%PDF-1.7
%
1 0 obj
<<
/Type /Metadata /Subtype /XML
/Length 2466
>>
stream
application/pdf
High performance raster scanning of atomic force microscopy using Model-free Repetitive Control
Linlin Li
Andrew J. Fleming
Yuen K. Yong
Sumeet S. Aphale
LiMin Zhu
Atomic force microscopy
Raster scanning
Tracking control
Repetitive control
Cross-coupling compensation
Mechanical Systems and Signal Processing, Corrected proof, 109027. doi:10.1016/j.ymssp.2022.109027
journal
Mechanical Systems and Signal Processing
© 2022 Elsevier Ltd. All rights reserved.
Elsevier Ltd.
0888-3270
109027
109027
10.1016/j.ymssp.2022.109027
https://doi.org/10.1016/j.ymssp.2022.109027
doi:10.1016/j.ymssp.2022.109027
P
7.0
10.1016/j.ymssp.2022.109027
noindex
Elsevier
True
endstream
endobj
79 0 obj
<<
/Length 1680
/Filter /FlateDecode
>>
stream
xڽXYo6~_GrEQ$"N@M KWVR$!)(!ǡC¯|8 Nsi
"M9oC1 i5OD$g/YV_N*0taM[T=)͛mb&` OFנIH5е]pu-\qw#N((ӊ\_ڊ |=\~{>E(U%BNcPMTLs-xWW`9,uZEi?~~fP2
gD&m<
,+LEk;XS:V
m
E#iЈ'SӪ,8[uY:*r;s[g
Ύ\tH*cteG4yPSv0-Ŭ7բ=xj
|8_"Η]% e5 1W50
iM6CJg?Hh{6% Y_"k CMY2>DrQ<S"Ad.'EU> ۢ *B0O= %{LUޚwdJ74ˇ?xg+raLɪyZg+?)Nz2{KtvV 8TG7?=eۛtX w~{9Y3K'-!K!ME쳐شuSw&wT@RGnh:@sطiݚiۺ^7vO52~Ӄ,~cnBpT{ k9 oJG]M)tP[+!j)D!>MS¬/?tpx{*O/W=-W! l"m[eGn `s\w-I]y^dhSu";<:ô1N".:;dAW&unC'ݺ'xhamup_q"ޕGte3(lMo'emK$0)V/+즘=4I/VئxB 0ħ~Hlu7lWoK0nG^tMguhk
[^'<4fʖ՛>V}x_Ț[8s-[i@
}ҽn[QUpcto
kɾeU~~@=?&,+ nW0
4Hi{E* 01\
HxY*\Aa|$^5tkUɠJ#"a~
{-
e8tKjvT0YZQ@n!"yHDHdlm KDx?~-aӏ4n
endstream
endobj
74 0 obj
<<
/Type /XObject
/Subtype /Form
/FormType 1
/PTEX.FileName (/opt/tf-systems/nlm/logos/elsevier-logo-orange-G-web.pdf)
/PTEX.PageNumber 1
/PTEX.InfoDict 91 0 R
/BBox [0 0 59.76 65.52]
/Resources <<
/ColorSpace <<
/Cs9 92 0 R
>>/ExtGState <<
/GS1 93 0 R
>>/ProcSet [ /PDF /ImageC ]
/Properties <<
/MC1 94 0 R
>>/XObject <<
/Im1 95 0 R
>>>>
/Length 111
/Filter /FlateDecode
>>
stream
h$;
0wi"5 "Q߈2ˌy!;QOi g5,J,q4b#˕ϖ
P2y)lFةi_ k3
endstream
endobj
95 0 obj
<<
/BitsPerComponent 8
/ColorSpace 92 0 R
/Filter /DCTDecode
/Height 273
/Length 33305
/Subtype /Image
/Type /XObject
/Width 249
>>
stream
Adobe d
s !1AQa"q2B#R3b$r%C4Scs5D'6Tdt&
EFVU(eufv7GWgw8HXhx)9IYiy*:JZjz m !1AQa"q2#BRbr3$4CS%cs5DT
&6E'dtU7()euFVfvGWgw8HXhx9IYiy*:JZjz ? M,p"b#G'*KI+Vfx:
RqV!O=i~~o4&&Y֭l.#79 *챫HO@XrqWI|t
QQۺ0MG*mkr_l4w Wa"c'b)zoOu-wSM;˖n";-c4lMlH⸪6l<\hf[E4k'BSb>m6K){_3r0[Tj쵯*y{$5OV*2U5کĵ)zofe-u|i6"=Wc{UwyI}v+A~Ldo;]ҠR^IPαrAXE| SNGg