@article{Omidbeike2021,

title = {Five-Axis Bimorph Monolithic Nanopositioning Stage: Design, Modeling, and Characterization},

author = {M. Omidbeike and S. I. Moore and Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/J21g.pdf},

doi = {10.1016/j.sna.2021.113125},

issn = {0924-4247},

year  = {2021},

date = {2021-09-16},

urldate = {2021-09-16},

journal = {Sensors and Actuators A: Physical},

volume = {332},

issue = {1},

abstract = {The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm. Analytical modeling and finite-element-analysis accurately predict the experimental performance. The stage was conservatively driven with 33% of the maximum voltage, which resulted in an X and Y travel range of 6.22 μm and 5.27 μm respectively; a Z travel range of 26.5 μm; and a rotational motion of 600 μrad and 884 μrad about the X and Y axis respectively. The first resonance frequency occurs at 883 Hz in the Z axis. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2021,

title = {Serial-kinematic monolithic nanopositioner with in-plane bender actuators},

author = {S. I. Moore and Y. K. Yong and M. Omidbeike and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/03/J21c.pdf},

doi = {https://doi.org/10.1016/j.mechatronics.2021.102541},

isbn = {0957-4158},

year  = {2021},

date = {2021-03-23},

journal = {Mechatronics},

volume = {75},

number = {102541},

abstract = {This article describes a monolithic nanopositioner constructed from in-plane bending actuators which provide greater deflection than previously reported extension actuators, at the expense of stiffness and resonance frequency. The proposed actuators are demonstrated by constructing an XY nanopositioning stage with a serial kinematic design. Analytical modeling and finite-element-analysis accurately predicts the experimental performance of the nanopositioner. A 10μm range is achieved in the X and Y axes with an applied voltage of +/-200 V. The first resonance mode occurs at 250 Hz in the Z axis. The stage is demonstrated for atomic force microscopy imaging.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{J20d,

title = {Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling},

author = {D. S. Raghunvanshi and S. I. Moore and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/09/J20d.pdf},

doi = {10.1109/TMECH.2020.2978241},

issn = {00346748},

year  = {2020},

date = {2020-06-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {25},

number = {3},

pages = {1479-1486},

abstract = {Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2020,

title = {AFM Cantilever Design for Multimode Q Control: Arbitrary Placement of Higher-Order Modes},

author = {S. I. Moore and M. G. Ruppert and Y. K. Yong},

url = {https://ieeexplore.ieee.org/document/9006926},

doi = {10.1109/TMECH.2020.2975627},

year  = {2020},

date = {2020-02-21},

journal = { IEEE/ASME Transactions on Mechatronics},

pages = {1-6},

abstract = {In the fast growing field of multifrequency atomic force microscopy (AFM), the benefits of using higher-order modes has been extensively reported on. However, higher modes of AFM cantilevers are difficult to instrument and Q control is challenging owing to their high frequency nature. At these high frequencies, the latencies in the computations and analog conversions of digital signal processing platforms become significant and limit the effective bandwidth of digital feedback controller implementations. To address this issue, this article presents a novel cantilever design for which the first five modes are placed within a 200 kHz bandwidth. The proposed cantilever is designed using a structural optimization routine. The close spacing and low mechanical bandwidth of the resulting cantilever allows for the implementation of Q controllers for all five modes using a standard FPGA development board for bimodal AFM and imaging on higher-order modes.},

note = {Early Access},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2019,

title = {Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning},

author = {S. I. Moore and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2019/10/J19c.pdf},

doi = {10.1109/LSENS.2019.2933065},

isbn = {2475-1472},

year  = {2019},

date = {2019-09-09},

journal = {IEEE Sensor Letters},

volume = {3},

number = {8},

pages = {2501503},

abstract = {Precision capacitive sensing methods encode the measurement in a high frequency signal, which requires demodulation. To extract the measurement, the signal is observed over many cycles limiting the bandwidth of the sensor and introducing an undesirable phase lag. To address this limitation, this article outlines a design, which fuses the output of a standard modulated capacitive sensor and a charge amplifier, providing an instantaneous capacitive measurement whose bandwidth is only limited by the speed at which the electronics operate.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2019c,

title = {An optimization framework for the design of piezoelectric AFM cantilevers},

author = {S. I. Moore and M. G. Ruppert and Y. K. Yong},

url = {https://www.sciencedirect.com/science/article/pii/S0141635919302260},

year  = {2019},

date = {2019-08-15},

journal = {Precision Engineering},

volume = {60},

pages = {130-142},

abstract = {To facilitate further miniaturization of atomic force microscopy (AFM) cantilevers and to eliminate the standard optical beam deflection sensor, integrated piezoelectric actuation and sensing on the chip level is a promising option. This article presents a topology optimization method for dynamic mode AFM cantilevers that maximizes the sensitivity of an integrated piezoelectric sensor under stiffness and resonance frequency constraints. Included in the formulation is a new material model C-SIMP (connectivity and solid isotropic material with penalization) that extends the SIMP model to explicitly include the penalization of unconnected structures. Example cantilever designs demonstrate the potential of the topology optimization method. The results show, firstly, the C-SIMP material model significantly reduces connectivity issues and, secondly, arbitrary cantilever topologies can produce increases in sensor sensitivity or resonance frequency compared to a rectangular topology.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2019,

title = {Design and Analysis of Low-Distortion Demodulators for Modulated Sensors},

author = { S. I. Moore and M. G. Ruppert and D. M. Harcombe and A. J. Fleming and Y. K. Yong },

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/05/J19d-reduced.pdf},

doi = {10.1109/TMECH.2019.2928592},

issn = {10834435},

year  = {2019},

date = {2019-07-17},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {24},

number = {4},

pages = {1861-1870},

abstract = {System-based demodulators in the form of a Kalman and Lyapunov filter have been demonstrated to significantly outperform traditional demodulators, such as the lock-in amplifier, in bandwidth sensitive applications, for example high-speed atomic force microscopy. Building on their closed loop architecture, this article describes a broader class of high-speed closed-loop demodulators. The generic structure provides greater flexibility to independently control the bandwidth and sensitivity to out-of-band frequencies. A linear time-invariant description is derived which allows the utilization of linear control theory to design the demodulator. Experimental results on a nanopositioner with capacitive sensors demonstrate the realization of arbitrary demodulator dynamics while achieving excellent noise rejection.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Ruppert2018b,

title = {Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing},

author = {M. G. Ruppert and S. I. Moore and M. Zawierta and A. J. Fleming and G. Putrino and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2019/08/Ruppert_2019_Nanotechnology_30_085503.pdf},

doi = {https://doi.org/10.1088/1361-6528/aae40b},

year  = {2019},

date = {2019-01-02},

journal = {Nanotechnology},

volume = {30},

number = {8},

pages = {085503},

abstract = {Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2017,

title = {Design and Characterization of Cantilevers for Multi-Frequency Atomic Force Microscopy},

author = {S. I. Moore and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/01/MNL.2016.0586.pdf},

doi = {10.1049/mnl.2016.0586},

year  = {2017},

date = {2017-03-01},

journal = {Micro & Nano Letters},

volume = {12},

number = {5},

pages = {315-320},

abstract = {The experimental characterisation of a set of microcantilevers targeted at use in multi-frequency atomic force microscope is presented. The aim of this work is to design a cantilever that naturally amplifies its harmonic oscillations which are introduced by nonlinear probe–sample

interaction forces. This is performed by placing the modal frequencies of the cantilever at integer multiples of the first modal frequency. The developed routine demonstrates the placement of the frequency of the second to fifth mode. The characterisation shows a trend that

lower-order modes are more accurately placed than higher-order modes. With two fabricated designs, the error in the second mode is at most 2.26% while the greatest error in the fifth mode is at 10.5%.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{Moore2017b,

title = {Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement},

author = {S. I. Moore and M. G. Ruppert and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/02/2190-4286-8-38.pdf},

year  = {2017},

date = {2017-02-06},

journal = {Beilstein Journal of Nanotechnology},

volume = {8},

pages = {358--371},

abstract = {Self-sensing techniques for atomic force microscope (AFM) cantilevers have several advantageous characteristics compared to the optical beam deflection method. The possibility of down scaling, parallelization of cantilever arrays and the absence of optical interference associated imaging artifacts have led to an increased research interest in these methods. However, for multifrequency AFM, the optimization of the transducer layout on the cantilever for higher order modes has not been addressed. To fully utilize an integrated piezoelectric transducer, this work alters the layout of the piezoelectric layer to maximize both the deflection of the cantilever and measured piezoelectric charge response for a given mode with respect to the spatial distribution of the strain. On a prototype cantilever design, significant increases in actuator and sensor sensitivities were achieved for the first four modes without any substantial increase in sensor noise. The transduction mechanism is specifically targeted at multifrequency AFM and has the potential to provide higher resolution imaging on higher order modes.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}