A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.

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Books

Design, Modeling and Control of Nanopositioning Systems

A. J. Fleming, K. K. Leang

Design, Modeling and Control of Nanopositioning Systems (Book)

Springer, London, UK, 2014, ISBN: 978-3319066165.

(Abstract | Links | BibTeX)

Journal Article

An Analytical approach to integral resonant control of second-order systems

M. Namavar, A. J. Fleming, M. Aleyaasin, K. Nakkeeran, S. S. Aphale

An Analytical approach to integral resonant control of second-order systems (Journal Article)

IEEE/ASME Transactions on Mechatronics, 19 (2), pp. 651–659, 2014.

(Links | BibTeX)

Measuring and predicting resolution in nanopositioning systems

A. J. Fleming

Measuring and predicting resolution in nanopositioning systems (Journal Article)

Mechatronics, 24 (8), pp. 605-618, 2014.

(Abstract | Links | BibTeX)

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Yik Ren Teo, D. Russell, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Journal Article)

Mechatronics, 24 (6), pp. 701-711, 2014.

(Abstract | Links | BibTeX)

A review of nanometer resolution position sensors: operation and performance

A. J. Fleming

A review of nanometer resolution position sensors: operation and performance (Journal Article)

Sensors and Actuators A: Physical, 190 , pp. 106-126, 2013.

(Links | BibTeX)

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

Y. K. Yong, A. J. Fleming, S. O. R. Moheimani

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner (Journal Article)

IEEE/ASME Transactions on Mechatronics, 18 (3), pp. 1113-1121, 2013.

(Links | BibTeX)

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density

A. J. Fleming, B. Ninness, A. G. Wills

Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density (Journal Article)

Review of Scientific Instruments, 84 , pp. 085112, 6 pages, 2013.

(Links | BibTeX)

A. J. Fleming

A method for measuring the resolution of nanopositioning systems (Journal Article)

Review of Scientific Instruments, 83 (8), pp. 086101, 2012.

(Links | BibTeX)

A. J. Fleming

Getting the message about noise across, loud and clear (Journal Article)

IEEE Control Systems, 32 (5), pp. 110-112, 2012.

(Links | BibTeX)

A. J. Fleming

Dual-stage vertical feedback for high speed-scanning probe microscopy (Journal Article)

IEEE Transactions on Control Systems Technology, 19 (1), pp. 156–165, 2011.

(Links | BibTeX)

B. J. Kenton, A. J. Fleming, K. K. Leang

A compact ultra-fast vertical nanopositioner for improving SPM scan speed (Journal Article)

Review of Scientific Instruments, 82 (12), pp. 123703(1-8), 2011.

(Links | BibTeX)

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Q control of an atomic force microscope micro-cantilever: a sensor-less approach (Journal Article)

IEEE/ASME Journal of Microelectromechanical Systems, 20 (6), pp. 1372–1381, 2011.

(Links | BibTeX)

A. J. Fleming

Quantitative SPM topographies by charge linearization of the vertical actuator (Journal Article)

Review of Scientific Instruments, 81 (10), pp. 103701(1-5), 2010.

(Links | BibTeX)

A. J. Fleming

Nanopositioning system with force feedback for high-performance tracking and vibration control (Journal Article)

IEEE Transactions on Mechatronics, 15 (3), pp. 433–447, 2010.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

Integrated strain and force feedback for high performance control of piezoelectric actuators (Journal Article)

Sensors and Actuators A, 161 (1-2), pp. 256–265, 2010.

(Links | BibTeX)

A. J. Fleming, B. J. Kenton, K. K. Leang

Bridging the gap between conventional and video-speed scanning probe microscopes (Journal Article)

Ultramicroscopy, 110 (9), pp. 1205–1214, 2010.

(Links | BibTeX)

A. J. Fleming, S. S. Aphale, S. O. R. Moheimani

A new method for robust damping and tracking control of scanning probe microscope positioning stages (Journal Article)

IEEE Transactions on Nanotechnology, 9 (4), pp. 438–448, 2010.

(Links | BibTeX)

Kam K. Leang, A. J. Fleming

High-speed serial-kinematic AFM scanner: design and drive considerations (Journal Article)

Asian Journal of Control, 11 (2), pp. 144-153, 2009.

(Links | BibTeX)

A. J. Fleming, A. G. Wills

Optimal periodic trajectories for band-limited systems (Journal Article)

IEEE Transactions on Control Systems Technology, 13 (3), pp. 552-562, 2009.

(Links | BibTeX)

A. J. Fleming

A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads (Journal Article)

Review of Scientific Instruments, 80 , pp. 104701(1-7), 2009.

(Links | BibTeX)

J. Maess, A. J. Fleming, F. Allgöwer

Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models (Journal Article)

Review of Scientific Instruments, 79 , pp. 015105(1-9), 2008.

(Links | BibTeX)

G. M. Clayton, S. Tien, S. Devasia, A. J. Fleming, S. O. R. Moheimani

Inverse-feedforward of charge controlled piezopositioners (Journal Article)

Mechatronics, 18 , pp. 273–281, 2008.

(Links | BibTeX)

A. J. Fleming, A. G. Wills, S. O. R. Moheimani

Sensor fusion for improved control of piezoelectric tube scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 15 (6), pp. 1265–6536, 2008.

(Links | BibTeX)

A. J. Fleming, K. K. Leang

Charge drives for scanning probe microscope positioning stages (Journal Article)

Ultramicroscopy, 108 (12), pp. 1551-1557, 2008.

(Links | BibTeX)

B. Bhikkaji, M. Ratnam, A. J. Fleming, S. O. R. Moheimani

High-performance control of piezoelectric tube scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 15 (5), pp. 853-866, 2007.

(Links | BibTeX)

S. S. Aphale, A. J. Fleming, S. O. R. Moheimani

High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control (Journal Article)

IET Micro & Nano Letters, 2 (1), pp. 9–12, 2007.

(Links | BibTeX)

A. J. Fleming, S. O. R. Moheimani

Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners (Journal Article)

IEEE Transactions on Control Systems Technology, 14 (1), pp. 33–44, 2006.

(Links | BibTeX)

Inproceedings

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement

D. Russel, A. J. Fleming, S. S. Aphale

Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement (Inproceeding)

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

(Links | BibTeX)

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy

Yik Ren Teo, D. Russel, S. S. Aphale, A. J. Fleming

Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy (Inproceeding)

Proc. IFAC World Congress, Cape Town, South Africa, 2014.

(Links | BibTeX)

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning

Yik. R. Teo, Arnfinn. A. Eielsen, Tommy. J. Gravdahl, Andrew J. Fleming

Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning (Inproceeding)

Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014.

(Links | BibTeX)

Active Damping Control Using Optimal Integral Force Feedback

Yik Ren Teo, A. J. Fleming

Active Damping Control Using Optimal Integral Force Feedback (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

A New Repetitive Control Scheme Based on Non-Causal FIR Filters

Yik Ren Teo, A. J. Fleming

A New Repetitive Control Scheme Based on Non-Causal FIR Filters (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners

D. Russell, A. J. Fleming, S. S. Aphale

Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners (Inproceeding)

Proc. American Control Conference, Portland, Oregon, 2014.

(Links | BibTeX)

A. J. Fleming

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis (Inproceeding)

Proc. IEEE American Control Conference, Washington, DC, 2013.

(BibTeX)

A. J. Fleming, K. K. Leang

An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning (Inproceeding)

Proc. IEEE American Control Conference, Washington, DC, 2013.

(Links | BibTeX)

A. J. Fleming

Position Sensor Performance in Nanometer Resolution Feedback Systems (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

(BibTeX)

A. J. Fleming

Time domain resolution of nanopositioning systems (Inproceeding)

Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

(Links | BibTeX)

A. J. Fleming, Y. K. Yong

Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

(Links | BibTeX)

M. Namavar, A. J. Fleming, S. S. Aphale

Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners (Inproceeding)

Proc. European Control Conference, Zurich, Switzerland, 2013.

(BibTeX)

A. J. Fleming, B. Ninness, A. G. Wills

Spectral Estimation using Dual Sensors with Uncorrelated Noise (Inproceeding)

Proc. IEEE Sensors, Baltimore, MA, 2013.

(BibTeX)

Yik R. Teo, A. J. Fleming

Resolution of Sensors with Capacitive Source Impedance (Inproceeding)

Proc. IEEE Sensors, Baltimore, MA, 2013.

(BibTeX)

J. Y. Zhang, A. J. Fleming

Performance evaluation of a highly dynamic objective lens positioning system with dual sensor technology (Inproceeding)

Proc. 13th International Conference of the European Society for Precision Engineering and Nanotechnology, Berlin, Germany, 2013.

(BibTeX)

A. J. Fleming

Estimating the resolution of nanopositioning systems from frequency domain data (Inproceeding)

Proc. IEEE International Conference on Robotics and Automation, pp. 4786-4791, St. Paul, MN, 2012.

(Links | BibTeX)

A. J. Fleming

Measuring picometer nanopositioner resolution (Inproceeding)

In Proc. Actuator, Bremen, 2012.

(Links | BibTeX)

A. J. Fleming

A method for reducing piezoelectric non-linearity in scanning probe microscope images (Inproceeding)

Proc. American Control Conference, pp. 2861–2866, San Francisco, CA, 2011.

(Links | BibTeX)

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Passive piezoelectric shunt control of an atomic force microscope microcantilever (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.

(Links | BibTeX)

Y. K. Yong, A. J. Fleming, S. O. R. Moheimani

Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Inproceeding)

Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, Changchun, China, 2011.

(Links | BibTeX)

M. Fairbairn, S. O. R. Moheimani, A. J. Fleming

Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control (Inproceeding)

Proc. Australian Control Conference, Melbourne, Australia, 2011.

(Links | BibTeX)

A. J. Fleming

High speed nanopositioning with force feedback (Inproceeding)

Proc. American Control Conference, pp. 4969–4974, Baltimore, MD, 2010.

(Links | BibTeX)

A. J. Fleming

Ultra-fast dual-stage vertical positioning for high performance SPMs (Inproceeding)

Proc. American Control Conference, pp. 4975–4980, Baltimore, MD, 2010.

(Links | BibTeX)

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Support

Supported by the Australian Research Council, the University of Newcastle, and CDSC