2021 |
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24. | M. G. Ruppert; N. F. S. de Bem; A. J. Fleming; Y. K. Yong Characterization of Active Microcantilevers Using Laser Doppler Vibrometry Book Chapter In: Vibration Engineering for a Sustainable Future , Chapter 45, Springer, 2021, ISBN: 978-3-030-48153-7. Abstract | Links | BibTeX | Tags: AFM, Cantilever, MEMS, Piezoelectric Transducers and Drives, Smart Structures @inbook{Ruppert2021b, Active atomic force microscope cantilevers with on-chip actuation and sensing provide several advantages over passive cantilevers which rely on piezoacoustic base-excitation and the optical beam deflection measurement. Most importantly, these cantilevers provide clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. In this paper, we demonstrate the analysis and calibration steps for three active cantilever geometries with integrated piezoelectric actuation. For this purpose, laser Doppler vibrometry (LDV) is used to experimentally obtain the deflection mode shapes of the first three eigenmodes, calibrate actuation gains, and to determine the dynamic modal stiffnesses using the Brownian spectrum of the cantilever. The experimental values are compared with finite element simulations. | |
2020 |
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23. | D. S. Raghunvanshi; S. I. Moore; A. J. Fleming; Y. K. Yong Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling Journal Article In: IEEE/ASME Transactions on Mechatronics, vol. 25, no. 3, pp. 1479-1486, 2020, ISSN: 00346748. Abstract | Links | BibTeX | Tags: Actuator, Nanopositioning, piezoelectric, Piezoelectric Transducers and Drives @article{J20d, Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage. | |
2019 |
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22. | M. G. Ruppert; S. I. Moore; M. Zawierta; A. J. Fleming; G. Putrino; Y. K. Yong Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing Journal Article In: Nanotechnology, vol. 30, no. 8, pp. 085503, 2019. Abstract | Links | BibTeX | Tags: AFM, Cantilever, MEMS, Multifrequency AFM, Piezoelectric Transducers and Drives, Sensors, Smart Structures, SPM @article{Ruppert2018b, Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion. | |
2018 |
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21. | M. Omidbeike; B. S. Routley; A. J. Fleming Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor Proceedings Article In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018. Abstract | Links | BibTeX | Tags: Nanopositioning, Piezoelectric Transducers and Drives @inproceedings{C18d, This article proposes a novel technique for independent measurement of strain and temperature in piezoresistive strain sensors configured in a tee-rosette. The most notable property of piezoresistive sensors is their easy integration into MEMS fabrication processes and nanopositioning systems which makes them highly advantageous for both size and cost. The foremost disadvantage associated with piezoresistive sensors is high temperature sensitivity. The proposed estimator allows independent estimation of strain and temperature, which eliminates drift due to temperature variation. Experimental results are presented for motion sensing of a piezoelectric stack actuator which shows a strain measurement with an accuracy of +/-6% over a temperature range of -15C to 40C. | |
20. | S. Z. Mansour; R. J. Seethaler; A. J. Fleming A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators Proceedings Article In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018. Abstract | Links | BibTeX | Tags: Nanopositioning, Piezoelectric Transducers and Drives @inproceedings{C18f, This article presents a simple hysteresis model for piezoelectric actuators that can be used for simultaneous displacement-force control applications. The presented model maps the hysteresis voltage of an actuator to the charge passing through it. It can model asymmetric hysteresis loops and does not require to be inverted for real-time implementations. The presented model consists of two exponential functions which are described by only four parameters that are identified from a single identification experiment. Another advantage of the presented model over the existing models is that, it requires measurements of current rather than charge. A simultaneously varying displacement-force experiment is created to frame the model. An average absolute error value of 8% for the hysteresis voltage-charge fit is calculated. Consequent displacement and force fits have average absolute error value of 2.5%, which are similar to the best reported in displacement-force control literature. | |
19. | S. Z. Mansour; R. J. Seethaler; Y. R. Teo; Y. K. Yong; A. J. Fleming Piezoelectric Bimorph Actuator with Integrated Strain Sensing Electrodes Journal Article In: IEEE Sensors Journal, vol. 18, no. 4, 2018, ISSN: 1530-437X. Abstract | Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J18e, This article describes a new method for estimating the tip displacement of piezoelectric benders. Two resistive strain gauges are fabricated within the top and bottom electrodes using an acid etching process. These strain gauges are employed in a half bridge electrical configuration to measure the surface resistance change, and estimate the tip displacement. Experimental validation shows a 1.1 % maximum difference between the strain sensor and a laser triangulation sensor. Using the presented method, a damping-integral control structure is designed to control the tip displacement of the integrated bender | |
2017 |
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18. | S. Z. Mansour; R. J. Seethaler; Y. R. Teo; Y. K. Yong; A. J. Fleming Piezoelectric Bimorph Actuator with Integrated Strain Sensing Electrodes Proceedings Article In: IEEE Sensors, Glasgow, Scotland, 2017. Abstract | Links | BibTeX | Tags: Piezoelectric Transducers and Drives @inproceedings{C17f, This article describes a new method for estimating the tip displacement of piezoelectric benders. Two resistive strain gauges are fabricated within the top and bottom electrodes using an acid etching process. These strain gauges are employed in a half bridge electrical configuration to measure the surface resistance change, and estimate the tip displacement. Experimental validation shows a 1.1 % maximum difference between the strain sensor and a laser triangulation sensor. | |
17. | M. Omidbeike; Y. R. Teo; Y. K. Yong; A. J. Fleming Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor Proceedings Article In: IFAC World Congress, Toulouse, France, 2017. Abstract | BibTeX | Tags: Nanopositioning, Piezoelectric Transducers and Drives @inproceedings{C17d, This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are used for actuation and guidance, and another set are used for position sensing. This arrangement is shown to be highly sensitive to in-plane motion (in the x- and y-axis) and insensitive to vertical motion, which is ideal for position tracking control. The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error. | |
2016 |
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16. | S. A. Rios; A. J. Fleming Design of a Charge Drive for Reducing Hysteresis in a Piezoelectric Bimorph Actuator Journal Article In: IEEE/ASME Transactions on Mechatronics, vol. 21, no. 1, pp. 51-54, 2016. Abstract | Links | BibTeX | Tags: Piezoelectric Transducers and Drives, Robotics @article{J16f, This article describes the design of a charge drive for reducing the hysteresis exhibited by a piezoelectric bimorph bender. Existing charge drive circuits cannot be directly applied to bimorph benders since they share a common electrode. In this article a new charge drive circuit and electrical configuration is implemented that allows commonly available piezoelectric bimorphs to be linearized. This circuit consists of four major components, including, a high voltage amplifier, a differential amplifier, a piezoelectric load and a PI feedback controller. An isolation amplifier was used to achieve a differential amplifier with a high common-mode rejection ratio. The charge drive was tested by driving a series poled, three layer bimorph bender. The results demonstrate that the use of a charge drive can reduce the hysteresis from 26.8% to 2.1%. This work has identified an alternative feedforward method to improve the AC hysteresis performance of a piezoelectric bender by using a charge drive. | |
2015 |
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15. | S. A. Rios; A. J. Fleming A New Electrical Configuration for Improving the Range of Piezoelectric Bimorph Benders Journal Article In: Sensors and Actuators A: Physical, vol. 224, pp. 106-110, 2015. Abstract | Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J15a, This article describes a new electrical configuration for driving piezoelectric benders. The ‘Biased Bipolar’ configuration is compatible with parallel-polled, bimorph and multimorph benders. The new configuration is similar to the standard three-wire drive method where the top electrode is biased with a DC voltage and the bottom electrode is grounded. However, the new configuration uses an alternate DC bias voltage and adjusted range for the central electrode which allows the full range of positive and negative electric fields to be utilized. Using this technique, the predicted deflection and force can be increased by a factor of 2.2 compared to the standard two wire configuration and 1.3 times for the standard three wire configuration. These predictions were verified experimentally where the measured factor of improvement in displacement and force was of 2.4 and 1.3 compared to the standard two-wire and three-wire configurations. | |
14. | A. J. Fleming; Y. K. Yong Piezoelectric Actuators with Integrated High Voltage Power Electronics Journal Article In: IEEE/ASME Transactions on Mechatronics, vol. 20, no. 2, pp. 611-617, 2015. Abstract | Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J14b, This article explores the possibility of piezoelectric actuators with integrated high voltage power electronics. Such devices dramatically simplify the application of piezoelectric actuators since the power electronics are already optimized for the voltage range, capacitance, and power dissipation of the actuator. The foremost consideration is the thermal impedance of the actuator and heat dissipation. Analytical and finite-element methods are described for predicting the thermal impedance of a piezoelectric bender. The predictions are compared experimentally using thermal imaging on a piezoelectric bender with laminated miniature power electronics. | |
2014 |
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13. | S. A. Rios; A. J. Fleming A Novel Electrical Configuration for Three Wire Piezoelectric Bimorph Micro-Positioners Proceedings Article In: Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @inproceedings{C14g, | |
12. | S. A. Rios; A. J. Fleming Control of Piezoelectric Benders Using a Charge Drive Proceedings Article In: Proc. Actuator, Bremen, 2014. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @inproceedings{D14a, | |
2013 |
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11. | A. J. Fleming Charge drive with active DC stabilization for linearization of piezoelectric hysteresis Journal Article In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 60, no. 8, 2013. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J13d, | |
10. | S. A. Rios; A. J. Fleming Systems and Methods for Driving Piezoelectric Benders Miscellaneous Patent, 2013. BibTeX | Tags: patent, Piezoelectric Transducers and Drives @misc{P5, | |
2009 |
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9. | A. J. Fleming High-speed vertical positioning for contact-mode atomic force microscopy Proceedings Article In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pp. 522-527, Singapore, 2009. Links | BibTeX | Tags: Piezoelectric Transducers and Drives, SPM @inproceedings{C09c, | |
2008 |
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8. | A. J. Fleming Techniques and considerations for driving piezoelectric actuators at high-speed Proceedings Article In: Proc. SPIE Smart Materials and Structures, San Diego, CA, 2008. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @inproceedings{D08a, | |
2005 |
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7. | A. J. Fleming; S. O. R. Moheimani A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners Journal Article In: Review of Scientific Instruments, vol. 76, no. 7, pp. 073707(1-5), 2005. Links | BibTeX | Tags: Piezoelectric Transducers and Drives, SPM @article{J05d, | |
2004 |
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6. | A. J. Fleming; S. O. R. Moheimani In: Journal of Intelligent Material Systems and Structures, vol. 15, pp. 77–92, 2004. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J04c, | |
5. | A. J. Fleming; S. O. R. Moheimani Hybrid DC accurate charge amplifier for linear piezoelectric positioning Proceedings Article In: Proc. IFAC Symposium on Mechatronic Systems, Sydney, Australia, 2004. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @inproceedings{C04b, | |
2003 |
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4. | A. J. Fleming; S. O. R. Moheimani Precision current and charge amplifiers for driving highly capacitive piezoelectric loads Journal Article In: IEE Electronics Letters, vol. 39, no. 3, pp. 282–284, 2003. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J03g, | |
3. | A. J. Fleming; S. O. R. Moheimani Improved current and charge amplifiers for driving piezoelectric loads Proceedings Article In: Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2003. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @inproceedings{D03b, | |
2002 |
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2. | A. J. Fleming; S. Behrens; S. O. R. Moheimani Power harvesting from piezoelectric transducers Miscellaneous Patent, 2002. BibTeX | Tags: patent, Piezoelectric Transducers and Drives @misc{P2, | |
2000 |
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1. | A. J. Fleming; S. Behrens; S. O. R. Moheimani Synthetic impedance for implementation of piezoelectric shunt damping circuits Journal Article In: IEE Electronics Letters, vol. 36, no. 18, pp. 1525–1526, 2000. Links | BibTeX | Tags: Piezoelectric Transducers and Drives @article{J00a, |
2021 |
||
24. | Characterization of Active Microcantilevers Using Laser Doppler Vibrometry Book Chapter In: Vibration Engineering for a Sustainable Future , Chapter 45, Springer, 2021, ISBN: 978-3-030-48153-7. | |
2020 |
||
23. | Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling Journal Article In: IEEE/ASME Transactions on Mechatronics, vol. 25, no. 3, pp. 1479-1486, 2020, ISSN: 00346748. | |
2019 |
||
22. | Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing Journal Article In: Nanotechnology, vol. 30, no. 8, pp. 085503, 2019. | |
2018 |
||
21. | Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor Proceedings Article In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018. | |
20. | A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators Proceedings Article In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018. | |
19. | Piezoelectric Bimorph Actuator with Integrated Strain Sensing Electrodes Journal Article In: IEEE Sensors Journal, vol. 18, no. 4, 2018, ISSN: 1530-437X. | |
2017 |
||
18. | Piezoelectric Bimorph Actuator with Integrated Strain Sensing Electrodes Proceedings Article In: IEEE Sensors, Glasgow, Scotland, 2017. | |
17. | Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor Proceedings Article In: IFAC World Congress, Toulouse, France, 2017. | |
2016 |
||
16. | Design of a Charge Drive for Reducing Hysteresis in a Piezoelectric Bimorph Actuator Journal Article In: IEEE/ASME Transactions on Mechatronics, vol. 21, no. 1, pp. 51-54, 2016. | |
2015 |
||
15. | A New Electrical Configuration for Improving the Range of Piezoelectric Bimorph Benders Journal Article In: Sensors and Actuators A: Physical, vol. 224, pp. 106-110, 2015. | |
14. | Piezoelectric Actuators with Integrated High Voltage Power Electronics Journal Article In: IEEE/ASME Transactions on Mechatronics, vol. 20, no. 2, pp. 611-617, 2015. | |
2014 |
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13. | A Novel Electrical Configuration for Three Wire Piezoelectric Bimorph Micro-Positioners Proceedings Article In: Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014. | |
12. | Control of Piezoelectric Benders Using a Charge Drive Proceedings Article In: Proc. Actuator, Bremen, 2014. | |
2013 |
||
11. | Charge drive with active DC stabilization for linearization of piezoelectric hysteresis Journal Article In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 60, no. 8, 2013. | |
10. | Systems and Methods for Driving Piezoelectric Benders Miscellaneous Patent, 2013. | |
2009 |
||
9. | High-speed vertical positioning for contact-mode atomic force microscopy Proceedings Article In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pp. 522-527, Singapore, 2009. | |
2008 |
||
8. | Techniques and considerations for driving piezoelectric actuators at high-speed Proceedings Article In: Proc. SPIE Smart Materials and Structures, San Diego, CA, 2008. | |
2005 |
||
7. | A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners Journal Article In: Review of Scientific Instruments, vol. 76, no. 7, pp. 073707(1-5), 2005. | |
2004 |
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6. | In: Journal of Intelligent Material Systems and Structures, vol. 15, pp. 77–92, 2004. | |
5. | Hybrid DC accurate charge amplifier for linear piezoelectric positioning Proceedings Article In: Proc. IFAC Symposium on Mechatronic Systems, Sydney, Australia, 2004. | |
2003 |
||
4. | Precision current and charge amplifiers for driving highly capacitive piezoelectric loads Journal Article In: IEE Electronics Letters, vol. 39, no. 3, pp. 282–284, 2003. | |
3. | Improved current and charge amplifiers for driving piezoelectric loads Proceedings Article In: Proc. SPIE Symposium on Smart Structures & Materials -- Damping and Isolation, San Diego, CA, 2003. | |
2002 |
||
2. | Power harvesting from piezoelectric transducers Miscellaneous Patent, 2002. | |
2000 |
||
1. | Synthetic impedance for implementation of piezoelectric shunt damping circuits Journal Article In: IEE Electronics Letters, vol. 36, no. 18, pp. 1525–1526, 2000. |