Projects – Precision Mechatronics Lab

Scanning Probe Microscopy

Scanning probe microscopes utilize functionalized probes to image samples with sub-atomic resolution. New mechanical designs, imaging modes, and control techniques are being developed to improve the speed, fidelity, and functionality in end-user applications such as biological assay. More Details.

Probe Based Lithography

Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.

Nanopositioning

A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory. More details.

Electroactive Optics

Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.

Precision Sensors

This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.

Biomedical Devices

An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.

Piezo Actuators and Amplifiers

Compared to other actuators, piezoelectric actuators provide a faster response with extremely high force but small displacement. Novel actuators, driving methods, and control systems are being developed to optimize the performance of piezoelectric actuators in applications such as automotive, aerospace, and robotics.

Piezo bender actuator with integrated 200V power electronics

Piezo Robotics

Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.

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Routley, B. S.; Holdsworth, J. L.; Fleming, A. J.

Optimization of near-field scanning optical lithography Proceedings Article

In: Proc. SPIE Advanced Lithography, San Jose, CA, 2015.

Links | BibTeX

Optimization of near-field scanning optical lithography

Fleming, A. J.; Leang, K. K.

Design, Modeling and Control of Nanopositioning Systems Book

Springer, London, UK, 2014, ISBN: 978-3319066165.

Abstract | Links | BibTeX

@book{B14,

title = {Design, Modeling and Control of Nanopositioning Systems},

author = {A. J. Fleming and K. K. Leang},

url = {http://www.amazon.com/Modeling-Control-Nanopositioning-Advances-Industrial/dp/3319066161 },

isbn = {978-3319066165},

year  = {2014},

date = {2014-12-30},

publisher = {Springer},

address = {London, UK},

abstract = {Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.



Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.



Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.},

keywords = {},

pubstate = {published},

tppubtype = {book}

}