Scanning Probe Microscopy

Probe Based Lithography
Probe based lithography involves creating nanometer sized features from photoresist and metal on conducting and semiconducting substrates. Near field optical, electrical and thermal fields are employed in combination with evaporation, etching and electroplating to provide high-speed alternatives for mask-less nanofabrication.

Nanopositioning
A nanopositioner is a electromechanical device for moving objects in three dimensions with atomic, or sub-atomic resolution. Nanopositioners are employed in applications such as imaging, fabrication and optics. This field encompasses mechanical design, sensor design, and control theory. More details.

Electroactive Optics
Piezoelectric actuators can be combined with mirrors, lenses and objectives to actively control the path and properties of an optical field or laser beam. High speed electro-optics are required for precision lasers, maskless lithography, and microscopy.

Precision Sensors
This project aims to study the fundamental limitations of capacitive, optical and magnetic position sensors. New techniques are under development to provide sub-atomic resolution over extremely wide bandwidth.

Biomedical Devices
An endoscopic pill robot is being developed for noninvasive imaging and intervention. The robot can be swallowed and includes power transmission, 6-Dimensional localization, and locomotion.

Piezo Actuators and Amplifiers

Piezo bender actuator with integrated 200V power electronics
Piezo Robotics
Due to their compact size and high efficiency, piezoelectric actuators are ideal for micro-actuation in bio-inspired robotics. This project is developing actuators and mechanics for a piezoelectric dragon-fly robot.

Stanwell, B. J.; Yong, Y. K.; Fleming, A. J.
Feasibility of Nano Electrical Resistive Tomography for Subsurface Atomic Force Microscopy Proceedings Article
In: IEEE International Conference on Mechatronics, Wollongong, Australia, 2025, ISBN: 979-8-3315-3389-2.
@inproceedings{Stanwell2025,
title = {Feasibility of Nano Electrical Resistive Tomography for Subsurface Atomic Force Microscopy},
author = {B. J. Stanwell and Y. K. Yong and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2025/11/Feasibility_of_Nano_Electrical_Resistive_Tomography_for_Subsurface_Atomic_Force_Microscopy.pdf},
doi = {10.1109/ICM62621.2025.10934851},
isbn = {979-8-3315-3389-2},
year = {2025},
date = {2025-02-28},
urldate = {2025-02-28},
booktitle = {IEEE International Conference on Mechatronics},
address = {Wollongong, Australia},
abstract = {This article investigates the feasibility of using a dual-cantilever atomic force microscope for imaging the electrical properties of a sample below the surface. Principles from macro-scale electrical resistive tomography are adapted to utilize measurements from a dual-probe atomic force microscope. A deep-learning method is employed to perform the inversion process and construct the tomography. Simulation results demonstrate that electrical resistive tomography is possible at the nanometre scale but improvements to the inversion algorithms are needed before moving to experimental applications.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}

Young, T. R.; Yong, Y. K.; Fleming, A. J.
Data-Driven Inverse Control of Pneumatic Soft Robotic Actuators with On-Off Valves: Simulated Performance Proceedings Article
In: IEEE International Conference on Mechatronics, Wollongong, Australia, 2025, ISBN: 979-8-3315-3389-2.
@inproceedings{nokey,
title = {Data-Driven Inverse Control of Pneumatic Soft Robotic Actuators with On-Off Valves: Simulated Performance},
author = {T. R. Young and Y. K. Yong and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2025/11/Data-Driven_Inverse_Control_of_Pneumatic_Soft_Robotic_Actuators_with_On-Off_Valves_Simulated_Performance.pdf},
doi = {10.1109/ICM62621.2025.10934841},
isbn = {979-8-3315-3389-2},
year = {2025},
date = {2025-02-28},
urldate = {2025-02-28},
booktitle = {IEEE International Conference on Mechatronics},
address = {Wollongong, Australia},
abstract = {This article describes a data-driven control method for fast and accurate pressure regulation of pneumatic soft robotic actuators with on-off valves. Due to the non-linearity and binary control input, linear controllers are not ideal for pressure regulation as they must be tuned conservatively, which results in a slow transient response. Alternatively, non-linear methods can provide a faster response time but are complicated by the need for an accurate model. This article proposes an inverse control approach, where the control action is parameterized by the valve on-time, and the system output is the cumulative change in pressure after the control action is complete and all system transients have decayed. This approach eliminates the need for a dynamic model and results in a small space of input-output combinations that can be measured from a calibration experiment. The result is a non-linear inverse controller that does not require a dynamic model. The proposed method is compared in simulation to a hysteresis controller with three different valve orifice diameters. Significant improvements to the pressure regulation and valve lifetime are observed. This method is expected to find applications in soft robotics where fast step changes and dynamic trajectories are required.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}

Cao, Y.; Sathish, C. I.; Li, Z.; Ahmed, M. I.; Perumalsamy, V.; Cao, C.; Yu, C.; Wijerathne, B.; Fleming, A. J.; Qiao, L.; Wang, S.; Yi, J.
Plastics adsorption and removal by {2D} ultrathin iron oxide nanodiscs: From micro to nano Journal Article
In: Chemical Engineering Journal, vol. 497, pp. 154610, 2024, ISBN: 1385-8947.
@article{J24c,
title = {Plastics adsorption and removal by {2D} ultrathin iron oxide nanodiscs: From micro to nano},
author = {Y. Cao and C. I. Sathish and Z. Li and M. I. Ahmed and V. Perumalsamy and C. Cao and C. Yu and B. Wijerathne and A. J. Fleming and L. Qiao and S. Wang and J. Yi},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2025/12/J24c.pdf},
doi = {10.1016/j.cej.2024.154610},
isbn = {1385-8947},
year = {2024},
date = {2024-10-01},
journal = {Chemical Engineering Journal},
volume = {497},
pages = {154610},
abstract = {The escalation of microplastics/nanoplastics (MPs/NPs) contamination in aqueous systems has ignited considerable concern. Magnetic separation has emerged as a promising remedy for the removal of these pollutants, owing to its notable removal efficiency, cost-effectiveness, and environmentally friendly attributes. This study presents the utilization of ultra-thin magnetic Fe3O4 nanodiscs (NDs) for the adsorption and separation of MPs/NPs. Investigations revealed that these NDs could effectively adsorb/remove MPs/NPs across a spectrum ranging from micro- to nano-scale, exhibiting a notable adsorption capacity of 188.4 mg g−1. Mechanistically, MPs/NPs adsorption was driven by both electrostatic and magnetic forces originating from the vortex domain of NDs, which can be well described by pseudo-first-order and Sips models. Furthermore, the NDs exhibited outstanding reusability, maintaining over 90 % removal efficiency even after undergoing five cycles. This research introduces a cost-effective method for the separation of MPs/NPs, representing a significant stride in wastewater treatment methodologies.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}

Yong, Y. K.; Eielsen, A. A.; Fleming, A. J.
Thermal Protection of Piezoelectric Actuators Using Complex Electrical Power Measurements and Simplified Thermal Models Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 29, iss. 1, 2024, ISBN: 1083-4435.
@article{J24b,
title = {Thermal Protection of Piezoelectric Actuators Using Complex Electrical Power Measurements and Simplified Thermal Models},
author = {Y. K. Yong and A. A. Eielsen and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2025/12/J24b.pdf},
doi = {10.1109/TMECH.2023.3277437},
isbn = {1083-4435},
year = {2024},
date = {2024-06-01},
urldate = {2024-01-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {29},
issue = {1},
abstract = {This article describes a method for estimating the temperature of high-power piezoelectric actuators when a direct temperature measurement is impractical. The heat flow is estimated from the real component of the electrical power; then, the temperature is estimated by a transfer function that approximates the thermal response of the system. The transfer function can be derived analytically from a lumped-element approximation or calibrated experimentally by using a system identification method. The proposed method is demonstrated on a piezoelectric stack actuator used in a high-speed nanopositioning device. A second-order transfer function estimates the temperature to within 3 ∘ C of a reference measurement for a range of operating conditions. The proposed method is suitable for protecting piezoelectric actuators in applications where direct temperature measurement is impractical, for example, due to space or wiring constraints.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}

McCourt, L. R.; Routley, B. S.; Ruppert, M. G.; Fleming, A. J.
Feasibility of gold nanocones for collocated tip-enhanced Raman spectroscopy and atomic force microscope imaging Journal Article
In: Journal of Raman Spectroscopy, vol. 55, iss. 3, pp. 336-346, 2024, ISSN: 1097-4555.
@article{J24a,
title = {Feasibility of gold nanocones for collocated tip-enhanced Raman spectroscopy and atomic force microscope imaging },
author = {L. R. McCourt and B. S. Routley and M. G. Ruppert and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2025/12/J24a.pdf},
doi = {10.1002/jrs.6625},
issn = {1097-4555},
year = {2024},
date = {2024-03-01},
urldate = {2024-03-01},
journal = {Journal of Raman Spectroscopy},
volume = {55},
issue = {3},
pages = {336-346},
abstract = {Microcantilever probes for tip-enhanced Raman spectroscopy (TERS) have a grainy metal coating that may exhibit multiple plasmon hotspots near the tip apex, which may compromise spatial resolution and introduce imaging artefacts. It is also possible that the optical hotspot may not occur at the mechanical apex, which introduces an offset between TERS and atomic force microscope maps. In this article, a gold nanocone TERS probe is designed and fabricated for 638 nm excitation. The imaging performance is compared to grainy probes by analysing high-resolution TERS cross-sections of single-walled carbon nanotubes. Compared to the tested conventional TERS probes, the nanocone probe exhibited a narrow spot diameter, comparable optical contrast, artefact-free images, and collocation of TERS and atomic force microscope topographic maps. The spot diameter was 12.5 nm and 19 nm with 638 nm and 785 nm excitation, respectively. These results were acquired using a single gold nanocone probe to experimentally confirm feasibility. Future work will include automating the fabrication process and statistical analysis of many probes.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
