Scanning Probe Microscopy
Probe Based Lithography
Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.
Nanopositioning
A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory. More details.
Electroactive Optics
Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.
Precision Sensors
This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.
Biomedical Devices
An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.
Piezo Actuators and Amplifiers
Piezo Robotics
Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.
Russell, D.; Fleming, A. J.; Aphale, S. S.
In: Journal of Dynamic Systems, Measurement and Control, vol. 137, no. 10, pp. 1-8, 2015.
@article{J15b,
title = {Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners},
author = {D. Russell and A. J. Fleming and S. S. Aphale},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/07/DS-14-1539.pdf},
doi = {10.1115/1.4030723},
year = {2015},
date = {2015-12-30},
journal = {Journal of Dynamic Systems, Measurement and Control},
volume = {137},
number = {10},
pages = {1-8},
abstract = {Positive Velocity and Position Feedback (PVPF) is a widely used control scheme in lightly damped resonant systems with collocated sensor actuator pairs. The popularity of PVPF is due to the ability to achieve a chosen damping ratio by repositioning the poles of the system. The addition of a tracking controller, to reduce the effects of inherent nonlinearities, causes the poles to deviate from the intended location and can be a detriment to the damping achieved. By designing the PVPF and tracking controllers simultaneously, the optimal damping and tracking can be achieved. Simulations show full damping of the first resonance mode and significantly higher bandwidth than that achieved using the traditional PVPF design method, allowing for high speed scanning with accurate tracking. Experimental results are also provided to verify performance in implementation.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Fleming, A. J.; Teo, Y. R.; Leang, K. K.
Low-order Damping and Tracking Control for Scanning Probe Systems Journal Article
In: Frontiers in Mechanical Engineering, vol. 1, pp. 1-9, 2015.
@article{J15e,
title = {Low-order Damping and Tracking Control for Scanning Probe Systems},
author = {A. J. Fleming and Y. R. Teo and K. K. Leang
},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/12/J15e.pdf},
doi = {10.3389/fmech.2015.00014},
year = {2015},
date = {2015-12-30},
journal = {Frontiers in Mechanical Engineering},
volume = {1},
pages = {1-9},
abstract = {This article describes an improvement to integral resonance damping control (IRC) for reference tracking applications such as Scanning Probe Microscopy and nanofabrication. It is demonstrated that IRC control introduces a low-frequency pole into the tracking loop which is detrimental for performance. In this work, the location of this pole is found analytically using Cardano’s method then compensated by parameterizing the tracking controller accordingly. This approach maximizes the closed-loop bandwidth whilst being robust to changes in the resonance frequencies. The refined IRC controller is comprehensively compared to other low-order methods in a practical environment.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Ghalehbeygi, O. T.; Berriman, G.; Fleming, A. J.; Holdsworth, J. L.
Optimization and Simulation of Exposure Pattern for Scanning Laser Lithography Proceedings Article
In: IEEE Multiconference on Systems and Control, Sydney, 2015.
@inproceedings{C15d,
title = {Optimization and Simulation of Exposure Pattern for Scanning Laser Lithography},
author = {O. T. Ghalehbeygi and G. Berriman and A. J. Fleming and J. L. Holdsworth},
year = {2015},
date = {2015-12-01},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Godfrey, T. D.; Eielsen, A. A.; Fleming, A. J.
Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems Proceedings Article
In: IEEE Multiconference on Systems and Control, Sydney, 2015.
@inproceedings{C15f,
title = {Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems},
author = {T. D. Godfrey and A. A. Eielsen and A. J. Fleming},
year = {2015},
date = {2015-12-01},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Teo, Y. R.; Eielsen, A. A.; Fleming, A. J.
Model-less FIR Repetitive Control with consideration of uncertainty Proceedings Article
In: IEEE Multiconference on Systems and Control, Sydney, 2015.
@inproceedings{C15c,
title = {Model-less FIR Repetitive Control with consideration of uncertainty},
author = {Y. R. Teo and A. A. Eielsen and A. J. Fleming},
year = {2015},
date = {2015-12-01},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}