Scanning Probe Microscopy
Probe Based Lithography
Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.
Nanopositioning
A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory. More details.
Electroactive Optics
Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.
Precision Sensors
This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.
Biomedical Devices
An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.
Piezo Actuators and Amplifiers
Piezo Robotics
Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.
Rios, S. A.; Fleming, A. J.
Design of a Charge Drive for Reducing Hysteresis in a Piezoelectric Bimorph Actuator Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 21, no. 1, pp. 51-54, 2016.
@article{J16f,
title = {Design of a Charge Drive for Reducing Hysteresis in a Piezoelectric Bimorph Actuator},
author = {S. A. Rios and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/01/J16f.pdf},
doi = {10.1109/TMECH.2015.2483739},
year = {2016},
date = {2016-02-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {21},
number = {1},
pages = {51-54},
abstract = {This article describes the design of a charge drive for reducing the hysteresis exhibited by a piezoelectric bimorph bender. Existing charge drive circuits cannot be directly applied to bimorph benders since they share a common electrode. In this article a new charge drive circuit and electrical configuration is implemented that allows commonly available piezoelectric bimorphs to be linearized. This circuit consists of four major components, including, a high voltage amplifier, a differential amplifier, a piezoelectric load and a PI feedback controller. An isolation amplifier was used to achieve a differential amplifier with a high common-mode rejection ratio. The charge drive was tested by driving a series poled, three layer bimorph bender. The results demonstrate that the use of a charge drive can reduce the hysteresis from 26.8% to 2.1%. This work has identified an alternative feedforward method to improve the AC hysteresis performance of a piezoelectric bender by using a charge drive.},
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pubstate = {published},
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}
Leang, K. K.; Fleming, A. J.
Tracking Control for Nanopositioning Systems Book Chapter
In: Ru, C.; Liu, X.; Sun, Y. (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.
@inbook{B15b,
title = {Tracking Control for Nanopositioning Systems},
author = {K. K. Leang and A. J. Fleming},
editor = {C. Ru and X. Liu and Y. Sun},
isbn = {978-3-319-23853-1},
year = {2016},
date = {2016-02-01},
publisher = {Springer},
abstract = {The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation, especially at high operating frequencies. This chapter reviews popular feedback and feedforward control techniques for nanopositioning systems. First, the effects of vibration, hysteresis, and creep are described, where simple methods traditionally employed to avoid these effects are discussed. Second, various models for nanopositioning systems for control system design, simulation, and synthesis are presented. Finally, popular feedback and feedforward controllers to handle vibration, hysteresis, and creep are presented, along with experimental results.},
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pubstate = {published},
tppubtype = {inbook}
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Yong, Y. K.; Leang, K. K.
Mechanical Design of High-Speed Nanopositioning Systems Book Chapter
In: Ru, C.; Liu, X.; Sun, Y. (Ed.): Chapter 3, Springer, 2016.
@inbook{Yong2016,
title = {Mechanical Design of High-Speed Nanopositioning Systems},
author = {Y. K. Yong and K. K. Leang},
editor = {C. Ru and X. Liu and Y. Sun},
year = {2016},
date = {2016-02-01},
publisher = {Springer},
chapter = {3},
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pubstate = {published},
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Ruppert, M. G.; Karvinen, K. S.; Wiggins, S. L.; Moheimani, S. O. R.
A Kalman Filter for Amplitude Estimation in High-Speed Dynamic Mode Atomic Force Microscopy Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 24, no. 1, pp. 276-284, 2016.
@article{Ruppert2016b,
title = {A Kalman Filter for Amplitude Estimation in High-Speed Dynamic Mode Atomic Force Microscopy},
author = {M. G. Ruppert and K. S. Karvinen and S. L. Wiggins and S. O. R. Moheimani},
doi = {10.1109/TCST.2015.2435654},
year = {2016},
date = {2016-01-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {24},
number = {1},
pages = {276-284},
abstract = {A fundamental challenge in dynamic mode atomic force microscopy (AFM) is the estimation of the cantilever oscillation amplitude from the deflection signal which might be distorted by noise and/or high-frequency components. When the cantilever is excited at resonance, its deflection is typically obtained via narrowband demodulation using a lock-in amplifier. However, the bandwidth of this measurement technique is ultimately bounded by the low-pass filter which must be employed after demodulation to attenuate the component at twice the carrier frequency. Furthermore, to measure the amplitude of multiple frequency components such as higher eigenmodes and/or higher harmonics in multifrequency AFM, multiple lock-in amplifiers must be employed. In this work, the authors propose the estimation of amplitude and phase using a linear time-varying Kalman filter which is easily extended to multiple frequencies. Experimental results are obtained using square-modulated sine waves and closed-loop AFM scans, verifying the performance of the proposed Kalman filter.},
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Fleming, A. J.; Routley, B. S.
A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing Journal Article
In: Review of Scientific Instruments, vol. 86, pp. 115001(1-7), 2015.
@article{J15f,
title = {A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing},
author = {A. J. Fleming and B. S. Routley},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/12/J15f.pdf},
doi = {10.1063/1.4935469},
year = {2015},
date = {2015-12-31},
journal = {Review of Scientific Instruments},
volume = {86},
pages = {115001(1-7)},
abstract = {This article describes a position sensitive interferometer with closed-loop control of the reference mirror. A calibrated nanopositioner is used to lock the interferometer phase to the most sensitive point in the interfer- ogram. In this conguration, large low-frequency movements of the sensor mirror can be detected from the control signal applied to the nanopositioner and high-frequency short-range signals can be measured directly from the photodiode. It is demonstrated that these two signals are complementary and can be summed to find the total displacement. The resulting interferometer has a number of desirable characteristics: it is optically simple, does not require polarization or modulation to detect the direction of motion, does not require fringe-counting or interpolation electronics, and has a bandwidth equal to that of the photodiode. Experimental results demonstrate the frequency response analysis of a high-speed positioning stage. The proposed instru-
ment is ideal for measuring the frequency response of nanopositioners, electro-optical components, MEMs devices, Ultrasonic devices, and sensors such as surface acoustic wave detectors.},
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pubstate = {published},
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ment is ideal for measuring the frequency response of nanopositioners, electro-optical components, MEMs devices, Ultrasonic devices, and sensors such as surface acoustic wave detectors.