic techniques still face limitations in terms of spatial resolution, imaging speed and high cost of acquisition. In order to expand the capabilities of the instrument, it was realized that the information about the nano-mechanical properties of a sample are encoded over a range of frequencies and the excitation and detection of higher-order eigenmodes of the micro-cantilever open up further informa-
tion channels. The ability to control these modes and their fast responses to excitation is believed to be the key to unravelling the true potential of these ethods. This work addresses three major drawbacks of the standard AFM setup, which limit the feasibility of multi-frequency approaches.
First, microelectromechanical system (MEMS) probes with integrated piezoelectric layers is motivated, enabling the development of novel multimode self-sensing and self-actuating techniques. Specifically, these piezoelectric transduction schemes permit the miniaturization of the entire AFM towards a cost-effective single-chip device with nanoscale precision in a much smaller form factor than that of conventional macroscale instruments.
Second, the integrated actuation enables the development of multimode controllers which exhibits remarkable performance in arbitrarily modifying the quality factor of multiple eigenmodes and comes with inherent stability robustness. The experimental results demonstrate improved imaging stability, higher scan speeds and adjustable contrast when mapping nano-mechanical properties of soft samples.
Last, in light of the demand for constantly increasing imaging speeds while providing multi-frequency flexibility, the estimation of multiple components of the high-frequency deflection signal is performed with a linear time-varying multi-frequency Kalman filter. The chosen representation allows for an efficient high-bandwidth implementation on a Field Programmable Gate Array. Tracking bandwidth, noise performance and trimodal AFM imaging on a two-component polymer sample are verified and shown to be superior to that of the commonly used lock-in amplifier. |
 | M. G. Ruppert, A. G. Fowler, M. Maroufi, S. O. R. Moheimani On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215-225, 2017. (Abstract | Links | BibTeX) @article{Ruppert2017,
title = {On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach},
author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
doi = {10.1109/JMEMS.2016.2628890},
year = {2017},
date = {2017-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {1},
pages = {215-225},
abstract = {The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm x 8μm in closed loop.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm x 8μm in closed loop. |
 | Y. R. Teo, A. J. Fleming Optimal integral force feedback for active vibration control (Journal Article) Journal of Sound and Vibration, 356 (11), pp. 20-33, 2015. (Abstract | Links | BibTeX) @article{J15c,
title = {Optimal integral force feedback for active vibration control},
author = {Y. R. Teo and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/uploads/2015/10/J15c.pdf},
year = {2015},
date = {2015-06-27},
journal = {Journal of Sound and Vibration},
volume = {356},
number = {11},
pages = {20-33},
abstract = {This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope. |
 | M. G. Ruppert, S. O. R. Moheimani A novel self-sensing technique for tapping-mode atomic force microscopy (Journal Article) Review of Scientific Instruments, 84 (12), pp. 125006, 2013. (Abstract | Links | BibTeX) @article{Ruppert2013b,
title = {A novel self-sensing technique for tapping-mode atomic force microscopy},
author = {M. G. Ruppert and S. O. R. Moheimani},
doi = {http://dx.doi.org/10.1063/1.4841855},
year = {2013},
date = {2013-12-01},
journal = {Review of Scientific Instruments},
volume = {84},
number = {12},
pages = {125006},
abstract = {This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing Micro Electro Mechanical System processes. The setup enables the omission of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. Due to the high amount of capacitive feedthrough in the measured charge signal, a feedforward control technique is employed to increase the dynamic range from less than 1dB to approximately 35dB. Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for AFM imaging.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing Micro Electro Mechanical System processes. The setup enables the omission of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. Due to the high amount of capacitive feedthrough in the measured charge signal, a feedforward control technique is employed to increase the dynamic range from less than 1dB to approximately 35dB. Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for AFM imaging. |
| A. G. Wills, D. Bates, A. J. Fleming, B. Ninness, S. O. R. Moheimani Model predictive control applied to constraint handling in active noise and vibration control (Journal Article) IEEE Transactions on Control Systems Technology, 16 (1), pp. 3–12, 2008. (Links | BibTeX) @article{J08b,
title = {Model predictive control applied to constraint handling in active noise and vibration control},
author = {A. G. Wills and D. Bates and A. J. Fleming and B. Ninness and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J08b.pdf},
year = {2008},
date = {2008-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {16},
number = {1},
pages = {3--12},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| S. S. Aphale, A. J. Fleming, S. O. R. Moheimani Integral resonant control of collocated smart structures (Journal Article) IOP Smart materials and Structures, 16 , pp. 439-446, 2007. (Links | BibTeX) @article{J07a,
title = {Integral resonant control of collocated smart structures},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J07a.pdf},
year = {2007},
date = {2007-12-01},
journal = {IOP Smart materials and Structures},
volume = {16},
pages = {439-446},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. J. Fleming, D. Niederberger, S. O. R. Moheimani, M. Morari Control of resonant acoustic sound fields by electrical shunting of a loudspeaker (Journal Article) IEEE Transactions on Control Systems Technology., 14 (4), pp. 689-703, 2007. (Links | BibTeX) @article{J07b,
title = {Control of resonant acoustic sound fields by electrical shunting of a loudspeaker},
author = {A. J. Fleming and D. Niederberger and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J07b.pdf},
year = {2007},
date = {2007-12-01},
journal = {IEEE Transactions on Control Systems Technology.},
volume = {14},
number = {4},
pages = {689-703},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. J. Fleming, S. O. R. Moheimani Control oriented synthesis of high performance piezoelectric shunt impedances for structural vibration control (Journal Article) IEEE Transactions on Control Systems Technology, 13 (1), pp. 98–112, 2005. (Links | BibTeX) @article{J05c,
title = {Control oriented synthesis of high performance piezoelectric shunt impedances for structural vibration control},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J05c.pdf},
year = {2005},
date = {2005-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {13},
number = {1},
pages = {98--112},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| D. Niederberger, A. J. Fleming, S. O. R. Moheimani, M. Morari Adaptive multimode resonant piezoelectric shunt damping (Journal Article) IOP Smart Materials and Structures, 18 (2), pp. 291–315, 2004. (Links | BibTeX) @article{J04b,
title = {Adaptive multimode resonant piezoelectric shunt damping},
author = {D. Niederberger and A. J. Fleming and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J04b.pdf},
year = {2004},
date = {2004-12-01},
journal = {IOP Smart Materials and Structures},
volume = {18},
number = {2},
pages = {291--315},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| S. O. R. Moheimani, A. J. Fleming, S. Behrens Dynamics, Stability and Control of Multivariable Piezoelectric Shunts (Journal Article) IEEE/ASME Transactions on Mechatronics, 9 (1), pp. 87–99, 2004. (Links | BibTeX) @article{J04a,
title = {Dynamics, Stability and Control of Multivariable Piezoelectric Shunts},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J04a.pdf},
year = {2004},
date = {2004-01-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {9},
number = {1},
pages = {87--99},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| S. Behrens, A. J. Fleming, S. O. R. Moheimani A broadband controller for shunt piezoelectric damping of structural vibration (Journal Article) IOP Smart Materials and Structures, 12 (1), pp. 36–48, 2003. (Links | BibTeX) @article{J03a,
title = {A broadband controller for shunt piezoelectric damping of structural vibration},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03a.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {36--48},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. J. Fleming, S. O. R. Moheimani Adaptive piezoelectric shunt damping (Journal Article) IOP Smart Materials and Structures, 12 (1), pp. 18–28, 2003. (Links | BibTeX) @article{J03b,
title = {Adaptive piezoelectric shunt damping},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03b.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {18--28},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. J. Fleming, S. O. R. Moheimani, S. Behrens Reducing the Inductance Requirements of Piezoelectric Shunt Damping Circuits (Journal Article) IOP Smart Materials and Structures, 12 (1), pp. 57–64, 2003. (Links | BibTeX) @article{J03c,
title = {Reducing the Inductance Requirements of Piezoelectric Shunt Damping Circuits},
author = {A. J. Fleming and S. O. R. Moheimani and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03c.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {57--64},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| S. O. R. Moheimani, A. J. Fleming, S. Behrens On the feedback structure of wideband piezoelectric shunt damping systems (Journal Article) IOP Smart Materials and Structures, 12 (1), pp. 49–56, 2003. (Links | BibTeX) @article{J03d,
title = {On the feedback structure of wideband piezoelectric shunt damping systems},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03d.pdf},
year = {2003},
date = {2003-01-01},
journal = {IOP Smart Materials and Structures},
volume = {12},
number = {1},
pages = {49--56},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| S. Behrens, S. O. R. Moheimani, A. J. Fleming Multiple mode current flowing passive piezoelectric shunt controller (Journal Article) Journal of Sound and Vibration, 266 (5), pp. 929–942, 2003. (Links | BibTeX) @article{J03f,
title = {Multiple mode current flowing passive piezoelectric shunt controller},
author = {S. Behrens and S. O. R. Moheimani and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J03f.pdf},
year = {2003},
date = {2003-01-01},
journal = {Journal of Sound and Vibration},
volume = {266},
number = {5},
pages = {929--942},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. J. Fleming, S. Behrens, S. O. R. Moheimani Optimization and implementation of multi-mode piezoelectric shunt damping systems (Journal Article) IEEE/ASME Transactions on Mechatronics, 7 (1), pp. 87–94, 2002. (Links | BibTeX) @article{J02a,
title = {Optimization and implementation of multi-mode piezoelectric shunt damping systems},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J02a.pdf},
year = {2002},
date = {2002-01-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {7},
number = {1},
pages = {87--94},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| S. O. R. Moheimani, A. J. Fleming, S. Behrens Highly resonant controller for multimode piezoelectric shunt damping (Journal Article) IEE Electronics Letters, 37 (25), pp. 1505–1506, 2001. (Links | BibTeX) @article{J01a,
title = {Highly resonant controller for multimode piezoelectric shunt damping},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/J01a.pdf},
year = {2001},
date = {2001-01-01},
journal = {IEE Electronics Letters},
volume = {37},
number = {25},
pages = {1505--1506},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
Miscellaneous |
| A. J. Fleming, S. Behrens, S. O. R. Moheimani An impedance synthesizing arrangement, an improved vibrational damping apparatus and a method for deriving a digital signal processing algorithm (Miscellaneous) Patent, 2001. (BibTeX) @misc{P1,
title = {An impedance synthesizing arrangement, an improved vibrational damping apparatus and a method for deriving a digital signal processing algorithm},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
year = {2001},
date = {2001-01-01},
volume = {Published Application PCT/AU01/00566},
howpublished = {Patent},
keywords = {},
pubstate = {published},
tppubtype = {misc}
}
|
Inproceedings |
 | M. G. Ruppert, Y. K. Yong Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy (Inproceeding) IEEE/ASME Advanced Intelligent Mechatronics (AIM), Auckland, New Zealand, 2018. (Abstract | BibTeX) @inproceedings{Ruppert2018b,
title = {Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy},
author = {M. G. Ruppert and Y. K. Yong},
year = {2018},
date = {2018-07-09},
booktitle = {IEEE/ASME Advanced Intelligent Mechatronics (AIM)},
address = {Auckland, New Zealand},
abstract = {Atomic force microscope cantilevers with integrated actuation and sensing on the chip level provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. However, the two major difficulties with integrated transduction methods are a complicated fabrication process, often involving a number of fabrication
steps, and a high amount of feedthrough from actuation to sensing electrodes. This work proposes two hybrid cantilever designs with piezoelectric actuators and piezoresistive sensors to reduce the actuator to sensor feedthrough. The designs can be realized using a commercial microelectromechanical systems fabrication process and only require a simple five-mask patterning and etching process. Finite element analysis results are presented to obtain modal responses, actuator gain and sensor sensitivities of the cantilever designs.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Atomic force microscope cantilevers with integrated actuation and sensing on the chip level provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. However, the two major difficulties with integrated transduction methods are a complicated fabrication process, often involving a number of fabrication
steps, and a high amount of feedthrough from actuation to sensing electrodes. This work proposes two hybrid cantilever designs with piezoelectric actuators and piezoresistive sensors to reduce the actuator to sensor feedthrough. The designs can be realized using a commercial microelectromechanical systems fabrication process and only require a simple five-mask patterning and etching process. Finite element analysis results are presented to obtain modal responses, actuator gain and sensor sensitivities of the cantilever designs. |
 | M. G. Ruppert, S. O. R. Moheimani Novel Reciprocal Self-Sensing Techniques for Tapping-Mode Atomic Force Microscopy (Inproceeding) 19th IFAC World Congress, Cape Town, South Africa, 2014. (Abstract | Links | BibTeX) @inproceedings{Ruppert2014,
title = {Novel Reciprocal Self-Sensing Techniques for Tapping-Mode Atomic Force Microscopy},
author = {M. G. Ruppert and S. O. R. Moheimani},
doi = {https://doi.org/10.3182/20140824-6-ZA-1003.00376},
year = {2014},
date = {2014-08-24},
booktitle = {19th IFAC World Congress},
address = {Cape Town, South Africa},
abstract = {We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic
force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively.
A microcantilever, which can be batch fabricated through a standard microelectromechanical
system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for
actuation and deflection sensing. The setup enables the elimination of the optical beam deflection
technique which is commonly used to measure the cantilever oscillation amplitude. The voltage
to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough
which degrades the dynamic range of the sensors significantly. A feedforward control technique
is employed to cancel the feedthrough and increase the dynamic range from less than 1 dB
to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve
an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for
TM-AFM imaging.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic
force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively.
A microcantilever, which can be batch fabricated through a standard microelectromechanical
system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for
actuation and deflection sensing. The setup enables the elimination of the optical beam deflection
technique which is commonly used to measure the cantilever oscillation amplitude. The voltage
to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough
which degrades the dynamic range of the sensors significantly. A feedforward control technique
is employed to cancel the feedthrough and increase the dynamic range from less than 1 dB
to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve
an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for
TM-AFM imaging. |
| S. S. Aphale, A. J. Fleming, S. O. R. Moheimani Integral control of smart structures with collocated sensors and actuators (Inproceeding) Proc. European Control Conference, Kos, Greece, 2007. (Links | BibTeX) @inproceedings{C07d,
title = {Integral control of smart structures with collocated sensors and actuators},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C07d.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. European Control Conference},
address = {Kos, Greece},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. S. Aphale, A. J. Fleming, S. O. R. Moheimani Integral control of collocated smart structures (Inproceeding) Proc. SPIE Smart Materials and Structures, San Diego, CA, 2007. (Links | BibTeX) @inproceedings{D07a,
title = {Integral control of collocated smart structures},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D07a.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. SPIE Smart Materials and Structures},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, D. Niederberger, S. O. R. Moheimani, M. Morari Mitigation of acoustic resonance using electrically shunted loudspeakers (Inproceeding) Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2006. (Links | BibTeX) @inproceedings{D06a,
title = {Mitigation of acoustic resonance using electrically shunted loudspeakers},
author = {A. J. Fleming and D. Niederberger and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D06a.pdf},
year = {2006},
date = {2006-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Wills, D. Bates, A. J. Fleming, B. Ninness, S. O. R. Moheimani Application of MPC to an active structure using sampling rates up to 25kHz (Inproceeding) Proc. IEEE Conference on Decision and Control and European Control Conference, pp. 3176–3181, Seville, Spain, 2005. (Links | BibTeX) @inproceedings{C05d,
title = {Application of MPC to an active structure using sampling rates up to 25kHz},
author = {A. G. Wills and D. Bates and A. J. Fleming and B. Ninness and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C05d.pdf},
year = {2005},
date = {2005-01-01},
booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},
pages = {3176--3181},
address = {Seville, Spain},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| D. Niederberger, A. J. Fleming, S. O. R. Moheimani, M. Morari Online-tuned multi-mode resonant piezoelectric shunt for broadband vibration suppression (Inproceeding) Proc. IFAC Symposium on Mechatronic Systems, Sydney, Australia, 2004. (Links | BibTeX) @inproceedings{C04a,
title = {Online-tuned multi-mode resonant piezoelectric shunt for broadband vibration suppression},
author = {D. Niederberger and A. J. Fleming and S. O. R. Moheimani and M. Morari},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C04a.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. O. R. Moheimani Optimal impedance design for piezoelectric vibration control (Inproceeding) Proc. IEEE Conference on Decision and Control, Bahamas, 2004. (Links | BibTeX) @inproceedings{C04c,
title = {Optimal impedance design for piezoelectric vibration control},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C04c.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. IEEE Conference on Decision and Control},
address = {Bahamas},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. Behrens, A. J. Fleming, S. O. R. Moheimani Negative inductor-resistor controller for electromagnetic shunt damping (Inproceeding) Proc. IFAC Symposium on Mechatronic Systems, Sydney, Australia, 2004. (Links | BibTeX) @inproceedings{C04e,
title = {Negative inductor-resistor controller for electromagnetic shunt damping},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C04e.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. O. R. Moheimani Synthesis of optimal piezoelectric shunt impedances for structural vibration control (Inproceeding) Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2004. (Links | BibTeX) @inproceedings{D04b,
title = {Synthesis of optimal piezoelectric shunt impedances for structural vibration control},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D04b.pdf},
year = {2004},
date = {2004-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. O. R. Moheimani An autonomous piezoelectric resonant shunt damping system (Inproceeding) Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2003. (Links | BibTeX) @inproceedings{D03a,
title = {An autonomous piezoelectric resonant shunt damping system},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D03a.pdf},
year = {2003},
date = {2003-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. Behrens, A. J. Fleming, S. O. R. Moheimani Robust piezoelectric passive shunt dampener (Inproceeding) Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2003. (Links | BibTeX) @inproceedings{D03c,
title = {Robust piezoelectric passive shunt dampener},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D03c.pdf},
year = {2003},
date = {2003-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. O. R. Moheimani, S. Behrens, A. J. Fleming Dynamics and stability of wideband vibration absorbers with multiple piezoelectric transducers (Inproceeding) Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002. (Links | BibTeX) @inproceedings{C02b,
title = {Dynamics and stability of wideband vibration absorbers with multiple piezoelectric transducers},
author = {S. O. R. Moheimani and S. Behrens and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02b.pdf},
year = {2002},
date = {2002-12-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. O. R. Moheimani Power harvesting piezoelectric shunt damping (Inproceeding) Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002. (Links | BibTeX) @inproceedings{C02d,
title = {Power harvesting piezoelectric shunt damping},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02d.pdf},
year = {2002},
date = {2002-12-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. O. R. Moheimani The effect of artificially reducing the size of inductor values in piezoelectric shunt damping circuits (Inproceeding) Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002. (Links | BibTeX) @inproceedings{C02e,
title = {The effect of artificially reducing the size of inductor values in piezoelectric shunt damping circuits},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02e.pdf},
year = {2002},
date = {2002-12-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. O. R. Moheimani, A. J. Fleming, S. Behrens On the feedback structure of wideband piezoelectric shunt damping systems (Inproceeding) Proc. IFAC World Congress, Barcelona, Spain, 2002. (Links | BibTeX) @inproceedings{C02a,
title = {On the feedback structure of wideband piezoelectric shunt damping systems},
author = {S. O. R. Moheimani and A. J. Fleming and S. Behrens},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02a.pdf},
year = {2002},
date = {2002-07-01},
booktitle = {Proc. IFAC World Congress},
address = {Barcelona, Spain},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. Behrens, S. O. R. Moheimani, A. J. Fleming Multiple mode passive piezoelectric shunt dampener (Inproceeding) Proc. IFAC Symposium on Mechatronic Systems, Berkeley, CA, 2002. (Links | BibTeX) @inproceedings{C02f,
title = {Multiple mode passive piezoelectric shunt dampener},
author = {S. Behrens and S. O. R. Moheimani and A. J. Fleming},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C02f.pdf},
year = {2002},
date = {2002-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Berkeley, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. O. R. Moheimani Adaptive piezoelectric shunt damping (Inproceeding) Proc. SPIE Symposium on Smart Structures and Materials -- Industrial and Commercial Applications of Smart Structures Technologies, San Diego, CA, 2002. (Links | BibTeX) @inproceedings{D02a,
title = {Adaptive piezoelectric shunt damping},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D02a.pdf},
year = {2002},
date = {2002-01-01},
booktitle = {Proc. SPIE Symposium on Smart Structures and Materials -- Industrial and Commercial Applications of Smart Structures Technologies},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. Behrens, A. J. Fleming, S. O. R. Moheimani Series-parallel impedance structure for piezoelectric vibration damping (Inproceeding) Proc. SPIE International Symposium on Smart Materials, Nano, and Micro-Smart Systems, Melbourne, Australia, 2002. (Links | BibTeX) @inproceedings{D02b,
title = {Series-parallel impedance structure for piezoelectric vibration damping},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D02b.pdf},
year = {2002},
date = {2002-01-01},
booktitle = {Proc. SPIE International Symposium on Smart Materials, Nano, and Micro-Smart Systems},
address = {Melbourne, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. Behrens, A. J. Fleming, S. O. R. Moheimani New method for multiple-mode shunt damping of structural vibration using a single piezoelectric transducer (Inproceeding) Proc. SPIE International Symposium on Smart Structures -- Damping & Isolation, pp. 239–250, New Port Beach, CA, 2001. (Links | BibTeX) @inproceedings{D01a,
title = {New method for multiple-mode shunt damping of structural vibration using a single piezoelectric transducer},
author = {S. Behrens and A. J. Fleming and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D01a.pdf},
year = {2001},
date = {2001-01-01},
booktitle = {Proc. SPIE International Symposium on Smart Structures -- Damping & Isolation},
pages = {239--250},
address = {New Port Beach, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. Behrens, S. O. R. Moheimani A new approach to piezoelectric shunt damping (Inproceeding) Proc. IS3M International Symposium on Smart Structures and Microsystems, Hong Kong, 2000. (Links | BibTeX) @inproceedings{C00b,
title = {A new approach to piezoelectric shunt damping},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/C00b.pdf},
year = {2000},
date = {2000-01-01},
booktitle = {Proc. IS3M International Symposium on Smart Structures and Microsystems},
address = {Hong Kong},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. J. Fleming, S. Behrens, S. O. R. Moheimani Innovations in piezoelectric shunt damping (Inproceeding) Proc. SPIE Symposium on Smart Materials and MEMs, Melbourne, Australia, 2000. (Links | BibTeX) @inproceedings{D00a,
title = {Innovations in piezoelectric shunt damping},
author = {A. J. Fleming and S. Behrens and S. O. R. Moheimani},
url = {http://www.precisionmechatronicslab.com/wp-content/publications/D00a.pdf},
year = {2000},
date = {2000-01-01},
booktitle = {Proc. SPIE Symposium on Smart Materials and MEMs},
address = {Melbourne, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
