Show all

2019

8.Resolution and Enhancement of Probes for Tip Enhanced Raman Spectroscopy

L. McCourt; B. S. Routley; M. G. Ruppert; A. J. Fleming

Resolution and Enhancement of Probes for Tip Enhanced Raman Spectroscopy Conference

International Conference on Nanophotonics and Micro/Nano Optics (NANOP), Munich, Germany, 2019.

Abstract | BibTeX | Tags: AFM, Cantilever, Lithography

7.Scanning Laser Lithography with Constrained Quadratic Exposure Optimization

A. J. Fleming; O. T. Ghalehbeygi; B. S. Routley; A. G. Wills

Scanning Laser Lithography with Constrained Quadratic Exposure Optimization Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2221-2228, 2019, ISBN: 1063-6536.

Abstract | Links | BibTeX | Tags: Lithography

2018

6.Iterative Deconvolution for Exposure Planning in Scanning Laser Lithography

O. T. Ghalehbeygi; J. O'Connor; B. S. Routley; A. J. Fleming

Iterative Deconvolution for Exposure Planning in Scanning Laser Lithography Proceedings Article

In: American Control Conference, Milwaukee, WI, 2018.

Abstract | Links | BibTeX | Tags: Lithography

2017

5.Gradient-based optimization for efficient exposure planning in maskless lithography

O. T. Ghalehbeygi; A. G. Wills; B. S. Routley; A. J. Fleming

Gradient-based optimization for efficient exposure planning in maskless lithography Journal Article

In: Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 16, no. 3, pp. 033507, 2017.

Abstract | Links | BibTeX | Tags: Lithography

2016

4.Exposure Optimization in Scanning Laser Lithography

A. J. Fleming; A. G. Wills; B. S. Routley

Exposure Optimization in Scanning Laser Lithography Journal Article

In: IEEE Potentials, vol. 35, no. 4, pp. 33-39, 2016, ISSN: 0278-6648.

Links | BibTeX | Tags: Lithography

3.A Nonlinear Programming Approach to Exposure Optimization in Scanning Laser Lithography

A. J. Fleming; A. G. Wills; O. T. Ghalehbeygi; B. S. Routley; B. Ninness

A Nonlinear Programming Approach to Exposure Optimization in Scanning Laser Lithography Proceedings Article

In: American Control Conference, Boston, MA, 2016.

BibTeX | Tags: Lithography

2015

2.Optimization and Simulation of Exposure Pattern for Scanning Laser Lithography

O. T. Ghalehbeygi; G. Berriman; A. J. Fleming; J. L. Holdsworth

Optimization and Simulation of Exposure Pattern for Scanning Laser Lithography Proceedings Article

In: IEEE Multiconference on Systems and Control, Sydney, 2015.

BibTeX | Tags: Lithography, Optics

1.Optimization of near-field scanning optical lithography

B. S. Routley; J. L. Holdsworth; A. J. Fleming

Optimization of near-field scanning optical lithography Proceedings Article

In: Proc. SPIE Advanced Lithography, San Jose, CA, 2015.

Links | BibTeX | Tags: Lithography